Utah-94-721002-System-Manual.pdf - 第89页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉ ÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM Repeat Step Repeats all subsequent steps until a Loop Step is reached. This group of steps can be repeated any number of times. (When you select t…

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To create a recipe step, based on an existing recipe step, use the following procedure:

1) Select a recipe step from the Step Library list, i.e. click on it to highlight it.

2) Select the COPY button. Enter a new step name.

3) Edit the step parameters as required, then click on OK. The new recipe step is

automatically saved.

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To edit an existing recipe, use the following procedure:

1) Select a recipe step from the Step Library list, i.e. click on it to highlight it.

2) In the Step Library panel, click on the Edit button.

3) Edit the step’s process parameters as required, then click on OK. The step is

automatically saved.

NOTE: Changing an existing recipe step will not alter saved recipes, which use the

old version of that step.

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To delete a recipe step, use the following procedure:

1) Select the recipe step from the Step Library list, i.e. click on it to highlight it.

2) Select the DELETE button; the selected recipe step is deleted.

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Recipes are ‘built’ using existing recipe steps, and edited as required.

Within a recipe, steps can be manipulated using the Step Commands pop-up menu

(accessed by clicking on the Recipe Steps field).

Fig 5.4: Step Commands pop-up menu

The Step Commands pop-up menu provides the following options:

Edit Step

Enables the selected (highlighted) step to be edited.

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-22 of 52 Printed: 22-Mar-06, 10:42

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

Repeat Step

Repeats all subsequent steps until a Loop Step is reached. This group of

steps can be repeated any number of times. (When you select this option,

you are prompted to enter the number of times the group of steps is to be

repeated.)

Loop Step

Terminates a Repeat Step group.

Insert Step

Creates a 'gap' above the selected step to allow another step to be dragged

into the list.

Delete Step

Deletes the selected step from the list.

Cancel Closes the Step Commands pop-up menu.

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To build a recipe, use the following procedure:

1) In the Recipe panel, select the NEW button.

2) Click on a recipe step in the Step Library list, hold the left mouse button down then

drag the mouse pointer to the Step Name field next to the asterisk (*) then release

the mouse button. The step name is displayed in the Step Name field.

3) Repeat 2) as required to add further steps to the recipe. Note that once you have

filled the Step Name field, the recipe step list becomes scrollable, enabling you to

add a maximum total of 1000 steps.

4) To remove a step from the list, click on it to highlight it then select the Delete step

button from the Step Commands pop-up menu. Any further steps will move up the

list by one place.

5) To add a step before an existing step, click on the existing step then select the Insert

step button from Step Commands pop-up menu. The selected step and all those

following it will move down the list by one place. You can then drag another step

from the Step Library list into the now vacant field.

6) When all steps have been added, enter a time into the Data Log Interval field,

then enter a name for the recipe in the Recipe Name field. Finally, select the SAVE

button.

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To edit a recipe, use the following procedure:

1) Select the LOAD button, then select the recipe to be edited.

2) In the Step Commands pop-up menu, click on the Edit Step button, then edit the

process parameters as required. Note that editing a recipe step will not affect the

associated step, i.e. a step having the same filename, in the Library of Available

Steps.

3) To remove a step from the list, click on it to highlight it then select the DELETE STEP

button from the Step Commands pop-up menu. Any further steps will move up the

list by one place.

4) To add a step before an existing step, click on the existing step then select the

INSERT STEP button. The selected step and all those following it will move down

the list by one place. You can then drag another step from the Step Library list into

the now vacant field.

Operating Instructions

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All processes are automatically data-logged. The interval between logging events is set in the

Recipe screen.

The Process Datalog facility allows you to view process data runs and associated comments.

The facility comprises three pages:

a) SELECT LOG page – allows you to select the process data to view.

b) RUN LOG page – lists the selected process data, for all runs except Leak detection

runs and MFC calibration runs, with respect to time.

c) Leak detection and MFC calibration log page – displays the Leak detection runs and

MFC calibration runs in text and graphical formats.

These pages are described in the following text.

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The Select Log page is displayed by selecting the Process button, then the Log View option.

Fig 5.5: Select Log page

The page comprises a list of logged events, which can be filtered by type, batch name and

time. When the required events have been selected, they can be viewed on a Log View page.

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-24 of 52 Printed: 22-Mar-06, 10:42