4OM-1003-007.pdf - 第234页

Error ID Item Description 050530 T able-X Axis Servo Alarm Regeneration error detected 050532 T able-X Axis Servo Alarm Regenerative overload 050533 T able-X Axis Servo Alarm Main circuit power supply wiring error 050540…

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Error ID Item Description
050401 Table-X Axis Limit (+) Limit error has been detected.
050402 Table-X Axis Limit (-) Limit error has been detected.
(Cause 1) An optical beam of the sensor is shielded.
(Cause 2) Dirt adheres to the sensor and the optical beam is shielded.
(Remedy 1) Turn off the power supply and move the X/Y table to the position where opera
tions can be performed more easily.
Re-attach the light shield plate and the sensor securely (remove the looseness).
Re-supply power to the machine and perform the zeroing operation.
(Remedy 2) Wipe off dirt on the sensor and re-perform the zeroing operation.
050502 Table-X Axis Servo Alarm User constant breakdown.
[Shutdown touch sw key and mainbreaker sw off.]
050503 Table-X Axis Servo Alarm Main circuit encoder error
050504 Table-X Axis Servo Alarm User constant setting error.
[Shutdown touch sw key and mainbreaker sw off.]
050505 Table-X Axis Servo Alarm Combination error
050509 Table-X Axis Servo Alarm Dividing ratio setting error.
[Shutdown touch sw key and mainbreaker sw off.]
05050a Table-X Axis Servo Alarm Encoder model unmatched.
[Shutdown touch sw key and mainbreaker sw off.]
050510 Table-X Axis Servo Alarm Overcurrent or Heat Sink Overheated.
[Shutdown touch sw key and mainbreaker sw off.]
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0511-002 2-53 AIL01ETRP
3.3 Error IDs and Remedial Procedures
Error ID Item Description
050530 Table-X Axis Servo Alarm Regeneration error detected
050532 Table-X Axis Servo Alarm Regenerative overload
050533 Table-X Axis Servo Alarm Main circuit power supply wiring error
050540 Table-X Axis Servo Alarm Overvoltage
050541 Table-X Axis Servo Alarm Undervoltage
050551 Table-X Axis Servo Alarm Overspeed
050571 Table-X Axis Servo Alarm Overload: high load
050572 Table-X Axis Servo Alarm Overload: low load
050573 Table-X Axis Servo Alarm Dynamic break overload
050574 Table-X Axis Servo Alarm Overload of Surge Current Limit Resistor
05057a Table-X Axis Servo Alarm Heat sink overheated
050581 Table-X Axis Servo Alarm Encoder backup error.
[Shutdown touch sw key and mainbreaker sw off.]
050582 Table-X Axis Servo Alarm Encoder checksum error.
[Shutdown touch sw key and mainbreaker sw off.]
050583 Table-X Axis Servo Alarm Absolute encoder battery error
050584 Table-X Axis Servo Alarm Encoder data error.
[Shutdown touch sw key and mainbreaker sw off.]
050585 Table-X Axis Servo Alarm Encoder overspeed
050586 Table-X Axis Servo Alarm Encoder overheated
0505b1 Table-X Axis Servo Alarm Reference speed input read error
0505b2 Table-X Axis Servo Alarm Reference torque input read error
0505b3 Table-X Axis Servo Alarm Current detection error
0505b6 Table-X Axis Servo Alarm Gatearay error
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0511-002 2-54 AIL01ETRP
3.3 Error IDs and Remedial Procedures
Error ID Item Description
0505bf Table-X Axis Servo Alarm System alarm.
[Shutdown touch sw key and mainbreaker sw off.]
0505c1 Table-X Axis Servo Alarm Servo overrun detected
0505c6 Table-X Axis Servo Alarm Closed loop a/b
0505c7 Table-X Axis Servo Alarm Closed loop c
0505c8 Table-X Axis Servo Alarm Encoder clear error (multi turn limit).
[Shutdown touch sw key and mainbreaker sw off.]
0505c9 Table-X Axis Servo Alarm Encoder communications error.
[Shutdown touch sw key and mainbreaker sw off.]
0505ca Table-X Axis Servo Alarm Encoder parameter error.
[Shutdown touch sw key and mainbreaker sw off.]
0505cb Table-X Axis Servo Alarm Encoder echoback error.
[Shutdown touch sw key and mainbreaker sw off.]
0505cc Table-X Axis Servo Alarm Multiturn limit disagreement
0505d0 Table-X Axis Servo Alarm Position error pulse overflow
0505d1 Table-X Axis Servo Alarm Motor-load position error over
0505e0 Table-X Axis Servo Alarm No option
[Shutdown touch sw key and mainbreaker sw off.]
0505e1 Table-X Axis Servo Alarm Option time out
[Shutdown touch sw key and mainbreaker sw off.]
0505e2 Table-X Axis Servo Alarm Option WDC error
[Shutdown touch sw key and mainbreaker sw off.]
0505e5 Table-X Axis Servo Alarm WDT error
0505e6 Table-X Axis Servo Alarm Communication error
0505e7 Table-X Axis Servo Alarm Application module detection error
0505ea Table-X Axis Servo Alarm Servo pack error
[Shutdown touch sw key and mainbreaker sw off.]
0505eb Table-X Axis Servo Alarm Servo pack access error
[Shutdown touch sw key and mainbreaker sw off.]
0505ec Table-X Axis Servo Alarm Servo pack WDC error
0505ed Table-X Axis Servo Alarm Command not execute
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0511-002 2-55 AIL01ETRP
3.3 Error IDs and Remedial Procedures