4OM-1345-009_w.pdf - 第119页
1-60-3 AKHEMT -ID (5) Shake it in the rotational direction and con fi rm that the it does not rotate. After that, pull out the fi lter replacement jig carefully so as not to pull up the inserted fi lter together and stay a …
1-60-2
AKHEMT-ID
(2) Insert the fi lter replacement jig into the hole on the fi lter holder and
pull it up upward.
Hole on Filter Holder
Jig with pulled-out holder (filters)
Filter Replacement Jig
Fig. 4A62
(3) Replace the two vacuum fi lters on the pulled-out holder with new
ones.
(4) Direct the larger hole on the fi lter holder outward and insert the
holder with the fi lter replacement jig.
Be sure to push it deep enough until it stops (down to the lowest
limit).
Notice
The holder should not interfere with the wirings for valves, etc. In addition,
the wires should not be caught in the upper and lower areas of the top
block.
OK
NG
Filter Fastening Claw
<NG: Insufficient Insertion>
The upper surface of the
filter holder is higher than
that of the filter fastening
claw.
<OK: Sufficient Insertion>
The filter fastening claw is
higher than that of the filter
holder.
Fig. 4A63
0605-001
4.6 Replacement Procedure of Vacuum Filters
1-60-3
AKHEMT-ID
(5) Shake it in the rotational direction and confi rm that the it does not
rotate. After that, pull out the fi lter replacement jig carefully so as
not to pull up the inserted fi lter together and stay afl oat.
(6) Note the following and slide the fi lter fastener to the right to lock
the fi lter holder.
•
Confi rm that the fi lter fastening claw is located at the upper
center of the fi lter holder.
•
Confi rm that the ball plunger is locked.
Slide the filter fastener to the right.
Filter Unlocked Filter Locked
Locking Position of Filter
Fastening Claw
Ball Plunger Locked
Fig. 4A64
When the fi lter fastening claw cannot be locked after being slid
because it interferes with the sideface of the fi lter holder, it can
be assumed that a foreign substance exists in the hole or the fi lter
holder is not inserted suffi ciently far into the hole.
Check the fi lter holder that has interfered with the sideface. If a
foreign substance exists in the hole, clean the fi lter holder to remove
the substance.
After the cleaning is completed and no foreign substance is found in
the hole, starting with Step (4).
Notice
Unless the fi lter holder is set correctly in place, a pickup error will occur
or the fi lter will come off and cause an interference with a head. The head
may also be damaged.
0605-001
4.6 Replacement Procedure of Vacuum Filters
5. Consumables and Important Servicing Parts
5.1 List of Consumables
Listed below are the parts that may be consumed within one year.
Consult our marketing department or sales agency whenever you need to
purchase these parts.
Table 4A14
5. Consumables and Important Servicing Parts
Table 4A14
016M0919
016M1042
016M0929
016M1055
016M0930
016M0931
016M0932
016M0933
016M0934
016M0935
016M0936
016M1354
016M1074
216M2168
225B0508
212A2219
226J1934
226A0256
213D1218
016M1433
016M1434
016M1482
016M1480
016M1486
1-61
AKHEMT-ID
0906-004
ASSY,NOZZLE(PA07)