Process Lens PL Service Manual_EN.pdf - 第134页
3 Replacing spare parts 13 4 Se rv ic e Ma nu al P ro ce ss L en s PL - 0 3/ 20 25
3 Replacing spare parts
Service Manual Process Lens PL - 03/2025 133
Fig.190: TSP400 version number
► Check that the Version(1) of the circuit
board is of number6 and above. See
label.
Installation
Follow the removal instructions in section “Removing the TSP400” in reverse order for installation.
3 Replacing spare parts
134 Service Manual Process Lens PL - 03/2025
4 Machine - Calibrations
Service Manual Process Lens PL - 03/2025 135
4 Machine - Calibrations
The calibration sequence and tests´ objectives of the Process Lens PL are listed below.
Step Procedure Functional check Tooling
1 2D/3D Calibration
●
Verify the 2D and 3D optical focal
planes
●
Grating check
●
Scale
●
Rotation
●
Zero reference
●
Resolution specification:
– H15: 15 µm/pixel
– HD10: 10 µm/pixel
– HD20: 20 µm/pixel
●
Camera Rotational specification: not ex-
ceeding ±0.5°
2D/3D Calibration tool
2 Machine Zero Cali-
bration
●
Capture the zero position of the
machine
None
3 One Point Dynamic
Test
●
Positional accuracy check of stop posi-
tion after a move
●
Objective: Delta offset from target
≤10µm
One Point Dynamic jig
4a Table Mapping -
Single lane
●
XY mapping
●
Gantry alignment
●
Objective: Delta of Gantry to fiducials´
positions ≤20µm
Note
1. Left to Right and Right to Left Map-
ping procedures are same.
Left-Right Transport – input mapping
plate from left
Right-Left Transport – input mapping
plate from right
2. ONLY perform when necessary
SIPLACE Mapping
plate Version5
Coaxial light
4b Table Mapping - Dual
lane
●
XY mapping
●
Gantry alignment
●
Objective: Delta of Gantry to fiducials
positions ≤ 20μm
Note:
●
ONLY perform when necessary
SIPLACE Mapping
plate Version5
5 2D/3D Calibration
●
Same as in Step1
6 Golden Unit Cali-
bration
●
Height calibration Objective: Cg and
Cgk >1.33 for all the 9areas of the
FOV
2D/3D Calibration tool
NOTICE
Differences in lighting adjustment H15 & HD Vision Module
Note the lighting adjustment differences between H15 & HD Vision Module. HD Vision Module in gen-
eral is brighter than the same lighting value in standard H15 Vision Module. Therefore, the good light-
ing setting value under HD Vision Module may differ in standard H15 Vision Module.