Utah-94-721002-System-Manual.pdf - 第80页

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Similarly, existing Names, Passwords and Access Levels can be edited. In addition,

existing entries can be removed from the list by selecting a name and then selecting

the Delete button.

5) The Facilities enabled for ‘User’ (selected in Step 4) can be edited by selecting the

Facilities button while the cursor is in the name field for that user. This will display

the Edit User Facilities dialogue box.

WARNING

BEFORE ENABLING FACILITIES, CONSIDER CAREFULLY WHICH FACILITIES WILL BE

SELECTED FOR THE PERSON USING THE ‘LOG ON’ NAME. FOR EXAMPLE, ALLOWING

AN INEXPERIENCED USER ACCESS TO THE ‘TOLERANCES’ PAGE WOULD ALLOW THE

USER TO CHANGE TOLERANCES WHICH COULD POSSIBLY RESULT IN SYSTEM

MALFUNCTION AND EXPOSE THE OPERATOR TO HAZARDOUS SITUATIONS.

6) Click on the appropriate checkboxes to enable the facilities available to the selected

name (9 indicates enabled). Click on the OK button to accept the entered data and

exit.

Note that the enabled facilities are dependent on the name and not on the access

level, e.g. two people logged on as users can have different sets of facilities enabled.

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-13 of 52 UC Davis 94-721001 Issue 1: March 06

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System alerts are displayed when PC 2000 detects an event that requires the attention of the

user. Each alert is automatically categorised depending on the nature of the event and the

response required by the user. The category of the event can range from a warning indicating

that a service parameter is out of tolerance to a process abort indicating that a process

setpoint has been out of tolerance for so long that the process cannot be completed. A

typical system alert is shown in Fig 5.2.

System

lert

anner

System Alert

dialogue

Fig 5.2: Typical system alert

The alert is displayed as a banner in the menu bar at the top of the screen with an associated

dialogue in the main screen area. Note that more than one alert can be active at the same

time, each requiring action by the user in turn.

There are three categories of alert indicated by the colour and text displayed in the banner

and dialogue:

Blue Warning e.g. water flow low.

Yellow Hazard – not currently used.

Red Process abort, e.g. high-reflected RF power.

A user logged on at any access level can close the alert dialogue, but only a user logged on as

a system manager can clear the alert banner from the menu bar. The dialogue options are:

Accept button: System Managers only. Clear the alert and log it.

Next button: View the next alert.

Cancel button: System Manager only. Clear the alert; do

not log it.

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-14 of 52 Printed: 22-Mar-06, 10:42

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

Continue button: Close the alert dialogue box – the alert banner remains displayed

on the menu bar.

Note that option buttons that are not available (i.e. Accept and Cancel due to user ‘logged

on’ status and Next when there is only one active alert) are greyed out.

The alert message usually contains an adequate description of the detected event. If it is a

service fault (water flow, purge gas etc.) then verify that the service is available to the

machine as soon as possible. Depending on the nature of the service, the system may allow

the machine to continue to operate, so that the current process can be completed.

Do not

start a new process before checking the service.

The red alerts are often due to a process setpoint being out of tolerance for too long. In these

cases, the process is halted by the system. If it is authorised to resume processing with a

parameter deviation then:

1) Check the most recent process log to find the process time remaining.

2) Construct a new process with a modified process time and check the ‘Ignore

tolerance’ option. Note that this removes

all tolerance checking. The machine should

be monitored by an operator for further deviations when operated in this condition.

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1) On the Pump Control page, select the SET BASE PRESSURE button, then enter the

required process chamber base pressure if different from the default.

2) Ensure that the Automatic load lock/transfer chamber’s lid is closed. (Automatic load

lock/transfer chamber lid open/closed status is shown in the panel adjacent to the

mimic).

3) Click on each dry pump/rotary vane pump mimic to start the pump.

4) Select the Evacuate button for the process chamber. The relevant valves will

operate and the process chamber will be pumped down.

5) Select the Evacuate button for the Automatic load lock. You will be prompted to

enter a wafer identity - either enter the identity and click OK, or click Cancel (to

pump down without a wafer in the Automatic load lock). The relevant valves will

operate and the Automatic load lock will be pumped down.

NOTE: Turning off any rotary vane pump will cause all process and pumping

actions using that pump to stop.

6) To achieve a low base pressure in the system, pump for at least 12 hours. Where

chambers or process heaters are part of the system, raise the temperatures of these

near their maximum values for the first six hours of pumping to assist out-gassing,

then return the temperature to ambient.

WARNING

PARTS OF THE EQUIPMENT MAY BE TOO HOT TO TOUCH DURING CHAMBER

HEATING.

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-15 of 52 UC Davis 94-721001 Issue 1: March 06