Utah-94-721002-System-Manual.pdf - 第332页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Pumping Pipework I ssue 2: November 02 UKN= dÉåÉê~ä= A key to the symbols used to represent vacuum s ystem component s in …

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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Pumping Pipework
pÉÅíáçå=U=J=mìãéáåÖ=éáéÉïçêâ=
Section 8 - Pumping pipework.........................................................................................................................1
8.1 General.................................................................................................................................................................2
8.2 200mm pipework + 200 VAT APC (100-8-20)......................................................................................................3
8.3 Pumping pipework option spares.......................................................................................................................6
Printed: 16-Jan-06, 15:55
Section 8 Page 1 of 6
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Pumping Pipework Issue 2: November 02
UKN= dÉåÉê~ä=
A key to the symbols used to represent vacuum system components in the following illustrations is shown in the following
key; where no symbol exists for a component, it is either labelled or can be identified from the associated table.
Key to vacuum schematic symbols
Section 8 Page 2 of 6
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Pumping Pipework
UKO= OMMãã=éáéÉïçêâ=H=OMM=s^q=^m`=ENMMJUJOMF=
N
2
1
Bypass not
always fitted-
see system
for exact
configuration
PROCESS CHAMBER
N
2
N
2
V
ACUUM
SWITCH
TURBOMOLECULAR
PUMP CONTROLLER
ROTARY
VANE PUMP
A
PC
CONTROLLER
1
13
12
12
15
19
12
12
14
14
12
1
2
3
3
4
5
6
7
8
9
10
11
16
17
18
15
20
14
TURBO
BACKING/
PURGE VALVE
CHAMBER
ROUGHING
VALVE
3
Printed: 16-Jan-06, 15:55
Section 8 Page 3 of 6