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System Manual Oxford Instruments Plasma Technology WARNING Plasma lab and lonfab BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1· HEALTH AND SAFETY. Systems without turbomolecular pumps: 4) Pump the system fo…

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Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
8.1
About
this
section
This section gives guidance
for
the
uninstallation
of
a
Plasma
lab
or
lonfab
system
prior
to
moving
it
to
another
location
or
disposing
of
it. Guidance
is
also given
for
the
disposal
of
a
system.
The guidance given
is
by
necessity
of
a general nature;
detail
will
vary
depending
on system
type, customer's site, etc.
IMPORTANT:
BEFORE
UNINSTALLING THE SYSTEM, ENSURE THAT ALL PERSONNEL
WHO WILL
BE
INVOLVED HAVE READ
AND
UNDERSTOOD SECTION 1
'HEALTH
AND
SAFETY'
OF
THE
SYSTEM
MANUAL.
8.2
Uninstalling
the
system
To uninstall
the
system, carry
out
the
following
sub-sections in sequence.
8.2.1
8.2.2
General
considerations
for
shutting
the
system
down
The main use
of
this
document
will
be
when
a customer requires
to
move
a system
to
another
location. This
will
involve
uninstalling
the
system,
moving
the
system components and
then
reinstalling
the
system.
An
important
consideration
is
the
length
of
time
between
shutting
the
system
down
and
powering
the
system up. The
longer
the
system
is
shut
down,
the
greater
the
need
to
remove
as
much residue gas
as
possible.
It
is
very
important
that
the
customer
follows
the
pump
manufacturer's
instructions
for
purging
pumps
prior
to
shut
down.
For periods
of
more
than
a
few
days
shutdown,
24
hours
of
N
z
purging
is
often
recommended.
If
the
system
is
to
be reinstalled,
the
vacuum system should be
left
fully
vented
with
dry
nitrogen,
with
the
pump
and gas supply service
points
capped.
Shutting
the
system
down
1)
Chamber
1
or
ion
source
z
plasma cleaning should be conducted
to
remove residues.
Use
the
normal
cleaning process according
to
the
most recent use
of
the
tool.
2)
Process gas supply lines
must
be
pumped
down
using
the
system
at
least
as
far
as
the
last isolation valve upstream
from
the
gas pod. Consider
whether
the
gases should
be
pumped
out
back
to
the
cylinder,
or
whether
the
gas installation has
alternative
means
of
exhausting hazardous gases. For
shut
down
periods
of
longer
than
two
days,
purge
the
gas lines
with
N
z
.
3)
Pump
the
system according
to
the
following
criteria:
Systems
fitted
with
turbomolecular
pumps:
a)
For a shut
down
period
of
less
than
two
days,
pump
the
system
for
three
hours.
b) For a
shutdown
period
of
longer
than
two
days: Pump
the
system
for
one
hour
with
a
small N
z
flow,
followed
by
a
12-hour
pump
down
with
no
gas
flow.
1 For Plasmalab systems,
refer
to
Section 6 (Maintenance)
of
the
System Manual.
z Run a 'discharge'
for>
1
hour
at
-500W
(15cm
or
35cm ion source),
-150W
(3cm
ion
source).
Issue
1:
February 00
Uninstallation
and Disposal
Page 8-2
of
6 Printed: 25-May-05. 10:18
System
Manual
Oxford
Instruments
Plasma Technology
WARNING
Plasma
lab
and
lonfab
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
Systems
without
turbomolecular
pumps:
4)
Pump
the
system
for
one
hour
with
a small N
z
flow,
then
pump
for
a
further
hour
with
no
gas
flow.
5)
The process chamber, load lock and
transfer
chamber
(if
applicable) should be
vented
with
dry
nitrogen
and
the
process gas
inlet
blanked.
6)
Ensure
that
the
system has been
shut
down
in accordance
with
the
procedure given
in Section 5 (Operating Instructions) and
Appendix
B
(Operation
and
Maintenance
of
Turbomolecular
Pumps).
7)
Depending on system type, ensure
that
the
front
panel compressed
air
lockout
valves are set
to
their
OFF
positions and padlocked. (e.g. slit valves,
gate
valves,
RGA,
etc.
if
fitted)
8.2.3
Disconnecting
the
services
IMPORTANT:
BEFORE
DISCONNECTING
ANY
OF
THE
SERVICES, ENSURE THAT THEY
ARE
TURNED
OFF.
E.G. COMPRESSED AIR
AND
GAS SUPPLY VALVES
SET
TO THEIR
OFF
POSITIONS
AND
ELECTRICAL SUPPLIES SWITCHED
OFF
AND
LOCKED OUT.
