4OM-1003-007.pdf - 第81页

Fig. 4A17 X/Y T able Section 1.3 Maintenance Spots 0305-001 1-18 AIL01ETRP

(7) X/Y Table Section

1.3 Maintenance Spots

0305-001 1-17 AIL01ETRP

Fig. 4A16

Fig. 4A17 X/Y Table Section

1.3 Maintenance Spots

0305-001 1-18 AIL01ETRP

(8) Light Source Device for Component Recognition

1.3 Maintenance Spots

Lamp for Component Recognition 1Y1

Yearly Replacement

Replace the lamp every year or every 5,000 hours.

Refer to "1.4.7 Lamp Replacement of Light Source

Device for Recognition Lighting" for the replace-

ment.

0511-002 1-19 AIL01ETRP

Fig. 4A18

Fig. 4A19