3_AVS-V2_MCT-UM-internal_EN_07-2019.pdf - 第98页
ASM AVS - U SER M ANUAL P AGE 98 OF 182 g. XY -P lot : Show s t he r esul t of the selec ted mea surem ent depen ding o n the Fil ter s ett ing s abo ve. Thi s v iew shows the res ult o f X - an d Y -axi s to geth er in …
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On the bottom of the chart, you can activate or deactivate all the evaluation lines.
- If you want to see either X-Offset values or Y-Offset values is organized by the filter set-
tings on top of the graph.
But if you want to see both, X- and Y- Offsets in one picture, you need to activate the
checkbox “X & Y” on the bottom of the graph.
The Y-Offset then is always shown in the same color, but in dashed line.
Set color of graph:
The color for the graph is normally set automatically for each measurement.
But you can change the color for each measurement.
Highlight the line of the corresponding measurement in the table and press “Colors” in the
menue bar.
NOTICE
After changing the color you
need to refresh the view, e.g.
by changing to the Recipe tab
and back to Analysis.
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g. XY-Plot:
Shows the result of the selected measurement depending on the Filter settings above.
This view shows the result of X- and Y-axis together in one graph.
The same principles apply for evaluating the chart and in respect of the meanings of
the auxiliary lines as for the "Single Value Chart".
Sigma limit
Specification limits (Nom-
inal value), red lines
The Sigma Limit is shown
in a circle (ellipsis).
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h. Gauss (bell curve):
Shows the result of the selected measurement depending on the Filter settings above.
With the view of »Frequency« the »bell-shaped curve« (normal distribution) can be
shown (Gauss). The same principles apply for evaluating the chart and in respect of
the meanings of the auxiliary lines as for the "Single Value Chart".
As a fundamental principle:
• The narrower and higher the bell curve, the better the result.
• The curve should ideally be centered around zero.
Sigma limits
Bell-shaped curve
(Normal distribution)
Specification limits
(Nominal value)
Numbers measuring points
(here in 6µm steps)
Mean value
(Mean)