4OM-1003-007.pdf - 第122页
1.4 Maintenance Method 051 1-001 1-56-1 AIL01ETRP Fig. 4A68-2 As grease flows to the diffusion plates from the anchor bolts located under the plates, see the photos above and wipe it off with a cotton swab, etc. Be sure …

0511-002 1-56 AIL01ETRP
1.4 Maintenance Method
1.4.5 Cleaning of Diffusion Plate (Upper Surface)
The following describes how to wipe off grease from the upper sur-
face of the diffusion plate.
(1) Select the head to be degreased and detach all nozzles.
Refer to "1.4.4 Detachment and Attachment of Vacuum Nozzle" for
how to detach the nozzles.
Fig. 4A68-1
(2) Select the [Head Turn n] button (*1) and press the [ON] button (en-
titled "MOVE"). In 2 seconds, press the [ENABLE] button on the
operation panel. The head at Station #6 rotates in increments of 120
degrees. Repeat the head rotation and wiping until the diffusion plates
are completely degreased.
(3) Press the [Back] or the [Next] button (*2) to change the head No.
described on the [Head Turn n] button (*1) to the desired one to be
degreased.
By using the [Back] or the [Next] button, it becomes possible to ro-
tate a head at Stations #7 and #5.
*1
*2

1.4 Maintenance Method
0511-001 1-56-1 AIL01ETRP
Fig. 4A68-2
As grease flows to the diffusion plates from the anchor bolts located
under the plates, see the photos above and wipe it off with a cotton
swab, etc.
Be sure to clean the lower surfaces of the diffusion plates
as shown below.
Fig. 4A68-3
(4) Select the head to be degreased subsequently and repeat the above-
described degreasing operation. Follow this procedure until all diffu-
sion plates are degreased.
Refer to "1.4.4 Detachment and Attachment of Vacuum Nozzle" for
how to select a head.
Head Anchor Bolt
Wipe off grease from
these areas.
Mirror
Note

1.4.6 Disassembly, Cleaning, and Lubrication of Miniature Stroke
Bearing
Since the disassembly, cleaning, and lubrication work of the minia-
ture stroke bearings requires highly sophisticated technique,
consult our service personnel for details.
••
••
• Time for Inspection, Cleaning, and Lubrication
Perform inspections every month.
Cleaning and lubrication are required when dirt and dust have accu-
mulated on the sliding part of the shaft and the movement is ham-
pered or on the hollow portion of the shaft and the suction force has
deteriorated.
Be sure to clean the miniature stroke bearing every 6 months.
••
••
• Disassembly of Miniature Stroke Bearing
Disassembly Procedure
(1) Set all nozzles to "L Level".
Refer to "4.2.2 "Manual Opn" Tab" in "Sec-
tion 6 (Volume 2: Operation (Supervisor))" for
the detailed information on how to change
the nozzle level.
(2) Make the X/Y table escape.
Refer to "4.2.1 "Noz Cleaning" Tab" in "Sec-
tion 6 (Volume 2: Operation (Supervisor))" for
the detailed information on how to make the
X/Y table retreat.
(3) Turn off the power and air sources of the ma-
chine to discharge the air from the machine.
(4) Detachment of Head Assembly
(4-1) Loosen 2 M4L12 bolts (upper ones) and 2
M4L16 bolts (lower ones) fastening the
head and detach the head assembly.
(4-2) Pull out the air hose.
(4-3) Pull the head forward to detach.
Fig. 4A69
0511-003 1-57
AIL01ETRP
1.4 Maintenance Method
Notice