Utah-94-721002-System-Manual.pdf - 第295页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã ~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 System Common Components = Note: The photograph above is a typical example of a PSU. MCBs (CB1, CB2 …
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
System Common Components Issue 2: November 02
NMMJMJofb=_~ëÉ=ìåáí=
MKN= mçïÉê=Äçñ=
24V, ± 15V
Power supply
unit
CB2
24V, ± 15V
Power supply
unit
CB 14
ICP
generator
CB12
Chamber
pump
CB8
Heater/
chiller
K4 - RF generator
K8 - ICP generator
(behind CB2)
K3
Blower
pump
K2
Roots
pump
CB1
Mains
IN
Mains
filter
K1
Mains
IN
Fan and
filter
F1, F2
& F3
fuses
(1)
(1)
(4)
(4)
(13)
(13 + 14)
(13 + 14)
(7)
(8)
(9)
(10)
(11)
(12)
(5)
CB 13
Load lock
pump
(13 + 15)
K6
Loadlock
pump
CB11
Pumpdown
heater
(2)
CB9
Heated
backing
valve
CB7
V
at valve
cont.
CB5
Turbo
cont.
(6) (4)(4)
CB10
Chamber
heater
CB6
Turbo
heater
CB4
RF
generator
(3)
(3)
(6)
Section 0 Page 2 of 12
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 System Common Components
=
Note: The photograph above is a typical example of a PSU. MCBs (CB1, CB2 etc.) may vary
between machines according to the voltage applied (415V or 208V) and the equipment
supplied. When ordering MCBs, please quote the component number (e.g.CB6), the number
of sections (e.g. 1, 2 or 3 phase) and the part number written on the component.
Item Part No. Description
(1) EFM1606 K.M. SLOW MCB TRIPLE POLE 6A (CB12 & CB13)
(2) EFM1620 K.M. SLOW MCB TRIPLE POLE 20A (CB14)
(3) EFM1410 K.M. SLOW MCB SINGLE POLE 10A (CB4 & CB8)
(4) EFM1406 K.M. SLOW MCB SINGLE POLE 6A (CB2, CB5, CB7 & CB10)
(5) EFM1404 K.M. SLOW MCB SINGLE POLE 4A (CB11)
(6) EFM1402 K.M. SLOW MCB SINGLE POLE 6A (CB6 & CB9)
(7) EXP2415 MULTI O/P PSU 24V/4A,+/-15V/2.5A
(8) EFA1060 FAN 62mm ULTRASLIM AXIAL 24Vdc
(8) EFA1061 FAN FILTER RFI 60/62 mm
(9) EGB2032 CONTACTOR 35A 24VDC DIL0AM KM (K1)
(9) EGB2000 CONTACTOR DIODE MODULE (FOR K1)
(10) EFM1632 K.M. SLOW MCB TRIPLE POLE 32A (CB1)
(11) EFH2010C FUSE HOLDER PANEL MTG 20mm (FS1 - FS3)
(11) EFF2030 INS BOOT 200mm FUSE
(11) EFB2030C FUSE 20mm HBC ANTISURGET 3.15A (FS3)
(11) EFF2120C FUSE 20mm HBC ANTISURGET 2A (FS1 & FS2)
(12) EFI0050 MAIN FILTER 3PHASE 50A
(13) EGB3022 CONTACTOR 20A 24VDC MIN (K2, K3, K4, K6 & K8)
(14) EGT0058 O/L RELAY 5.5-8A MIN (1 EACH FOR K2 & K3)
(15) EGT0057 O/L RELAY 3.7-5.5A MIN (FOR K6)
Printed: 16-Jan-06, 15:55
Section 0 Page 3 of 12
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
System Common Components Issue 2: November 02
MKO= `çåíêçä=é~åÉä=
Item Part No. Description
(1) G/AIR/VLV/559 LOCKOUT VALVE – 1/8 NPT
(2) LOCKOUT VALVE PADLOCK
(3) MA00D15883 KEY CABLE ASSEMBLY
(4) ESM0201 EMERGENCY STOP BUTTON
(5) ESM0200C SYSTEM OFF SWITCH
(5a) ESZ0000C GREEN LENS FOR OFF SWITCH
(5b) EPP0001C CLEAR HINGED COVER
(5c) EFL2002 BULB
(6) ESM0200C SYSTEM ON SWITCH
(6a) ESZ0001 RED LENS FOR OFF SWITCH
(6b) EPP0001C CLEAR HINGED COVER
(6c) EFL2002 BULB
Section 0 Page 4 of 12
Printed: 16-Jan-06, 15:55