Utah-94-721002-System-Manual.pdf - 第102页

mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ =fåëíêìã Éåíë= mä~ëã~ =qÉÅÜåçäçÖó == System Manual RKUKO= oçÄçí=Åçåíêçä=é~ÖÉ= Fig 5.13: Robot control page The Robot Control page is used to manually transf er a wafer between cham bers (when o…

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ii) STOP buttons: Select to stop either pumping down or venting the

associated chamber. Note that the STOP button must be selected before

venting to ensure the correct sequencing of the valves.

iii) VENT buttons: Select to vent the associated chamber.

b) Mimics of all valves showing open/closed status (coloured green when open, red

when closed).

c) Rotary/dry pump controls. Clicking on a rotary vane/dry pump mimic button will

switch the associated pump on or off (a running rotary pump is indicated by

animation).

d) Transfer arm, Wafer lift and Wafer clamp status panel. Displays indicators for ARM

HOME, ARM EXTENDED and ARM FAULT (illuminated when active). Also displays

WAFER LIFT and WAFER CLAMP status (up, down, moving or fault). See the

following table.

Message Meaning

UP The UP microswitch is detected as active.

DOWN The DOWN microswitch is detected as active.

MOVING Both microswitches are detected as inactive.

FAULT Both microswitches are detected as active.

e) The run status of the turbo pump is indicated by an associated message panel

containing an indicator. While the turbo pump is running up to speed, the message

‘accelerating’ is displayed and the indicator is flashing yellow. While the turbo pump

is at its operating speed, the message ‘at speed’ is displayed and the indicator is

green.

f) A SET BASE PRESSURE button. Select to set the Process Chamber Base Pressure.

g) Context related message panels for the process chamber, Automatic load lock and

wafer transfer progress.

h) ‘Ready for transfer’ indicators (WX) - displayed when the associated chamber or load

lock is evacuated and ready for wafer transfers.

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-35 of 52 UC Davis 94-721001 Issue 1: March 06

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Fig 5.13: Robot control page

The Robot Control page is used to manually transfer a wafer between chambers (when

operating in automatic mode, i.e. running a recipe, wafers are transferred automatically). The

location of the wafer is indicated by a green wafer indicator. The arrowed path shows the

currently available wafer destination.

The page provides the following features:

Show Pumps

button

Displays the Pump Control page

Transfer arm

and Wafer lift

status panel

Displays indicators for ARM HOME, ARM EXTENDED and ARM FAULT

(illuminated when active). Also displays WAFER LIFT and WAFER CLAMP

status (up or down).

Transfer

status

message field

Displays context-related message about the wafer transfer progress.

Process

chamber and

Automatic load

lock mimic

Displays the wafer location and possible wafer destination.

To transfer a wafer from the Automatic load lock to the process chamber to carry out a

manual process, use the following steps:

1) Click on the Automatic load lock wafer mimic. The blue arrowed path is displayed

showing the available destination.

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-36 of 52 Printed: 22-Mar-06, 10:42

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

2) Click on the process chamber wafer indicator. The wafer is transferred to the process

chamber.

To transfer a wafer from a process chamber to the Automatic load lock on completion of a

manual process, use the following steps:

1) Click on the process chamber’s green wafer indicator. The blue arrowed path is

displayed showing the available destination.

2) On the Automatic load lock mimic, click on the wafer indicator. The wafer is

transferred to the Automatic load lock.

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Fig 5.14: Recipe page

The recipe page is used to create, edit and run recipes. See sub-section 5.4.5 (Automatic

process run, page 5-16) and sub-section 5.5 (Creating and editing recipes, page 5-21).

The facilities on this page are:

Automatic

button

Select to carry out an automatic process run using a recipe. The button’s

indicator is coloured yellow when selected.

The recipe will be performed on a substrate. The substrate will start at

the normal wafer entry point and will be automatically transferred to

each chamber, as the recipe requires. At the end of processing, the

wafer will be returned to its starting point.

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-37 of 52 UC Davis 94-721001 Issue 1: March 06