Utah-94-721002-System-Manual.pdf - 第54页

mä~ëã~ä~Ä póëíÉã=NMM l ñÑçêÇ =fåëíê ìãÉåíë =m ä~ëã~=qÉÅ ÜåçäçÖó== System Manual PKNM= VQJNMMJNMJMR`=páåÖäÉ=ï~Ñ Éê=~ìíçã~íáÅ=äç~Ç=äçÅâ== Fig 3.8: Single wafer automatic loa d lock Description UC Davis 94-721001 Issu e 1: …

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉã=NMM

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The standard toxic gas line is shown in Fig 3.7. All gas fittings are VCR and all stainless steel

pipework connections are welded. The gas in tube passes into the side of the gas pod case,

protected by a grommet.

Gas from the customer’s cylinder/regulator/filter flows into the gas in tube to the filter.

WARNING

THE CLOSED INLET VALVE REMAINS SHUT FOR DIFFERENTIAL PRESSURE UP TO 210

BAR. A FAILURE UPSTREAM WHICH PRODUCES LINE PRESSURES ABOVE THIS WILL

NOT BE CONTAINED. IF THIS PRODUCES A HAZARD, THE CUSTOMER IS WARNED TO

FIT ADDITIONAL PROTECTION UPSTREAM.

With the Inlet Valve and Outlet Valve open and the Bypass Valve closed, the gas flows

through the 2 µm filter to the mass flow controller (MFC). The MFC controls the flow of gas as

commanded by the system controller. The gas then flows through the outlet valve and into

the gas out manifold where it is mixed with the other process gases before flowing into the

process chamber.

With the Bypass Valve open, the gas flows through the bypass line directly to the gas out

manifold. This facility is provided to enable the toxic gas line to be evacuated by pumping

down the process chamber. This is necessary to prevent air entering the gas line and

contaminating it during a gas cylinder changeover, and to service the gas line in the event of

an MFC or filter blockage.

GAS IN TUBE

(STAINLESS STEEL)

GROMMET

INLET VALVE

(PNEUMATICALLY

CONTROLLED

SHUT-OFF)

OUTLET VALVE

(PNEUMATICALLY

CONTROLLED

SHUT-OFF)

2 µm FILTER

BYPASS VALVE

(MANUALLY

OPERATED

SHUT-OFF)

MASS

FLOW

CONTROLLER

GAS OUT

MANIFOLD

BYPASS

LINE

Fig 3.7: 94-81-9-21 Standard toxic gas line

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The gas line interlock kit is a pneumatically controlled hardware interlock, which prevents the

simultaneous flow of process gases, which if combined could produce a hazardous mixture.

Description

Printed: 22-Mar-06, 7:29 Page 3-17 of 22 UC Davis 94-721001 Issue 1: March 06

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

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Fig 3.8: Single wafer automatic load lock

Description

UC Davis 94-721001 Issue 1: March 06 Page 3-18 of 22 Printed: 22-Mar-06, 7:29

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉã=NMM

The automatic load lock, shown in Fig 3.8, enables wafer loading and unloading to be

automatically achieved under vacuum. These operations are controlled by computer,

requiring minimum operator involvement. The Oxford Instruments Plasma Technology design

results in a very compact load lock (395 mm long with 400 mm of wafer support travel). The

load lock is capable of handling MESC

standard wafers up to 200 mm diameter.

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The operating principle of the automatic load lock wafer transfer mechanism is shown in Fig

3.9. This simplified illustration shows the three major components of the mechanism: the

fixed track, the carriage and the wafer support.

CARRIAGE RUNS

ALONG THE

FIXED TRACK

TRACK FIXED TO

LOAD LOCK

BASEPLATE

WAFER SUPPORT

RUNS ALONG THE

TRACK ON THE TOP

OF THE CARRIAGE

TRACK ON TOP OF

CARRIAGE

WAFER TRANSPORT MECHANISM

FULLY EXTENDED

WAFER TRANSPORT MECHANISM

FULLY RETRACTED

Fig 3.9: Simplified wafer transport mechanism operation

The fixed track is mounted on the load lock's baseplate and provides the bearing surface on

which the carriage runs. The carriage also has a top bearing surface on which the wafer

support runs.

When the mechanism is driven, the carriage runs along the fixed track and the wafer support

runs along the carriage's track simultaneously. This enables the wafer support to travel from

its fully retracted position (entirely contained in the load lock) to its fully extended position

(wafer load/unload position in the processing chamber).

Modular Equipment Standards Committee

Description

Printed: 22-Mar-06, 7:29 Page 3-19 of 22 UC Davis 94-721001 Issue 1: March 06