Oxford-100-Manual.pdf - 第266页
Equipment Manual Oxford Instruments Plasma Technology Plasma lab Ie P 180 OIPT locations worldwide UK Oxford Instruments Plasma Technolgy North End, Yalton, Bristol, BS494AP Tel: +44(0)1934837000 Fax: +44(0)1934837001 Em…
Equipment
Manual
Oxford
Instruments
Plasma
Technology
WARNING
Plasma
lab
ICP
180
BEFORE
PROCEEDING WITH
ANY
MAINTENANCE WORK, READ SECTION 1 - HEALTH
AND
SAFETY.
Printed: 18-Jan-06. 8:44
Test Point
TP
10
REAR VIEW
SIDE VIEW
Fig 6: Automatch components
ICP
180 Source
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25
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RV2 PARK
POTENTIOMETER
RV1
PARK
POTENTIOMETER
Issue
4:
January 06
Equipment
Manual
Oxford
Instruments
Plasma
Technology
Plasma
lab
Ie
P180
OIPT locations
worldwide
UK
Oxford Instruments Plasma Technolgy
North End, Yalton,
Bristol,
BS494AP
Tel: +44(0)1934837000
Fax: +44(0)1934837001
Email: plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A BakerAvenue Extension
Concord, MA 01742
Tel:
+1
9783699933
Toll Free
+1
800-447-4717
Fax:
+1
9783698287
Email: info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Olto-von-Guericke Ring 10,
0-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122937175
Email: plasma@oxford.de
Issue
4:
January 06
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email: oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People's
Republic
of
China
(Beijing)
Oxford Instruments China
Room 714, Office Tower
3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86
1065188160/1/2
Fax: +86 1065188155
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
ICP
180 Source
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People's Republic
of
China
(Shanghai)
Oxford Instruments China
Room 14-F,
NO.1
Plaza
800 Nanjing East Road
Shanghai 200001
Tel: +86 216360 8530
Fax:
+862163608535
Email: ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte.
Ltd
371
Beach Road,
#02-07 Keypoint
Singapore 199597
Tel:
+6563376848
Fax: +65 6337 6286
Email: oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1F, No
23
Jing-Shang 19
1h
Street,
Hsinchu, Taiwan
Tel:
+6563376848
Fax:
+6563376286
Email: oipt.sales@oxford-
instruments.com.sg
Printed: 18-Jan-06, 8:44
All
OIPT
Systems
RF
Automatic Matching Unit
Issue
6:
February 2005
Page 1
of
20