Oxford-100-Manual.pdf - 第40页

Plasma lab System 100 Oxford Instruments Plasma Technology System Manual LF GENERATOR RF GENERATOR ROUGHING VALVE ~ WAFERLIFT GAS POD CONTROL TURBO PURGE VALVE PENNING/PIRANI PRESSURE GAUGE AUTOMATIC PRESSURE CONTROLLER …

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System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
System 100
3.3.1
3.3.2
3.3.3
Frame
The
frame
is
constructed
from
steel
with
removable
access
panels. Casters and adjustable
feet
fitted
to
the
bottom
of
the
frame
enable
it
to
be easily manoeuvred,
then
levelled and locked
into
position.
Power
box
assembly
The
power
box
assembly
is
mounted
on
the
outside
of
the
frame. This distributes mains
power
to
the
+24V and ±15V
power
supply
unit,
the
frame
mounted
electrical units and
the
remote
auxiliary units. For circuit details
of
the
unit,
refer
to
the
relevant
drawing
in
Volume
2
of
this manual.
A 24V EMO (Emergency
Off)
circuit connects all
the
EMO
buttons
mounted
externally
on
the
machine.
If
any
of
these EMO
buttons
are pressed in, all
the
power
outputs
from
the
power
supply boxes are disabled.
NOTE: Freestanding auxiliary units such
as
water
recirculators, Residual
Gas
Analysers, and
the
system
control
PC,
are
not
powered
via
the
base
unit
power
box. These
require
dedicated electrical service points. These accessories remain live
when
the
system
EMO
is
pressed.
If
it
is
required
that
all accessories are
powered
off
when
the
EMO
is
pressed,
the
user must
supply a
power
distribution
unit
with
outlets
for
the
accessories, and
contact
the
factory
for
electrical
access
to
the
machine EMO circuit.
System
controller
The system
is
controlled
from
a
remote
IBM
compatible
PC
computer
terminal
using
Oxford
Instruments Plasma Technology's
'PC
2000'
software
via a Programmable Logic
Controller
(PLC)
housed
in
the
console cabinet.
See
Fig 3.1.
Printed: 22-Mar-06, 7:29
Description
Page 3-3
of
22
UC
Davis 94-721001
Issue
1: March 06
Plasma
lab
System
100
Oxford
Instruments
Plasma
Technology
System Manual
LF GENERATOR
RF GENERATOR
ROUGHING VALVE
~
WAFERLIFT
GAS POD CONTROL
TURBO PURGE VALVE
PENNING/PIRANI PRESSURE GAUGE
AUTOMATIC PRESSURE CONTROLLER
CHAMBER VENT VALVE
HEATER CONTROLLER
CONTROL & STATUS SIGNALS
<E--
END POINT
<E--
CM PRESSURE GAUGE
<E--
WATER FLOW SWITCH INTERLOCKS
~
TURBO CONTROLLER
~
TURBO BACKING VALVE
1------------------------
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
I
~
CM GAUGE ISOLATION VALVE
<:J
C>
~
GATE VALVE
<E--
CHAMBER LID INTERLOCK
<E--
VACSTAT (CHAMBER)
<E--
CHAMBER THERMOCOUPLE
~
GENERATOR INTERLOCK
~
LOAD
LOCK
VENT VALVE
~
LOAD
LOCK
TURBO PURGE VALVE
~
LOAD
LOCK
ROUGHING VALVE
~
LOAD
LOCK
TURBO BACKING VALVE
<E--
LOAD
LOCK
SLIT VALVE OPEN
<E--
LOAD
LOCK
SLIT VALVE CLOSED
<E--
LOAD
LOCK
LID OPEN INTERLOCK
<E--
LOAD
LOCK
LID CLOSED
<E--
EMO BUTTON IN
<E--
PUMPS
<E--
LOADING ARM HOME
PERSONAL
COMPUTER
RUNNING
'PC 2000'
SOFTWARE
ARCNET
SERIAL DIGITAL
COMMUNICATIONS
PLC
INTERFACE
- - - - -
PCB
MEA
-
PL1
- - -
--
MAEB
-
PL2
- - -
--
PEA 1
-
J8
- - -
--
PEA 2
-
J9
- - - - -
PEA 3 -
J10
- - - - -
CPU
- - -
--
PEA 4
-
J11
- - -
--
NT/PS
JY
BATTERY
Fig 3.1: Typical control system
The system may be run
from
the
PC
terminal
in manual mode,
that
is
using direct 'real
time'
control
over
the
process,
or
in
automatic
mode
where
the
system performs
the
entire
process
according
to
previously
entered
recipes. The extensive
Oxford
Instruments Plasma Technology
process library supports all
Plasma
lab
System
100 configurations. A
full
description
of
the
'PC
2000'
control
instructions
is
provided in Section
5.
For details
of
the
control
wiring,
see
the
relevant drawings in Volume 2
of
this manual.
UC
Davis 94-721001
Issue
1:
March 06
Description
Page 3-4
of
22 Printed: 22-Mar-06, 7:29
System
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
System
100
3.3.4
Interlocks
There are
two
types
of
interlocks used
on
the
Plasma
lab
System
100,
hardware
and software.
In
all areas,
the
hardware
interlock
will
override
any
software
interlock. The
hardware
interlocks, and
their
effect
on
the
system components
in
the
case
of
an
interlock
becoming
open circuit are
as
follows:
The electrical interlocks are divided
into
two
circuits
controlling
the
power
to
the
system.
1)
The mains
power
connection
is
made
to
a system Power
Distribution
Unit.
The Power
Distribution
Unit
will
disable all
of
its
power
outputs
under
the
following
conditions:
a)
If
the
Emergency
Off
button
is
pressed.
b)
If
there
is
an
interruption
of
the
power
input
to
the
system.
c)
If
the
Power
Distribution
Unit
external
facility
interlock
sensor
link
becomes
open circuit.
NOTE: The Power
Distribution
Unit
external
facility
interlock
sensor
link
enables
the
interlocks
of
external sensors, e.g. gas
detectors, exhaust scrubbers, etc.,
to
be
monitored
by
the
Power
Distribution
Unit. External
interlock
contacts connected
to
this
link
should
be
Normally
Closed, i.e.
faulting
to
an Open Circuit.
2)
The system
internal
24V supply, comprises a process line, a chamber lid line and a
water
flow
switch
(where
fitted):
The 24V process line, which controls
the
process gases and plasma
power
supply
units,
will
be disabled
if
the
Vacuum Safety Switch
is
open circuit, i.e. Chamber
Pressure> 600 mbar.
The 24V chamber
lid
line
will
be disabled
if
the
chamber lid
is
OPEN,
leaving
the
system
controller
operational,
but
disabling all system components.
Printed: 22-Mar-06, 7:29
Description
Page 3-5
of
22
UC
Davis 94-721001
Issue
1: March 06