Utah-94-721002-System-Manual.pdf - 第313页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Lower Electrode Note: See sub Section 0.5 for hydraulic compon ents and sub Section 5.4 for the heliu…

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Illustrated Parts Catalogue
Ef`m=NUMF=
Lower Electrode Issue 2: November 02
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Section 5 Page 4 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Lower Electrode
Note: See sub
Section 0.5 for hydraulic components and sub Section 5.4 for the helium pipe run.
Item No. in
illustration
OIPT Part Number Description
100-5-26A
RIE + He VARI HEIGHT TABLE
MA91Z21031 ELECTRODE LWR RIE He VARI + CLAMP
MA91A21088 WAFER CLAMP ASSEMBLY
MA91C20442 HELIUM PIPE RUN ASSEMBLY
1 MD91B23034 DARK SPACE SHIELD
2 MD91D21077 ROD (3 OFF)
3 MD91D21077 BUSH (3 OFF)
4 MA91D21074 CAP (3 OFF)
5 MD91D21288 SLEEVE (WAFER CLAMP) (3 OFF)
5a G/SUN/SPG/017 SPRING COMPRESSION D22470 (INSIDE ITEM 5)
6 MD91D21287 PLUG (WAFER CLAMP) (3 OFF)
7 MA91D21352 FRICTION WELD JOINT 3/8" TUBE
8 MD91D21714 WAFER LIFTING PIN (3 OFF)
8a MD91C21713 PIN LIFT STAR
9 MD91B21711 TABLE MAIN BODY
10 MD91C19695 TABLE LOWER PLATE (RIE)
11 MD91C21010 WATER COOLING TUBE
12 MD91C21011 TABLE SUPPORT TUBE
13 MA91A19142 BELLOWS ASSEMBLY
14 G/SEL/O-V/146C 2.6 x 66.3 mm VITON 'O' RING BS146
15 MD81C14107 TABLE FEEDTHROUGH
16 G/SEL/O-V/829C 3.5 x 47.6 mm VITON 'O' RING BS829
17 MD81D14110 COMPRESSION RING
18 MD81D14109 CLAMPING FLANGE
19 MD81C14104 WATER COOLED CLAMP
20 MD81D14111 SPACER
21 MA91C19809 BELLOWS WELDED ASSEMBLY
21a G/SUN/SPG/008 SPRING COMP. O/D 31.75 x 50.8 x 2.6 (INSIDE ITEM
21)
22 G/AIR/CYL/315 AIR CYLINDER CDQ2B20-15D (SMC)
23 MD91D23589 CYLINDER MOUNTING BRACKET
24 MD91D21407 SPRING SHOULDER
25 MD91D21408 SPRING SPACER
26 MD91D19679 CYLINDER SPACER
27 MD91D23105 PIN LIFT ROD
28 MD91B21005 TABLE SUPPORT TUBE
29 MD91B22277 3" DIA WAFER CLAMP – QUARTZ – SEE SUB-SECTION
5.1 for OTHER AVAILABLE WAFER CLAMPS
30 MA91B22491 RETAINING RING FOR WAFER CLAMP
G/AIR/VLV/502 SMC ASSY. VZ3140/5MNZ/001
G/AIR/REG/104 INLINE FLOW REG. AS1001F-04
G/AIR/CYL/807 REED SWITCH SMC No. D-A73L
G/SUN BRG/010 LINEAR MOTION GUIDE
G/SUN/ACT/002 TABLE LIFT ACTUATOR
EQT0014 TYPE 17 Pt RES THERMOMETER
Printed: 16-Jan-06, 15:55
Section 5 Page 5 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Lower Electrode Issue 2: November 02
RKP= `êóç=í~ÄäÉ=ENMMJRJNO^F=L=ENMMJRJNO^LN=J=^åçÇáëÉÇF=
a to g
Section 5 Page 6 of 10
Printed: 16-Jan-06, 15:55