4OM-1345-009_w.pdf - 第173页

3-24 AKHEMT -ID Erroe ID Error Name, Description, Cause, and Remedy 49070e Nozzle set up The remains nozzle was detected on the head. The nozzle cannot be set to this position. Please con ﬁ rm the nozzle has not adhered …

3-23

AKHEMT-ID

Erroe ID Error Name, Description, Cause, and Remedy

490701 Nozzle set up

Nozzle Stocker is not set.

Please check whether it is correctly set to the stocker base.

490702 Nozzle set up

Motor Error Detection.

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490703 Nozzle set up

Nozzle Stocker Shutter open/close failed.

There is no ﬂ oat going up of a nozzle, or please check whether there is any

connection etc. in opening and closing.

490704 Nozzle set up

Nozzle Stocker up/dowon failed.

There is no ﬂ oat going up of a nozzle, or please check whether there is any

connection etc. in opening and closing.

490705 Nozzle set up

Nozzle existence conﬁ rmation has error.

Please check whether there is any difference in stocker arrangement data and real

arrangement.

490706 Nozzle set up

Head nozzle existence conﬁ rmation has error.

Please check whether there is any difference in head arrangement data and real

arrangement.

490707 Nozzle set up

There is no free space for nozzle storing.

Please conﬁ rm the Stocker arrangement data.

490708 Nozzle set up

There are neither a free space nor a nozzle for nozzle exchange.

Please set up an insufﬁ cient nozzle in Noz stocker.

490709 Nozzle set up

Nozzle exchange abnormal data was found.

Please conﬁ rm the nozzle arrangement and the Stocker arrangement data.

49070a Nozzle set up

Nozzle stocker position teaching failed.

Please teach the Noz stocker position again on the instruction screen.

49070b Nozzle set up

Placement Hd / Noz data is not corresponding to the real arrangement.

Please conﬁ rm the real arrangement of the head nozzle arrangement data and the

head.

49070c Nozzle set up

Nozzle level teach error Detection.

Please execute the nozzle level teaching again on the nozzle level teach screen,

and conﬁ rm there is no unexpected value.

49070d Nozzle set up

The nozzle receipt check went wrong.

Please select a recognition image and choose the existence of a nozzle.

0602-001

3.7 Automatic Setup

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AKHEMT-ID

Erroe ID Error Name, Description, Cause, and Remedy

49070e Nozzle set up

The remains nozzle was detected on the head. The nozzle cannot be set to this

position.

Please conﬁ rm the nozzle has not adhered to the position. Moreover, please clean

the line sensor when not adhering.

49070f Nozzle set up

The placed nozzle was undetectable on the head.

Please conﬁ rm whether the nozzle has adhered to the position.

490710 Nozzle set up

The receipt nozzle was undetectable on the head.

Please conﬁ rm whether the nozzle has adhered to the position.

490711 Nozzle set up

The remains nozzle was detected on the head.

Please conﬁ rm the nozzle has not adhered to the position. Moreover, please clean

the line sensor when not adhering.

490712 Nozzle set up

The linear measure error occurred in the head nozzle existence check.

Please conﬁ rm the nozzle arrangement, and execute the level teaching.

490713 Nozzle set up

The nozzle exchange sequence error occurred.

Please conﬁ rm the nozzle arrangement.

490714 Nozzle set up

The nozzle placement in nozzle stocker is different from the nozzle data.

Please conﬁ rm the nozzle placement.

490715 Nozzle set up

It failed in nozzle ID detection.

Please conﬁ rm the nozzle ID.

490716 Nozzle set up

Time-out of close nozzle stocker operation.

Nozzle stocker was opened for safety. Please conﬁ rm whether there is no rise to the

surface and the nozzle is not in opening and shutting caught state.

0602-001

3.7 Automatic Setup

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AKHEMT-ID

3.8 Head-Related Errors

Table 4C10

Erroe ID Error Name, Description, Cause, and Remedy

4A0101 Head Zero Return

NL axis zeroing Error. Please conﬁ rm the nozzle has not fallen when you push the

beam by the hand.

When the lock of a safety door cannot be canceled, please push an emergency stop