Utah-94-721002-System-Manual.pdf - 第319页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Issue 2: November 02 RF Supplies and Automatch pÉÅíáçå=S=J=oc=ëìééäáÉë=~åÇ=~ìíçã~ íÅÜ= Section 6 - RF supplies and automat…

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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Lower Electrode Issue 2: November 02
NOTES:
Section 5 Page 10 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 RF Supplies and Automatch
pÉÅíáçå=S=J=oc=ëìééäáÉë=~åÇ=~ìíçã~íÅÜ=
Section 6 - RF supplies and automatch............................................................................................................1
RIE 600W Generator + OPT AMU 200 pipe (100-6-200V).................................................................................................3
6.1 Automatch assembly - vac cap etch 5-turn coil (MA00A23771).........................................................................3
ICP180 FLOAT TOP ASSY. ALUMINA (100-6-56)................................................................................................................5
6.2 Automatch assembly - vac cap (MA00Z23828)...................................................................................................5
6.3 AMU control panel...............................................................................................................................................6
6.4 RF generators .......................................................................................................................................................7
6.5 RF supplies and automatch option spares..........................................................................................................8
6.6 RF supplies and automatch (vac cap) ICP180 option spares...............................................................................8
Printed: 16-Jan-06, 15:55
Section 6 Page 1 of 8
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
RF Supplies and Automatch Issue 2: November 02
VACUUM AUTOMATCH ASSEMBLY EXTERNAL VIEW
(2) Trimpots
100k (2 off)
(3) RF Inlet
(4) DC motor and
gearbox assy
(5) AMU Control PCB
(7) Fan Finger Guard
(6) Fan
(1) Capacitive
feed through
(4 off)
V
ACUUM AUTOMATCH ASSEMBLY INTERNAL VIEW
(12) 1000pf
vacuum capacitor
(11) 500pf
vacuum capacitor
(8) Modified
gear
(14) PTFE tube
(17) AMU DC bias coil
(19) AMU sense PCB
(20) Ferrite cube
(21) Insulator
(18) Conductor
(inside insulator)
(9) 1000pf capacitor
drive adaptor
(10) 500pf
capacitor insulator
(13) S/S tube
(15) Cooling
connectors
(16) Cooling ring assy
Section 6 Page 2 of 8
Printed: 16-Jan-06, 15:55