DECAN_S1_Administrator′s_Guide(Eng_Ver1.5)_Print.pdf - 第462页
14-80 Next Generation, Multi-Functional Plac er DECAN S1 Administrator’s Guide 14.3.8.11. Beam Offset Calibration Refers to the calibration measuring the distance between the fiducial camera se nsor and beam sensor . In …
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Machine Calibration
Memo The reference values for the calibration of the R-Axis Offset is as
follows.
Real Max(Min): The Max.(Min.) offset between command value
and calibration value
Head1~Head10 : -0.5 ~ 0.5 (deg)
Err Max(Min) The Max.(Min.) offset between compensation
value and calibration value
Head1~Head10 : -0.2 ~ 0.2 (deg)
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Next Generation, Multi-Functional Placer DECAN S1 Administrator’s Guide
14.3.8.11. Beam Offset Calibration
Refers to the calibration measuring the distance between the fiducial camera sensor and
beam sensor. In order to measure the beam offset, the beam sensor to be used in the <Head
Offset> tab of the System menu must be selected first.
Perform calibration of the Beam Offset in the following manner
1. Press the <17. Beam Offset> button to execute the beam offset dialog box.
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Machine Calibration
2. Select the gantry to be calibrated.
3. After selecting the Fid Cam1 (or Fid Cam2) as a teaching camera, move the X-Y axes
to the area (a point that can be distinguished by SMVision) which can be recognized
using the jog box.
4. Press the <Get> button to save the current position in the <Teaching Position>.
5. Select Beam 1 (or Beam 2) as a teaching tool and move it to the <Teaching Position>
using the jog box.
6. Press the <Get> button to save the current position in the <Beam Position>.