CP40 service manual.pdf - 第80页
1. Head Part (CP-40) 1-1. Trouble Diagnosis Guide Table Detect Error Malfunction IMAGE ERROR SETTING ERROR HOMING ERROR MOTOR ERROR PICK_UP ERROR Foreign Materials => Cleaning Using Air 1 Aligner Magnif ication Adj us…
0. Install & Driver
(CP-40)
Version Date WA QA CA Note
00 Nov04 O O O
1. Head Part
(CP-40)
1-1. Trouble Diagnosis Guide Table
Detect Error Malfunction
IMAGE ERROR SETTING ERROR HOMING ERROR MOTOR ERROR PICK_UP ERROR
Foreign Materials => Cleaning Using Air 1
Aligner Magnification Adjustment 2
Aligner Replacement 4
I/F Board Replacement 3 5
Align Board Replacement 4 4 6
Bad Contact of Align Board Connector 3 1 1
Bad Contact of Head Connector 2 2
Bad Contact of Servo Drive Connector 3 1
Servo Drive Replacement 5 7
Axis Board Replacement 4
Drive Dip S/W Setting 2
Parameter Value Adjustment 3
Blow Gain Adjustment 1
Vacuum Generator R eplacement 5
Filter Replacement 4
Head Spring Replacement 3
Vacuum Gain Adjustment 2
Parts
Symptom
Check and Action
# Number Indicates Priority of Check Items.
1. Head Part
(CP-40)
NO Symptom Possible Cause Error Code Action
Instruction
1
Image Error
Bad Waveform of Align Image
Clean Align Glass. 1-3-6
2 Adjust Align Magnification. 1-3-3
3 Replace Align. 1-3-2
4 AlignSet-upError Replace Align I/F Board. 1-3-1
5 Align File is not Downloaded. Replace Align Board.
6 Align Reflection Plate is not Attached. Attach Reflection Plate.
7
Aligner Board Connector Bolt is not Tightened
Properly.
Tighten Connector Bolt Properly.
8 ALIGNER INITIALIZE Error Replace Align Board. 1-3-1
9 ALIGNER SCORE IS TOO LOW Error Check for Cable Connection.
10 HEAD LAHD Error Replace Aligner Board. 1-3-1
11 Aligner is not Powered on. Correct Connector of Board.
12
Homing Error
Bad Head Home Repair Bad Connection of Head Connector Pin.
13 LAHD Error When Activating Home Replace Align Cable.
14 ALIGNER INITIALIZE Error When Homing Replace Aligner Board. 1-3-1
15 Error on X-Axial Servo Drive after Power-on Replace X-Axial Servo Drive.
16
Motor Operation
Error
Head Theta Axis is not Moved. Replace I/F Board.
17 Motor Alarm When Checking Head Runout Replace Align Board. 1-3-1
18 Speed of Head Theta Axis is Slow. Replace Head Axis Board.
19 Bad Backlash of R1,R2,R3 Motor Set Drive Dip S/W.
20 No.3 Theta Rotates only to Either Direction. Replace I/F Board.
21 Noise is heard when Z-Axis Running. Correct Parameter Value.
22
Ready Switch is Down When Z-Axis Running.
Replace Z-Axial Servo Drive.
23 Reconnect Connector Pin of Head Encoder Cable.
24 Z-Axis Motor is not Powered on. Replace Z-Axis Driver.
1-2 Trouble Diagnosis