Utah-94-721002-System-Manual.pdf - 第115页
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉ ÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM f) Process chamber rotary vane/dry pump . g) Automatic load lock transfer arm (c lick red dot to insert/withdraw arm). h) Automatic load lock isol…
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The Service Mode page is displayed by selecting the System button, then the Service option.
Fig 5.19: Service mode page
CAUTION
The software interlocks which prevent collisions between the wafer, robot arm,
slit valve and the wafer clamp are overridden in the Service Mode. Therefore,
before clicking on any button, consider very carefully the consequences of your
proposed actions.
This page is used during maintenance to manually control system components. The page can
also used to manually transfer wafers between the Automatic load lock and process chamber.
Manual control of the following features is available by clicking on them (confirmation is
requested before any action is carried out):
Note that moving the mouse pointer over a feature will cause a box to be displayed around
the feature indicating that it can be manually controlled.
a) Process chamber turbo pump.
b) Process chamber wafer lift and wafer clamp.
c) Process chamber vent valve.
d) Process chamber APC valve.
e) Process chamber turbo backing valve and purge valve.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-48 of 52 Printed: 22-Mar-06, 10:42
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
f) Process chamber rotary vane/dry pump.
g) Automatic load lock transfer arm (click red dot to insert/withdraw arm).
h) Automatic load lock isolating valve.
i) Automatic load lock vent valve.
j) Automatic load lock dry/rotary vane pump.
k) Slit valve.
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To transfer wafers between chambers in service mode, click on the wafer mimic (either in the
Automatic load lock or process chamber). The following screen is displayed:
Fig 5.20: Wafer transfer in service mode
Click on the wafer destination. The wafer will be transferred.
The ADD WAFER button is used to inform the system that a wafer is present. This facility
would be used if the machine were powered-up with a wafer in the Automatic load lock. The
legend on this button changes to KILL WAFER when a wafer is present, enabling the selected
wafer to be removed from system memory.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-49 of 52 UC Davis 94-721001 Issue 1: March 06
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The page provides the following facilities:
Show Pumps
button
Displays the Pump Control page
Message field
Displays status messages about the wafer transfer.
Add/Kill Wafer
button
The ADD WAFER button is used to inform the system that a wafer is
present. This facility would be used if the machine were powered-up with
a wafer in the Automatic load lock. The legend on this button changes to
KILL WAFER when a wafer is present, enabling the selected wafer to be
removed from system memory.
Wafer transfer
path
Displayed when the wafer mimic has been clicked. An arrow indicates the
direction of the possible transfer. Clicking on the destination will cause
the transfer to be carried out.
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To exit from service mode, select the system menu and then the Exit Service option. The
following dialogue box is displayed:
Ensure that there are no personnel close to the system, and then select the OK button.
After exiting from service mode, the system configuration will depend on which service mode
facilities were used as follows:
a) If no service mode facilities were used, e.g. no valves were open or closed; the system
configuration will be the same as it was before entering service mode.
b) If the service facilities were used, the system configuration will depend on which of
the facilities were used as follows.
To prevent damage to the system, any chamber which had any of its features altered in
service mode, e.g. valves opened/closed, pumps turned on/off etc., will have its pumping
stopped. All other chambers will continue to be pumped.
To return the chamber which had its pumping stopped to the pumping or vent state, click on
the associated Stop button, and then on the Evacuate button or the Vent button as
required. The chamber will then pump down or vent.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-50 of 52 Printed: 22-Mar-06, 10:42