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PlasmalabSystem 1 00 Oxford Instruments Plasma Technology WARNING System Manual BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1· HEALTH AND SAFETY. WARNING IF THE ELECTRONICS ARE DISCONNECTED FROM THE BODY TU…

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System
Manual
Oxford
Instruments Plasma Technology
WARNING
PiasmaiabSystem100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 • HEALTH
AND
SAFETY.
6.9
6.9.1
6.9.2
6.9.2.1
Vacuum
system
Active
Pirani
gauge
Refer
to
the
manufacturer's
literature
in
Volume
3
for
details
of
the
following
maintenance:
a)
Atmosphere
and vacuum
adjustment.
b) Filter cleaning.
Capacitance
manometer
Six-monthly
(or
as necessary)
1)
Remove
the
capacitance
manometer
from
the
process chamber.
WARNING
ISOPROPYL ALCOHOL
IS
HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT
USE
IT
NEAR A NAKED FLAME
OR
ENERGISED
ELECTRICAL
EQUIPMENT.
Carefully
pour
a measure
of
Isopropyl Alcohol (IPA)
at
room
temperature
into
the
pressure-measurement cavity. Do
not
allow
IPA
to
come
into
contact
with
electronic
components.
Agitate
the
solvent
carefully
and
then
pour
it
out.
CAUTION
Because
the
diaphragm
in
the
gauge
is
thin
tensioned
metal,
it
can
be
destroyed
by
sudden changes in
temperature
or
by
clumsy
handling.
Re-install
the
gauge,
allowing
sufficient
time
for
outgassing
of
the
cavity and
diaphragm
prior
to
operation.
NOTE:
Refer
to
the
manufacturer's
manual
for
calibration
adjustments.
6.9.3
Penning
gauge
The
following
applies
to
an Edwards Active Inverted
Magnetron
gauge.
If
a
different
Penning
gauge
is
fitted,
refer
to
the
manufacturer's
literature.
Printed: 22-Mar-06. 7:41
Maintenance
Page 6-13
of
22
UC
Davis 94-721001
Issue
1:
March 06
PlasmalabSystem100
Oxford
Instruments
Plasma Technology
WARNING
System
Manual
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1·
HEALTH
AND
SAFETY.
WARNING
IF
THE
ELECTRONICS ARE DISCONNECTED FROM
THE
BODY
TUBE
AND
THE
BODY
TUBE
IS
LEFT
CONNECTED TO A
VACUUM
SYSTEM, THEN
IF
A PLASMA DISCHARGE
IS
MAINTAINED
IN
THE
VICINITY
OF
THE
BODY TUBE,
THE
ANODE
AND
GUARD RING
OF
THE
BODY TUBE ASSEMBLY
MAY
BECOME CHARGED UP.
SWITCH
OFF
THE
POWER SUPPLY
BEFORE
REMOVING
THE
GAUGE FROM
THE
VACUUM
SYSTEM. HIGH VOLTAGES EXIST INTERNALLY
IN
THE
GAUGE.
THE
CONNECTING CABLE SHOULD
BE
REMOVED
BEFORE
ATTEMPTING
TO
DISMANTLE
THE
GAUGE.
6.9.3.1
Dismantling
the
body
tube
The
body
tube
assembly can
be
removed
from
the
gauge by
gripping
the
magnet
housing
and
twisting
the
body
tube
flange
clockwise
to
unlock
the
bayonet
fitting.
The
tube
can
then
be
completely
withdrawn
from
the
gauge
electronics I
magnet
housing.
The electrode can be removed
from
the
body
tube
for
cleaning I replacement
as
follows:
Using
the
flat
spanner
provided
with
the
spares kit, locate
the
two
lugs in
the
end
of
the
collar and
rotate
anti-clockwise
to
completely
unscrew. Once
the
collar
is
removed,
the
anode
assembly and
O-ring
can be
withdrawn.
The
two
cathode
cups are removed
from
the
flange
end
of
the
body
tube
by releasing
the
circlip using a
pair
of
circlip pliers.
Note
the
correct
orientation
of
the
cups. The cup
with
the
reduced central
hole
size should be closest
to
the
O-ring end
of
the
body
tube.
Re-assembly
is
the
reverse procedure,
taking
care
not
to
bend
the
anode, and ensuring
that
it
is
centralised in
the
body
tube
when
tightening
the
threaded
collar.
UC
Davis 94-721001
Issue
1:
March 06
Maintenance
Page 6-14
of
22
Printed: 22-Mar-06,
7:41
System
Manual
Oxford
Instruments
Plasma Technology
WARNING
PiasmaiabSystem100
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION
1-
HEALTH
AND
SAFETY.
6.9.3.2
6.9.4
6.9.4.1
6.9.4.2
6.9.4.3
Cleaning
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT
USE
IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
The
cathode
cups,
body
tube
and anode assembly can be cleaned by firstly degreasing in a
proprietary
degreasing agent, and
then
thoroughly
soaking
in
a
laboratory
detergent.
After
soaking,
the
parts should
be
thoroughly
rinsed in clean
water
and
then
in Isopropyl Alcohol,
to
remove all traces
of
water.
The parts should be
dried
thoroughly.
Turbomolecular
pumps
Refer
to
the
manufacturer's
literature
in
Volume
3
for
details
of
maintenance required. Also,
refer
to
Appendix
B
'Operation
and
Maintenance
of
Turbomolecular
Pumps'.
Daily
Ensure
that
the
turbo
pump
temperature
is
sufficiently
high, i.e. >50°C. The
turbo
pump
temperature
can
be
monitored
on
the
turbo
pump
controller's
display. Refer
to
the
pump
manufacturer's
manual
for
details.
If
the
turbo
pump
temperature
is
too
low,
adjust
the
manually-operated
flow
valve
to
reduce
the
flow
rate
of
the
turbo
pump
cooling
water.
Re-greasing
of
turbo
pumps
fitted
to
process
chambers
The
following
instruction
applies
to
conventionally
greased
bearing
turbo
pumps, e.g.
the
Alcatel
ATP
series.
It
does
not
apply
to
Maglev
turbo
pumps.
To
prevent
damage
to
turbo
pumps
fitted
to
process chambers, OIPT
strongly
recommends
that
bearing
re-greasing
is
carried
out
periodically
after
every
2500
hours
of
pump
running
time.
Details
of
re-greasing are given in sub-section 6.9.4.3.
2000
to
8000
hours
(3
to
12
months):
pump
relubrication
CAUTION
Failure
to
perform
regular
pump
maintenance
will
result
in
pump
warranty
being
suspended.
Refer
to
the
manufacturer's
manual in
Volume
3
of
this manual.
Alcatel
ATP
series
turbo
pumps are
conventional
greased bearing pumps. Periodically, these
bearings need
to
be re-greased.
The re-greasing interval depends on a
number
of
factors; Refer
to
the
graph
in
the
Maintenance
section
of
the
manufacturer's
manual
to
establish
the
re-greasing interval
for
the
pump
in
your
system.
Remember
that
turbo
pumps
fitted
to
process chambers
must
be
re-greased
at
2500
hour
intervals.
The re-greasing interval
for
turbo
pumps
Printed: 22-Mar-06. 7:41
Maintenance
Page 6-15
of
22
UC
Davis 94-721001
Issue
1:
March 06