Utah-94-721002-System-Manual.pdf - 第63页
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4) Transport the rotary vane pump to the grey area and mount it in the required
position in accordance with the pump manufacturer’s instructions. Refer to the
manufacturer’s literature in Volume 3 of this manual.
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(A) BEFORE CONNECTING ANY OF THE SERVICES, ENSURE THAT
THEY ARE TURNED OFF. E.G. COMPRESSED AIR AND GAS
SUPPLY VALVES SET TO THEIR OFF POSITIONS AND ELECTRICAL
SUPPLIES SWITCHED OFF AND LOCKED OUT.
(B) DO NOT RESTRICT ACCESS TO THE EMERGENCY OFF SWITCH
(EMO CONTROL) BY LOCATING CABLES AND OTHER
OBSTACLES IN FRONT OF THE SYSTEM.
IMPORTANT
NOTES
(C) DO NOT LOCATE CABLES WHERE PERSONNEL ARE LIABLE TO
WALK. OIPT RECOMMENDS THAT CABLES ARE LOCATED IN
CABLE TRUNKING / TRENCHES.
1) Connect the extraction collars on the process chamber(s) (e.g. ICP process chambers)
and the gas pod to the appropriate extraction systems.
2) Connect the rotary vane pump exhaust line.
3) Connect the Nitrogen purge lines to the system services panel(s) and the rotary vane
pump.
4) Connect the compressed air supply to the system services panel(s) and to the gas
pod.
5) Connect the gas supplies to the gas pod (all gas supply valves closed).
6) Connect the gas outlet line, control cable and earth cable (see Fig 4.1) from the gas
pod to the system console.
7) Connect the cooling circuits to the system console.
8) At the system PC, connect the monitor, keyboard and mouse, then connect the
control cable(s) from the PC to the system console.
9) Connect the electrical supply from the safety isolation box to the system console. If it
is necessary to connect the 3-phase electrical supply cable to the power box, refer to
sub-section 4.2.3.1.
10) Connect the electrical supply to the PC.
11) Ensure that all covers and panels are fitted and attach notices to the system
indicating that the system is not ready for service.
Installation is now complete and the system is ready for commissioning by OIPT.
Note that customers who have arranged to commission the system themselves can
ignore the remainder of this Section.
12) Complete and sign the ‘System Readiness’ form QCF 89 (shipped with the system),
then fax it to OIPT who will arrange for the system to be commissioned.
Installation and Commissioning
Issue 4: March 05 Page 4-4 of 8 Printed: 16 March 2006 11:59
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If it is necessary to connect the 3-phase supply cable to the power box, use the following
steps.
1) Ensure that the supply cable is not connected to the safety isolation box.
2) Remove the power box cover.
3) Inside the power box, remove the clear plastic safety cover from the power box
(secured to the right-hand side of the power box by four screws).
4) Connect the 3-phase supply cable wires as shown in Fig 4.1.
5) Re-fit the clear plastic safety cover and then the power box cover.
L1 L2 L3 Neutral Protective
Earth (at
side of
panel)
Connection
Terminal for
Earth cable to
Gas Pod
3-phase connections
Clear plastic
safety cover
Fig 4.1: 3-phase supply cable connections at the power box
Installation and Commissioning
Printed: 16 March 2006 11:59 Page 4-5 of 8 Issue 4: March 05
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Commissioning of the system will be carried out by OIPT in accordance with their standard
procedures and any additional requirements stated in the sales contract. Generally, this will
include the following items:
1) Checking that the installation has been carried out satisfactorily.
2) Powering up the system.
3) Checking the operation of the system, including the Emergency Off facility and all
interlocks.
4) Ensuring that the system can perform the processes specified in the sales contract.
5) Providing training on the system.
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This sub-section gives details of adjustments which may be necessary depending on system
configuration. In addition to these adjustments, refer to the Operator Adjustments sub-
section in Section 5 (Operating Instructions) of this manual.
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If your Plasmalab system has a remote Betta-Tech heater/chiller, e.g. CU500, with a Eurotherm
Controller, please note the following.
The Eurotherm controller has a default temperature setpoint. For the system to operate
correctly, this setpoint must be set to a temperature suitable for the system and coolant used.
For example, if the coolant is water, do not set the setpoint to 0º C or below.
Check the setpoint before using the system and if necessary change it in accordance with the
instructions given in the Eurotherm Controller's manual.
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An inert gas, normally nitrogen, is added to the process chamber primary mechanical pump
for a variety of reasons:
a) When pumping condensable vapours, it is flowed via the gas ballast port. This helps
to prevent condensation during compression, and reduces the amount of liquids
such as water vapour or SiCl
4
in the pump fluid.
b) When pumping reactive gases, it is bubbled through the pump fluid, to help drive
out acidic compounds.
c) When pumping flammable or explosive gases, it is added to dilute the gas below the
threshold for explosion.
d) In dry pumps, the purge gas flow is important for managing heat and limiting
particle build up.
WARNING
DILUTION IS NOT USED TO MAKE THE EXHUAST SAFE TO BREATH: IT MUST STILL BE
DUCTED AWAY AND TREATED APPROPRIATELY.
Installation and Commissioning
Issue 4: March 05 Page 4-6 of 8 Printed: 16 March 2006 11:59