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051 1-001 2-57-2 AIL01ETRP 3.3 Error IDs and Remedial Procedures Error ID Item Description 060571 T able-Y Axis Servo Alarm Overload: high load 060572 T able-Y Axis Servo Alarm Overload: low load 060573 T able-Y Axis Ser…

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0511-001 2-57-1 AIL01ETRP
3.3 Error IDs and Remedial Procedures
Error ID Item Description
060401 Table-Y Axis Limit (+) Limit error has been detected.
060402 Table-Y Axis Limit (-) Limit error has been detected.
(Cause 1) An optical beam of the sensor is shielded.
(Cause 2) Dirt adheres to the light shield plate and the optical beam of the sensor is shielded.
(Remedy 1) Turn off the power supply and move the X/Y table to the position where opera-
tions can be performed more easily.
Re-attach the light shield plate and the sensor securely (remove the looseness).
Re-supply power to the machine and perform the zeroing operation.
(Remedy 2) Wipe off dirt on the sensor and re-perform the zeroing operation for all axes.
060502 Table-Y Axis Servo Alarm User constant breakdown.
[Shutdown touch sw key and mainbreaker sw off.]
060503 Table-Y Axis Servo Alarm Main circuit encoder error
060504 Table-Y Axis Servo Alarm User constant setting error.
[Shutdown touch sw key and mainbreaker sw off.]
060505 Table-Y Axis Servo Alarm Combination error
060509 Table-Y Axis Servo Alarm Dividing ratio setting error.
[Shutdown touch sw key and mainbreaker sw off.]
06050a Table-Y Axis Servo Alarm Encoder model unmatched.
[Shutdown touch sw key and mainbreaker sw off.]
060510 Table-Y Axis Servo Alarm Overcurrent or Heat Sink Overheated.
[Shutdown touch sw key and mainbreaker sw off.]
060530 Table-Y Axis Servo Alarm Regeneration error detected
060532 Table-Y Axis Servo Alarm Regenerative overload
060533 Table-Y Axis Servo Alarm Main circuit power supply wiring error
060540 Table-Y Axis Servo Alarm Overvoltage
060541 Table-Y Axis Servo Alarm Undervoltage
060551 Table-Y Axis Servo Alarm Overspeed
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0511-001 2-57-2 AIL01ETRP
3.3 Error IDs and Remedial Procedures
Error ID Item Description
060571 Table-Y Axis Servo Alarm Overload: high load
060572 Table-Y Axis Servo Alarm Overload: low load
060573 Table-Y Axis Servo Alarm Dynamic break overload
060574 Table-Y Axis Servo Alarm Overload of Surge Current Limit Resistor
06057a Table-Y Axis Servo Alarm Heat sink overheated
060581 Table-Y Axis Servo Alarm Encoder backup error.
[Shutdown touch sw key and mainbreaker sw off.]
060582 Table-Y Axis Servo Alarm Encoder checksum error.
[Shutdown touch sw key and mainbreaker sw off.]
060583 Table-Y Axis Servo Alarm Absolute encoder battery error
060584 Table-Y Axis Servo Alarm Encoder data error.
[Shutdown touch sw key and mainbreaker sw off.]
060585 Table-Y Axis Servo Alarm Encoder overspeed
060586 Table-Y Axis Servo Alarm Encoder overheated
0605b1 Table-Y Axis Servo Alarm Reference speed input read error
0605b2 Table-Y Axis Servo Alarm Reference torque input read error
0605b3 Table-Y Axis Servo Alarm Current detection error
0605b6 Table-Y Axis Servo Alarm Gatearay error
0605bf Table-Y Axis Servo Alarm System alarm.
[Shutdown touch sw key and mainbreaker sw off.]
0605c1 Table-Y Axis Servo Alarm Servo overrun detected
0605c6 Table-Y Axis Servo Alarm Closed loop a/b
0605c7 Table-Y Axis Servo Alarm Closed loop c
0605c8 Table-Y Axis Servo Alarm Encoder clear error (multi turn limit).
[Shutdown touch sw key and mainbreaker sw off.]
0605c9 Table-Y Axis Servo Alarm Encoder communications error.
[Shutdown touch sw key and mainbreaker sw off.]
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
Error ID Item Description
0605ca Table-Y Axis Servo Alarm Encoder parameter error.
[Shutdown touch sw key and mainbreaker sw off.]
0605cb Table-Y Axis Servo Alarm Encoder echoback error.
[Shutdown touch sw key and mainbreaker sw off.]
0605cc Table-Y Axis Servo Alarm Multiturn limit disagreement
0605d0 Table-Y Axis Servo Alarm Position error pulse overflow
0605e0 Table-Y Axis Servo Alarm No option
[Shutdown touch sw key and mainbreaker sw off.]
0605e1 Table-Y Axis Servo Alarm Option time out
[Shutdown touch sw key and mainbreaker sw off.]
0605e2 Table-Y Axis Servo Alarm Option WDC error
[Shutdown touch sw key and mainbreaker sw off.]
0605e5 Table-Y Axis Servo Alarm WDT error
0605e6 Table-Y Axis Servo Alarm Communication error
0605e7 Table-Y Axis Servo Alarm Application module detection error
0605ea Table-Y Axis Servo Alarm Servo pack error
[Shutdown touch sw key and mainbreaker sw off.]
0605eb Table-Y Axis Servo Alarm Servo pack access error
[Shutdown touch sw key and mainbreaker sw off.]
0605ec Table-Y Axis Servo Alarm Servo pack WDC error
0605ed Table-Y Axis Servo Alarm Command not execute
0605f1 Table-Y Axis Servo Alarm Power line open phase
0605f5 Table-Y Axis Servo Alarm Servomotor disconnection alarm
0605f6 Table-Y Axis Servo Alarm Servomotor disconnection alarm
060590 Table-Y Axis Servo Alarm Excessive position error warning
060591 Table-Y Axis Servo Alarm Overload warning
060592 Table-Y Axis Servo Alarm Regenerative overload warning
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0511-001 2-57-3 AIL01ETRP
3.3 Error IDs and Remedial Procedures