4OM-1345-009_w.pdf - 第117页

1-60-1 AKHEMT -ID 4.6 Replacement Procedure of V acuum Filters T ime of Replacement Replace the ﬁ lters with new ones every three months. V acu um Filt ers V acuum Filters Fig. 4A59 Filter Holder Required Item Filter Rep…

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AKHEMT-ID

(22) To check the results of the teaching operation, press the [Teach Result]

button.

The results are displayed, enabling you to check the offset data.

Fig. 4A58 "LINEAR MEASURE CLEANING" Window

([Teach Result] Button Selected)

(23) Press the [End] button.

When the teaching operation is executed, a conﬁ rmation dialog box

opens. Select either the [Yes] or the [No] button to determine whether

or not the data should be saved.

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4.5 Cleaning of Linear Measure Sensor

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AKHEMT-ID

4.6 Replacement Procedure of Vacuum Filters

Time of Replacement

Replace the ﬁ lters with new ones every three months.

Vacuum

Filters

Vacuum

Filters

Fig. 4A59 Filter Holder

Required Item

Filter Replacement Jig

Fig. 4A60 Filter Replacement Jig

Replacement Procedure

(1) Slide the ﬁ lter fastener to the left and release the lock of the ﬁ lter

holder.

Filter UnlockedFilter Locked

Fig. 4A61

Notice

Be sure to slide the ﬁ lter fastener so that it does not interfere with the

wiring, etc.

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4.6 Replacement Procedure of Vacuum Filters

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AKHEMT-ID

(2) Insert the ﬁ lter replacement jig into the hole on the ﬁ lter holder and

pull it up upward.

Hole on Filter Holder

Jig with pulled-out holder (filters)

Filter Replacement Jig

Fig. 4A62

(3) Replace the two vacuum ﬁ lters on the pulled-out holder with new

ones.

(4) Direct the larger hole on the ﬁ lter holder outward and insert the

holder with the ﬁ lter replacement jig.

Be sure to push it deep enough until it stops (down to the lowest

limit).

Notice

The holder should not interfere with the wirings for valves, etc. In addition,

the wires should not be caught in the upper and lower areas of the top

block.

Filter Fastening Claw

<NG: Insufficient Insertion>

The upper surface of the

filter holder is higher than

that of the filter fastening

claw.

<OK: Sufficient Insertion>

The filter fastening claw is

higher than that of the filter

holder.

Fig. 4A63

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4.6 Replacement Procedure of Vacuum Filters