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1-32 AKHEMT -ID Nozzle Change Cam Face (Lower Side) Every 3 Months Cleaning and Lubrication (DAPHNE EPONEX GREASE No. 1) Required T ime: 2 minutes If a foreign substance adheres to the nozzle change cam face, remove them…
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AKHEMT-ID
0811-003
3.3 Inspection, Cleaning, and Lubrication Spots
3.3.7 Head Section
Linear Measure Sensors
(Light Emitter and Receiver)
Every Day Cleaning
Required Time: 5 minutes
If sebum and oil, etc., adhere to the surface
of the linear measure sensor, wipe them
off with a cotton swab soaked in absolute
ethanol.
Nozzle U/D Linear Guides (NL Axes)
(2 places)
Every Month Cleaning and Lubrication
(DAPHNE EPONEX GREASE No. 1)
Required Time: 5 minutes
(1) Wipe off the old grease with a rag and
apply a small amount of new grease
with a syringe.
(2) To smooth out the grease, move the
NL axis up and down by 10 mm
through a manual alignment operation
(inching operation).
(3) Wipe off excess grease.
Take ample care not to leave
any waste threads after
cleaning.
Use No. 18 (green) nozzle.
No.18
Note
Notice
Notice
Diffusion Plate
Every Month Cleaning
Required Time: 2 minutes
(1) Store all nozzles in the nozzle stocker
(housing) through window navigations.
(2) Wipe the diffusion p late with a dry
lens cleaning cloth.
Sebum or oil should not
adhere to the surface of the
diffusion plate.
Refer to "6. "Nozzle Change"
Window" in "Chapter 3 (Vol. 2)"
for the procedure of nozzle storage.
Nozzle U/D Ball Screw (NL Axis)
Every 3 Months Cleaning and Lubrication
(DAPHNE EPONEX GREASE No. 1)
Required Time: 5 minutes
Wipe off the old grease with a rag and
apply a small amount of new grease to the
groove of the ball screw with a syringe.
Use No. 19 (brown) nozzle.
Note
No. 19
Reference
Coupling
Fig. 4A20
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AKHEMT-ID
Nozzle Change Cam Face (Lower Side)
Every 3 Months Cleaning and Lubrication
(DAPHNE EPONEX GREASE No. 1)
Required Time: 2 minutes
If a foreign substance adheres to the
nozzle change cam face, remove them with
a pair of tweezers.
Apply grease (0.01 cc) to the cam face with
a syringe.
(a) "0.01 cc" is almost equivalent
to the size of "1005 Chip".
(b)
Use No. 19 (brown) nozzle.
Note
No. 19
Fig. 4A21
0602-001
3.3 Inspection, Cleaning, and Lubrication Spots
1-33
AKHEMT-ID
Cam Followers
Every 3 Months Cleaning and Lubrication
(DAPHNE EPONEX GREASE No. 1)
Required Time: 5 minutes
If foreign substances adhere to the cam
followers, remove them with a pair of
tweezers.
Apply grease (0.01 cc) to the upper sides
of the cam followers with a syringe.
(a) "0.01 cc" is almost equivalent
to the size of "1005 Chip".
(b)
Use No. 19 (brown) nozzle.
Center Spline
Every 3 Months Lubrication
(DAPHNE EPONEX GREASE No. 1)
Required Time: 4 minutes
Apply grease to the groove of the center
spline with a syringe.
Use No. 19 (brown) nozzle.
Note
No. 19
Note
No. 19
Nozzle Change Cam Face (Upper Side)
Every 3 Months Cleaning and Lubrication
(DAPHNE EPONEX GREASE No. 1)
Required Time: 5 minutes
If a foreign substance adheres to the cam
face, remove it with a pair of tweezers.
Apply grease (0.01 cc) to the upper side of
the cam face with a syringe.
(a) "0.01 cc" is almost equivalent
to the size of "1005 Chip".
(b)
Use No. 19 (brown) nozzle.
Note
No. 19
Vacuum Filters (12 places)
Every 3 Months Replacement
Required Time: 30 minutes
Pull up the vacuum filter with the filter
attachment/detachment jig and replace it
with a new one.
Refer to "4.6 Replacement Procedure
of Vacuum Filters" for the
replacement procedure.
Fig. 4A22
0605-002
3.3 Inspection, Cleaning, and Lubrication Spots