Utah-94-721002-System-Manual.pdf - 第131页
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~ =qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . SKV= s~Åììã=ëóëíÉã= SKVKN= ^ÅíáîÉ=máê~åá=Ö~ìÖÉ= Refer to…
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKU= VQJNMMJSJRMMLOMMs=ofb=RMMt=oc=ÖÉåÉê~íçê=L=lfmq=^jr=âáí=
SKUKN= qÜêÉÉJãçåíÜäó=
Ensure that the RF/microwave radiation leakage tests, detailed in Appendix A are carried out.
For details of maintenance required, refer to the manufacturer’s literature in Volume 3 of this
manual.
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-12 of 22 Printed: 22-Mar-06, 7:41
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKV= s~Åììã=ëóëíÉã=
SKVKN= ^ÅíáîÉ=máê~åá=Ö~ìÖÉ=
Refer to the manufacturer’s literature in Volume 3 for details of the following maintenance:
a) Atmosphere and vacuum adjustment.
b) Filter cleaning.
SKVKO= `~é~Åáí~åÅÉ=ã~åçãÉíÉê=
SKVKOKN= páñJãçåíÜäó=Eçê=~ë=åÉÅÉëë~êóF=
1) Remove the capacitance manometer from the process chamber.
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
Carefully pour a measure of Isopropyl Alcohol (IPA) at room temperature into the
pressure-measurement cavity. Do not allow IPA to come into contact with electronic
components.
Agitate the solvent carefully and then pour it out.
CAUTION
Because the diaphragm in the gauge is thin tensioned metal, it can be destroyed
by sudden changes in temperature or by clumsy handling.
Re-install the gauge, allowing sufficient time for outgassing of the cavity and diaphragm
prior to operation.
NOTE: Refer to the manufacturer’s manual for calibration adjustments.
SKVKP= mÉååáåÖ=Ö~ìÖÉ=
The following applies to an Edwards Active Inverted Magnetron gauge. If a different Penning
gauge is fitted, refer to the manufacturer's literature.
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-13 of 22 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
WARNING
IF THE ELECTRONICS ARE DISCONNECTED FROM THE BODY TUBE AND THE BODY
TUBE IS LEFT CONNECTED TO A VACUUM SYSTEM, THEN IF A PLASMA DISCHARGE
IS MAINTAINED IN THE VICINITY OF THE BODY TUBE, THE ANODE AND GUARD RING
OF THE BODY TUBE ASSEMBLY MAY BECOME CHARGED UP.
SWITCH OFF THE POWER SUPPLY BEFORE REMOVING THE GAUGE FROM THE
VACUUM SYSTEM. HIGH VOLTAGES EXIST INTERNALLY IN THE GAUGE. THE
CONNECTING CABLE SHOULD BE REMOVED BEFORE ATTEMPTING TO DISMANTLE
THE GAUGE.
SKVKPKN= aáëã~åíäáåÖ=íÜÉ=ÄçÇó=íìÄÉ=
The body tube assembly can be removed from the gauge by gripping the magnet housing
and twisting the body tube flange clockwise to unlock the bayonet fitting. The tube can then
be completely withdrawn from the gauge electronics / magnet housing.
The electrode can be removed from the body tube for cleaning / replacement as follows:
Using the flat spanner provided with the spares kit, locate the two lugs in the end of the
collar and rotate anti-clockwise to completely unscrew. Once the collar is removed, the anode
assembly and O-ring can be withdrawn.
The two cathode cups are removed from the flange end of the body tube by releasing the
circlip using a pair of circlip pliers. Note the correct orientation of the cups. The cup with the
reduced central hole size should be closest to the O-ring end of the body tube.
Re-assembly is the reverse procedure, taking care not to bend the anode, and ensuring that it
is centralised in the body tube when tightening the threaded collar.
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-14 of 22 Printed: 22-Mar-06, 7:41