Utah-94-721002-System-Manual.pdf - 第309页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 Lower Electrode pÉÅíáçå=R=J=içïÉê=ÉäÉÅíêçÇÉ= Section 5 - Lower electrode ............................…
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Process Chambers Issue 2: November 02
PKO= `çããçå=éêçÅÉëë=ÅÜ~ãÄÉê=çéíáçå=ëé~êÉë=
OIPT Part No. Qty Description
ICP 180 SOURCE (180 mm DIAMETER)
MD00D18559 1 PERSPEX WINDOW
MD00D18684 1 WINDOW MESH
MD81D15869 1 GASKET
MD00C18541 1 QUARTZ TUBE (ICP SOURCE)
MD00C18542 1 ALUMINA TUBE (ICP SOURCE)
MD00B18547 1 ELECTROSTATIC SHIELD
G/VAC/FIT/978 2 25 O/D x 2 mm SAPPHIRE WINDOW
G/SEL/O-K/235 1 3.53 x 79.0 mm KALREZ 'O' RING BS235
G/SEL/O-K/219 1 3.53 x 32.9 mm KALREZ 'O' RING BS219
G/SEL/O-K/264 2 3.53 x 190.1 mm KALREZ 'O' RING BS264
G/SEL/O-K/117 1 2.63 x 20.3 mm KALREZ 'O' RING BS117
G/VAC/SEL/015 1 NW16 CENTERING RING ALUMINIUM
G/VAC/SEL/025 1 NW25 CENTERING RING
G/VAC/FIT/980 1 SIGHT GLASS (NW25)
ICP PROCESS CHAMBER WITH SINGLE VIEWPORT AND SIDE ACCESS DOOR FOR
ICP180 SOURCE (100-3-41C)
G/VAC/SEL/040 1 NW40 CENTERING RING
G/GAS/FIT/614 1 ¼ RETAINING GASKET
G/SEL/O-V/265 1 3.5 x 196.4 mm VITON 'O' RING BS265
G/SEL/O-V/268 1 3.5 x 215.5 mm VITON 'O' RING 200-268
PKP== f`mNUM=ëçìêÅÉ=çéíáçå=ëé~êÉë=
OIPT Part No. Qty Description
G/SUN/DWL/920 2 S/S DOWEL 10.006/10
G/VAC/SUN/032 1 EDWARDS VACUUM INTERLOCK SWITCH
ESZ91007 1 MICRO SWITCH 331-45
G/VAC/SEL/040 1 NW40 CENTERING RING
G/SEL/O-V/269 1 3.5 x 221.85 mm VITON 'O' RING 200-269
G/VAC/VLV/930 1 46 x 236 MESC VALVE (ALUMINIUM)
CHAMBER AND HEATER PUMP DOWN KITS
EXZ0200 1 SERIES 2 ON/OFF HEATER CONTROL
EQT0002 1 TH'COUPLE TYPE K 200/C (replaces EQF0100)
G/SUN/HET/010 1 FIREROD ½" x 101LG 240V 250W
Section 3 Page 4 of 4
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Lower Electrode
pÉÅíáçå=R=J=içïÉê=ÉäÉÅíêçÇÉ=
Section 5 - Lower electrode..............................................................................................................................1
5.1 Standard He backed lower electrode with centrally positioned 3-pin lift and wafer clamp assembly
(100-5-36A) / (100-5-36A/01 - Anodised).............................................................................................................2
5.2 RIE + He vari height table (100-5-26A)................................................................................................................4
5.3 Cryo table (100-5-12A) / (100-5-12A/1 - Anodised).............................................................................................6
5.4 Helium pipe run...................................................................................................................................................8
5.5 Lower electrode option spares............................................................................................................................9
Printed: 16-Jan-06, 15:55
Section 5 Page 1 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Lower Electrode Issue 2: November 02
RKN= pí~åÇ~êÇ=eÉ=Ä~ÅâÉÇ=äçïÉê=ÉäÉÅíêçÇÉ=ïáíÜ=ÅÉåíê~ääó=
éçëáíáçåÉÇ=PJéáå=äáÑí=~åÇ=ï~ÑÉê=Åä~ãé=~ëëÉãÄäó=ENMMJRJPS^F=L==
ENMMJRJPS^LMN=J=^åçÇáëÉÇF=
a to g
Section 5 Page 2 of 10
Printed: 16-Jan-06, 15:55