4OM-1345-009_w.pdf - 第118页
1-60-2 AKHEMT -ID (2) Insert the fi lter replacement jig into the hole on the fi lter holder and pull it up upward. Hole on Filter Holder Jig with pulled-out holder (filters) Filter Replacement Jig Fig. 4A62 (3) Replace th…

1-60-1
AKHEMT-ID
4.6 Replacement Procedure of Vacuum Filters
Time of Replacement
Replace the fi lters with new ones every three months.
Vacuum
Filters
Vacuum
Filters
Fig. 4A59 Filter Holder
Required Item
Filter Replacement Jig
Fig. 4A60 Filter Replacement Jig
Replacement Procedure
(1) Slide the fi lter fastener to the left and release the lock of the fi lter
holder.
Filter UnlockedFilter Locked
Fig. 4A61
Notice
Be sure to slide the fi lter fastener so that it does not interfere with the
wiring, etc.
0605-001
4.6 Replacement Procedure of Vacuum Filters

1-60-2
AKHEMT-ID
(2) Insert the fi lter replacement jig into the hole on the fi lter holder and
pull it up upward.
Hole on Filter Holder
Jig with pulled-out holder (filters)
Filter Replacement Jig
Fig. 4A62
(3) Replace the two vacuum fi lters on the pulled-out holder with new
ones.
(4) Direct the larger hole on the fi lter holder outward and insert the
holder with the fi lter replacement jig.
Be sure to push it deep enough until it stops (down to the lowest
limit).
Notice
The holder should not interfere with the wirings for valves, etc. In addition,
the wires should not be caught in the upper and lower areas of the top
block.
OK
NG
Filter Fastening Claw
<NG: Insufficient Insertion>
The upper surface of the
filter holder is higher than
that of the filter fastening
claw.
<OK: Sufficient Insertion>
The filter fastening claw is
higher than that of the filter
holder.
Fig. 4A63
0605-001
4.6 Replacement Procedure of Vacuum Filters

1-60-3
AKHEMT-ID
(5) Shake it in the rotational direction and confi rm that the it does not
rotate. After that, pull out the fi lter replacement jig carefully so as
not to pull up the inserted fi lter together and stay afl oat.
(6) Note the following and slide the fi lter fastener to the right to lock
the fi lter holder.
•
Confi rm that the fi lter fastening claw is located at the upper
center of the fi lter holder.
•
Confi rm that the ball plunger is locked.
Slide the filter fastener to the right.
Filter Unlocked Filter Locked
Locking Position of Filter
Fastening Claw
Ball Plunger Locked
Fig. 4A64
When the fi lter fastening claw cannot be locked after being slid
because it interferes with the sideface of the fi lter holder, it can
be assumed that a foreign substance exists in the hole or the fi lter
holder is not inserted suffi ciently far into the hole.
Check the fi lter holder that has interfered with the sideface. If a
foreign substance exists in the hole, clean the fi lter holder to remove
the substance.
After the cleaning is completed and no foreign substance is found in
the hole, starting with Step (4).
Notice
Unless the fi lter holder is set correctly in place, a pickup error will occur
or the fi lter will come off and cause an interference with a head. The head
may also be damaged.
0605-001
4.6 Replacement Procedure of Vacuum Filters