Utah-94-721002-System-Manual.pdf - 第27页
Health and Safety lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= mä~ëã~ä~Ä and fçåÑ~Ä 1.3.12.9 Never smoke or eat in the 'clean room' or where gases are stored. In addition to the fire risks and particulate contaminatio…
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WARNING
PINCH POINT - LIMBS, FINGERS ETC CAN BECOME TRAPPED RESULTING IN SEVERE
INJURY.
Ensure that all personnel are kept clear of pinch points, e.g. chamber doors, hoist
mechanisms, variable height electrodes etc, while these components are moving.
1.3.11.4 Close chamber doors carefully; ensure that personnel vacate the vicinity of the door
and its operating mechanism before it is closed to avoid trapped fingers etc.
1.3.11.5 Handle sprung components under compression or tension carefully, Take suitable
precautions, including eye protection, before maintaining small sprung items.
1.3.11.6 Beware of machinery in motion such as robotic arms, substrate lifting mechanisms
and shutters. Remember that machinery can start suddenly. Ensure that all safety
guards are correctly fitted before use.
1.3.11.7 Beware of deposition layers under stress. Wear eye protection before cleaning
surfaces which are coated with layers of material, as particles can be ejected with
considerable force.
1.3.11.8 Handle embrittled wire, e.g. filaments, carefully. They can break and become
embedded in the skin.
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1.3.12.1 Ensure that local and national Health and Safety standards are studied and
followed. It is the customer’s responsibility to carry out their own risk assessment
and to develop a safe system of work.
1.3.12.2 Ensure that all personnel who operate this equipment are trained to use the
equipment, and are alerted to the range of hazards present.
1.3.12.3 When working with the equipment, ensure that there are always at least two
persons present.
1.3.12.4 If a tool is used to access or alter any part of the equipment, this is classed as a
maintenance action. Persons performing maintenance tasks must be skilled and
trained to know and avoid the hazards present. Before carrying out any
maintenance work, read the relevant manuals supplied by manufacturers of
proprietary components.
1.3.12.5 Ensure that the main electrical supply, compressed air, all other gases and the water
supply are disconnected before starting maintenance work (Also see sub-section
1.3.9).
1.3.12.6 Consult Oxford Instruments Plasma Technology before making any alterations to the
system or changing the process gases.
1.3.12.7 Ensure that all personnel who may be expected to have access to the system during
an emergency, such as firemen, paramedics etc. are familiar with the location of the
main circuit breakers and valves.
1.3.12.8 Whenever any component is returned to Oxford Instruments Plasma Technology or
to any of their agents, it must be accompanied by copies of the Goods Return Form
(QCF 60).
Health and Safety
Issue 11: August 2004 Page 1-14 of 18 Printed:29 May 2005, 06:31
Health and Safety lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= mä~ëã~ä~Ä and fçåÑ~Ä
1.3.12.9 Never smoke or eat in the 'clean room' or where gases are stored. In addition to the
fire risks and particulate contamination presented by smoking, some chemicals when
burnt generate carcinogenic or toxic compounds.
Health and Safety
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During manufacture, warning and advisory labels are attached to the system to indicate
potential hazards and components, which should not be operated or maintained without first
reading the relevant manual. Typical labels and their meanings are as follows:
DANGER
RF ENERGY
Disconnect
electrical supply
before servicing
Danger of physical injury from RF radiation or from touching
components within the labelled equipment.
PINCH POINT
Keep hands away
from chamber lid
when closing.
WARNING
Danger of trapping limbs, fingers etc. in the labelled equipment.
WARNING
STRONG
MAGNETIC FIELD
Avoid contact with
this area.
Danger of physical injury from the Strong Magnetic Field generated by
the labelled equipment.
WARNING
HOT SURFACE
Do not touch
Caution, hot surface IEC 417, No. 5041
DANGER
LOW TEMPERATURE
Wear thermal
protective gloves
Danger of physical injury, from the labelled equipment.
WARNING
SERVICE BY
QUALIFIED STAFF
ONLY
Refer to manual
Read the relevant manual before proceeding to operate or maintain the
labelled equipment.
WARNING
RF & UV RADIATION.
DO NOT USE THIS PORT
FOR VIEWING WITH THE
NAKED EYE
WITHOUT MESH
SHIELD IN PLACE
Danger of physical injury from RF and UV radiation from the labelled
components.
WARNING
LASER BEAM
Disconnect
electrical supply
before servicing
Danger of physical injury from Laser Beam generated by the labelled
components.
Health and Safety
Issue 11: August 2004 Page 1-16 of 18 Printed:29 May 2005, 06:31