Oxford-100-Manual.pdf - 第265页

Equipment Manual Oxford Instruments Plasma Technology WARNING Plasma lab ICP 180 BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY. Printed: 18-Jan-06. 8:44 Test Point TP 10 REAR VIEW SIDE V…

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Plasma
lab
ICP
180
Oxford
Instruments
Plasma Technology
WARNING
Equipment
Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
7.3.2
Automatch
gives
reflected
power
of
2%
to
5%
1)
Ensure
that
the
automatch
covers are securely
fitted
and
that
both
Auto/Manual
switches are
set
to
AUTO.
2)
Switch
on
the
ICP
RF
supply,
then
set
the
forward
power
to
500W.
3)
Observe
the
reflected power.
Adjust
error
signal
potentiometer
RV1
by
about
one
turn
each
way. The capacitors
will
adjust
automatically
in response:
find
the
lowest
reflected
power
point.
4)
Adjust
error
signal
potentiometer
RV2
by
about
one
turn
each way. The capacitors
will
adjust
automatically
in
response:
find
the
lowest
reflected
power
point.
5)
Repeat Steps
3)
and
4)
until
the
best match in obtained; <2% reflected
power
should be
possible.
6)
Increase
the
RF
power
to
1000W and
if
required,
repeat
Steps
3)
to
5).
7)
SAFETY Always measure
the
RF
radiation
during
and
after
adjustments
to
the
automatch.
Issue
4:
January 06
ICP
180 Source
Page
24
of
26
Printed:
1B-Jan-06. B:44
Equipment
Manual
Oxford
Instruments
Plasma
Technology
WARNING
Plasma
lab
ICP
180
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
Printed: 18-Jan-06. 8:44
Test Point
TP
10
REAR VIEW
SIDE VIEW
Fig 6: Automatch components
ICP
180 Source
Page
25
of
26
RV2 PARK
POTENTIOMETER
RV1
PARK
POTENTIOMETER
Issue
4:
January 06
Equipment
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
Ie
P180
OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yalton,
Bristol,
BS494AP
Tel: +44(0)1934837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A BakerAvenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free
+1
800-447-4717
Fax:
+1
9783698287
Email: info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Olto-von-Guericke Ring 10,
0-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122937175
Email: plasma@oxford.de
Issue
4:
January 06
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's
Republic
of
China
(Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86
1065188160/1/2
Fax: +86 1065188155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
ICP
180 Source
Page
26
of
26
People's Republic
of
China
(Shanghai)
Oxford Instruments China
Room 14-F,
NO.1
Plaza
800 Nanjing East Road
Shanghai 200001
Tel: +86 216360 8530
Fax:
+862163608535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte.
Ltd
371
Beach Road,
#02-07 Keypoint
Singapore 199597
Tel:
+6563376848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1F, No
23
Jing-Shang 19
1h
Street,
Hsinchu, Taiwan
Tel:
+6563376848
Fax:
+6563376286
Email: oipt.sales@oxford-
instruments.com.sg
Printed: 18-Jan-06, 8:44