1)
Ensure
that
all covers and panels are
fitted
and
attach
notices
to
the
system
indicating
that
the
system
is
not
ready
for
service.
2)
Disconnect
the
electrical supply
from
the
PC.
3)
Disconnect
the
electrical supply
from
the
safety isolation box
to
the
system console.
4)
At
the
system
PC,
disconnect
the
monitor,
keyboard and mouse,
then
disconnect
the
control
cable(s)
from
the
PC
to
the
system console.
5)
Disconnect
the
safety
earth
(ground)
between
the
system and
the
gas pod,
if
the
gas
pod
is
not
bonded
to
the
system.
6)
Disconnect
the
cooling
circuits
from
the
system console.
Coolant
may be removed,
if
so
wished
by
using
low
pressure « 1 bar gauge) compressed air. Do
not
seal
the
cooling
circuits
tightly.
7)
Disconnect
the
gas
outlet
line(s) and
control
cable
from
the
gas
pod
to
the
system
services panel.
8)
Disconnect
the
gas supplies
to
the
gas
pod
(all gas supply valves closed).
9)
Disconnect
the
compressed air supply
from
the
system services panel(s) and
from
the
gas pod.
10) Disconnect
the
Nitrogen
purge
lines
to
the
system services panel(s) and
the
rotary
vane pump(s).
11) Disconnect
the
rotary
pump(s)
from
the
system and cap
the
pump
ports and
the
system vacuum ports.
12) Disconnect
the
rotary
vane
pump
exhaust line.
Printed: 25-May-05, 10:18
Uninstallation
and Disposal
Page 8-3
of
6
Issue
1:
February 00
Plasma
lab
and
lonfab
Oxford
Instruments
Plasma
Technology
WARNING
System Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
13) Disconnect
the
extraction
collars
on
the
process chamber(s) (e.g.
ICP
process
chambers) and
the
gas
pod
from
the
extraction
systems.
8.2.4
8.2.5
Decontamination
Remove any hazardous residues/deposits
from
the
process chamber,
ion
sources, pumps and
pump
lines, gas lines and
mass
flow
controllers in accordance
with
local safety regulations.
Refer
to
equipment
manufacturer's
manuals
as
necessary.
Note
that
if
the
system
is
to
be
moved
and re-installed,
it
may be acceptable
to
purge
the
gas
lines /
mass
flow
controllers and
ion
sources
(if
fitted)
with
dry
nitrogen
and seal all
connections.
Dismantling
the
system
components
WARNING
LIFTING HEAVY
OBJECTS
INCORRECTLY CAN CAUSE SEVERE INJURY
When
handling
heavy
system
components
such as
the
system
unit
or
vacuum
pumps,
ensure
that
the
appropriate
lifting
equipment,
operated
by
fully
trained
personnel,
is
used.
When
heavy
rack-mounted
components
are
handled,
ensure
that
the
weight
is
safely
distributed
between
sufficient
personnel.
WARNING
TOPPLING (TIPOVER) HAZARD - SOME SYSTEM COMPONENTS, E.G. ROBOTIC HANDLERS
AND
AUTOMATIC LOAD LOCKS I TRANSFER CHAMBERS (ESPECIALLY
IF
FITTED WITH
CASSETTE
LOAD LOCKS) CAN
TOPPLE
CAUSING SEVERE INJURY.
When
transporting
or
manoeuvring
the
system
frames,
robotic
handlers
etc.,
ensure
that
they
remain
vertical
at
all
times
and
use
the
appropriate
lifting
I
handling
equipment.
Ensure
that
any
support
frames,
supplied
with
the
system,
are
correctly
fitted
whenever
the
system
is
transported
I
manoeuvred
or
dismantled
for
service I
maintenance.
It
is
entirely
the
user's
responsibility
to
ensure
that
all
components
are
supported
safely
before
and
during
any
transporting,
manoeuvring
or
maintenance
operations.
Support
frames
prOVided
by
Oxford
Instruments
Plasma
Technology
are
not
necessarily
adequate
for
any
such
operations.
The absence
of
a
support
frame
must
not
be
taken
as
an
indication
that
no
further
precautions
need
to
be
made
before
such
operations
are
undertaken.
1)
In
the
grey area, remove
the
rotary
vane
pump
from
its
mounting
and prepare
it
for
transport
in accordance
with
the
pump
manufacturer's
instructions. Refer
to
the
manufacturer's
literature
in
Volume
3
of
this manual.
2)
Remove
the
gas
pod
from
its
mounting
and prepare
it
for
transport.
3)
Prepare
the
system
PC
for
transport.
Issue
1:
February 00
Uninstallation
and Disposal
Page 8-4
of
6 Printed: 25-May-05. 10:18