4OM-1429-008_w.pdf - 第130页
1-69 0904-002 5.2 List of Important Servicing Parts T able 4A16 4U260238 224A0024 223Q0564 223M0050 223L0260 223L0261 223L0262 Note (a) The numbers entitled "Recommended Y ears" indicate the referential values.…
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5.2 List of Important Servicing Parts
5.2 List of Important Servicing Parts
Listed below are the parts for which maintenance work is required in several
years. The list below is provided for your reference.
Note
Since replacement work of important service parts requires highly
sophisticated technique, consult our service personnel for details
Table 4A15
Block
Name
Product Name Part No. Part Name Q'ty
Recommended
Years
Note (a)
Exploded
View
Remarks
Head
Section
Solenoid Valve 23D10009 ACCESSORY,
SV
48 3 Fig. M-6
Nozzle Shaft
Assembly Nozzle
Shaft Diffusion Plate
(Small)
022L0011
222L0864
213D1166
ASSY,
GUIDE, LINEAR
GUIDE, LINEAR
DISK
48
Sets
(1)
(1)
――― Fig. M-6
Hexagon Socket
Head Bolts M2×6
221A0121 BOLT, HEX-SCT 96 ――― Fig. M-6
For Nozzle Shaft
Attachment
Note (b)
O Ring for Nozzle
Shaft
SO-010-19
226A0187 SEAL 96 2 Fig. M-6
O Ring for Nozzle
Shaft
SO-010-21
226A0105 SEAL 48 2 Fig. M-6
Spring for Nozzle
Shaft
222M1300 SPRING, COMP 48 ――― Fig. M-6
Packing for Nozzle
DYR-3
226A0189 SEAL 96 2 Fig. M-6
O Ring for Filter
SO-006-12
226A0127 SEAL 144 2 Fig. M-6
Linear Measure
Sensor
Linear Measure
Sensor Light Emitter
23G00302
23G00308
SENSOR, PELEC
SENSOR, PELEC
4Sets ――― Fig. M-6
Outer Diffusion Plate 213D1169 DISK 4 ――― Fig. M-6
Inner Diffusion Plate 213D1167 DISK 4 ――― Fig. M-6
Hexagon Socket
Head Bolt M1.6 × 4
221A0332 BOLT, HEX-SCT 28 ――― Fig. M-6
For Diffusion Plate
Attachment
Note (b)
Top Block 211G4547 BLOCK 48 ――― Fig. M-6
Cam Follower (φ2.5) 222H0134 CAMFOLLOWER 48 ――― Fig. M-6
Hexagon Socket
Head Bolt M1.6 × 3
221A0331 BOLT, HEX-SCT 96 ――― Fig. M-6
For Top Block
Attachment
Note (b)
Sensor PM-L24 23G10059 SENSOR,
PHOTO
4 3 Fig. M-4
Sensor PM-F24 23G10087 SENSOR,
PHOTO
20 3 Fig. M-2,3
Slip Ring 223C0201 COUPLING 4 2 Fig. M-5
Servo Motor 0860A000 MOTOR,
AC-SERVO
4 2 Fig. M-3
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5.2 List of Important Servicing Parts
Table 4A16
4U260238
224A0024
223Q0564
223M0050
223L0260
223L0261
223L0262
Note
(a) The numbers entitled "Recommended Years" indicate the referential
values.
(b) Do not reuse the bolts detached for maintenance.
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