4OM-1345-009_w.pdf - 第118页

1-60-2 AKHEMT -ID (2) Insert the fi lter replacement jig into the hole on the fi lter holder and pull it up upward. Hole on Filter Holder Jig with pulled-out holder (filters) Filter Replacement Jig Fig. 4A62 (3) Replace th…

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1-60-1
AKHEMT-ID
4.6 Replacement Procedure of Vacuum Filters
Time of Replacement
Replace the lters with new ones every three months.
Vacuum
Filters
Vacuum
Filters
Fig. 4A59 Filter Holder
Required Item
Filter Replacement Jig
Fig. 4A60 Filter Replacement Jig
Replacement Procedure
(1) Slide the lter fastener to the left and release the lock of the lter
holder.
Filter UnlockedFilter Locked
Fig. 4A61
Notice
Be sure to slide the lter fastener so that it does not interfere with the
wiring, etc.
0605-001
4.6 Replacement Procedure of Vacuum Filters
1-60-2
AKHEMT-ID
(2) Insert the lter replacement jig into the hole on the lter holder and
pull it up upward.
Hole on Filter Holder
Jig with pulled-out holder (filters)
Filter Replacement Jig
Fig. 4A62
(3) Replace the two vacuum lters on the pulled-out holder with new
ones.
(4) Direct the larger hole on the lter holder outward and insert the
holder with the lter replacement jig.
Be sure to push it deep enough until it stops (down to the lowest
limit).
Notice
The holder should not interfere with the wirings for valves, etc. In addition,
the wires should not be caught in the upper and lower areas of the top
block.
OK
NG
Filter Fastening Claw
<NG: Insufficient Insertion>
The upper surface of the
filter holder is higher than
that of the filter fastening
claw.
<OK: Sufficient Insertion>
The filter fastening claw is
higher than that of the filter
holder.
Fig. 4A63
0605-001
4.6 Replacement Procedure of Vacuum Filters
1-60-3
AKHEMT-ID
(5) Shake it in the rotational direction and con rm that the it does not
rotate. After that, pull out the lter replacement jig carefully so as
not to pull up the inserted lter together and stay a oat.
(6) Note the following and slide the lter fastener to the right to lock
the lter holder.
Con rm that the lter fastening claw is located at the upper
center of the lter holder.
Con rm that the ball plunger is locked.
Slide the filter fastener to the right.
Filter Unlocked Filter Locked
Locking Position of Filter
Fastening Claw
Ball Plunger Locked
Fig. 4A64
When the lter fastening claw cannot be locked after being slid
because it interferes with the sideface of the lter holder, it can
be assumed that a foreign substance exists in the hole or the lter
holder is not inserted suf ciently far into the hole.
Check the lter holder that has interfered with the sideface. If a
foreign substance exists in the hole, clean the lter holder to remove
the substance.
After the cleaning is completed and no foreign substance is found in
the hole, starting with Step (4).
Notice
Unless the lter holder is set correctly in place, a pickup error will occur
or the lter will come off and cause an interference with a head. The head
may also be damaged.
0605-001
4.6 Replacement Procedure of Vacuum Filters