00197042-04_SM_X-Serie-S_Customer_EN.pdf - 第157页

6 Gantries 6.3 X and Y axis Service Manual SIPLACE X-Serie S 06/2019 157 Fig.195: Operation of test device PG-U - 2 Fig.196: Operation of test device PG-U - 3

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6 Gantries
6.3 X and Y axis
156 Service Manual SIPLACE X-Serie S 06/2019
Fig.193: Operation of test device PG1-I - 3
Test device PG-U [03071361‑xx]
Fig.194: Operation of test device PG-U - 1
6 Gantries
6.3 X and Y axis
Service Manual SIPLACE X-Serie S 06/2019 157
Fig.195: Operation of test device PG-U - 2
Fig.196: Operation of test device PG-U - 3
6 Gantries
6.3 X and Y axis
158 Service Manual SIPLACE X-Serie S 06/2019
Fig.197: Operation of test device PG-U - 4