4OM-1003-007.pdf - 第84页
Fig. 4A22 051 1-002 1-21 AIL01ETRP 1.3 Maintenance Spots Cam Follower Opening of Head Cap Miniature Stroke Bearing 1M2 Every Month Inspection/Lubrication (DAPHNE EPONEX GREASE No. 1) Move the cam follower to the lowest p…

(9) Head Section
1.3 Maintenance Spots
0511-004 1-20 AIL01ETRP
Fig. 4A20
Vacuum Nozzle 3M7
Every 3 Months Inspection
Check the condition of the vacuum nozzle. When the
nozzle end is worn out, replace it with a new one.
Note: Refer to "1.4.4 Detachment and Attachment of
Vacuum Nozzle" for the detailed information on
how to detach or attach the vacuum nozzle.
Lower Surface of Diffusion Plate 1M1
Every Month Cleaning
When dirt and dust have accumulated on the lower
surface of the diffusion plate, wipe them off with the
lens cleaning cloth (the standard accessory part).
Note: Never use neither solvent nor ethanol.
Otherwise, the diffusion plate may crack.
Vacuum Nozzle 1W7
Every Week Cleaning
• Clean the tapered area of the nozzle with a lens
cleaning cloth (standard accessory part).
• Detach the nozzle and blow air to remove dirt and
dust.
Note: When the nozzle is heavily stained, detach and
clean it with an ultrasonic cleaner or a rag
soaked in alcohol.
If alcohol is used with the nozzle being attached,
it will adhere to the diffusion plate, causing the
plate to crack.
Refer to "1.4.3 Cleaning of Vacuum Nozzle" for
details.
Upper Surface of Diffusion Plate 1W6-1
Every Week Checking/Cleaning
Check that no grease adheres to the upper surface of
the diffusion plate. When grease adheres to the upper
surface of the diffusion plate, wipe it off with a clean
cotton swab, etc.
Also, use a mirror to wipe off grease from the lower
surface of the diffusion plate.
Note: Never use neither solvent nor ethanol. Other-
wise, the diffusion plate may crack.
Refer to "1.4.5 Cleaning of Diffusion Plate
(Upper Surface)" for how to wipe off oil from the
upper surface of the diffusion plate.

Fig. 4A22
0511-002 1-21
AIL01ETRP
1.3 Maintenance Spots
Cam Follower
Opening of Head Cap
Miniature Stroke Bearing 1M2
Every Month Inspection/Lubrication (DAPHNE EPONEX GREASE No. 1)
Move the cam follower to the lowest position.
Push up the vacuum nozzle and release your finger. When the vacuum nozzle does not
move down smoothly, cleaning and lubrication are required.
Note: Refer to "1.4.6 Disassembly, Cleaning, and Lubrication of Miniature Stroke
Bearing".
Miniature Stroke Bearing 6M11
Every 6 Months Cleaning
• Refer to "1.4.6 Disassembly, Cleaning, and Lubrication of Miniature Stroke Bearing"
and wash the MSB shaft and outer cylinder with kerosene for 5 to 10 minutes, using
the ultrasonic cleaner.
• When the upper and lower seals are scratched or deformed or foreign substances
have accumulated on them, replace them with new ones (630 048 0849).
Fig. 4A21

1.3 Maintenance Spots
0511-004 1-22 AIL01ETRP
(10) Linear Measure Detection Section and Linear Measure Sensors in
Nozzle Detection Section
Filters 1M5
Every Month Checking
Check the filter. When it is extremely dirty,
replace it with a new one.
Note: Refer to "1.4.2 Filter Replacement of
Head Section" for the replacement.
Fig. 4A23
Fig. 4A24
Light Projecting/Receiving Glasses 1W8
Every Week Cleaning
When dirt and dust have accumulated on the
surfaces of the glass covers, wipe them off
with a lens cleaning cloth (standard
accessory part).
When the surfaces are heavily stained, apply
a small amount of absolute ethanol to a
cotton swab and wipe the surfaces gently
with the cotton swab.