Utah-94-721002-System-Manual.pdf - 第281页

System Manual lñÑçêÇ=fåëí êìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë SK= qêçìÄäÉëÜççíáåÖ= WARNING HAZARDOUS RF VOLT AGE - CONTACT CAN CAUSE DE ATH, SEVERE INJ URY OR BURNS. ANY WORK REQUIRING THE REMOVAL OF COVERS OR P…

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Auto/manual switch: In the ‘Auto’ position, the unit will attempt to tune for minimum

reflected RF power. In the ‘Manual’ position, the capacitors

positions are controlled manually.

C1 max/min switch: In manual mode, this switch can be used to drive capacitor C1

towards maximum or minimum.

C2 max/min switch: In manual mode, this switch can be used to drive capacitor C2

towards maximum or minimum.

Note that capacitor positions are displayed as a three-digit number

from 000 (minimum) to 999 (maximum).

Display Selector

Switch:

The RF monitoring positions display the analogue voltages on the

remote control lines to the RF generators, as a service aid. The Hi/Lo

position reads a high (>9V) value when the wafer bias RF supply is at

full scale, and a low (<1V) value when this supply is scaled back to one-

tenth full power. This feature improves resolution of RF low power.

C1 park.

Potentiometer:

This control can be fitted either to the control panel or on the AMU

control board. The automatch will drive C1 to this pre-set position

when the RF is turned off, if the unit is set to ‘auto’

C2 park.

Potentiometer:

This control can be fitted either to the control panel or on the AMU

control board. The automatch will drive C2 to this pre-set position

when the RF is turned off, if the unit is set to ‘auto’

OIPT Automatch Unit

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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== ^ää=lfmq=póëíÉãë

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WARNING

HAZARDOUS RF VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY

OR BURNS.

ANY WORK REQUIRING THE REMOVAL OF COVERS OR PANELS MUST

ONLY BE PERFORMED BY AUTHORISED PERSONNEL WHO ARE AWARE OF

THE HAZARDS INVOLVED.

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Use the following chart to locate and identify faults. Note that the chart lists typical fault

symptoms and is not exhaustive.

SYMPTOM POSSIBLE CAUSES ACTION

(A) Drive motors do

not respond to

automatic or

manual control

Fuse FS2 blown

Fuse FS1 or FS101 tripped.

Investigate and repair fault, which caused the

fuse to blow. Then renew the fuse.

Investigate and repair the fault, which caused

the fuse to trip. (The fuses will automatically

reset once the fault is repaired.)

Note that these components are semiconductor

fuses which respond to an increase in current

above their rating (approximately 200 mA) by

increasing their internal resistance significantly.

The voltage drop across each of these

components under non-fault conditions is

approximately 0.5V

When tripped by high current, the voltage drop

is almost the full supply voltage i.e. 24V.

After power is removed, the devices require 20

seconds to cool down and reset.

(B) C1 or C2 drive to

min or max

1. C1 or C2 starting too far

from final match position

Adjust park potentiometers (Refer to sub-

section 6.4 (page 20).

2. Match position is out of

accessible range

1. Change process conditions

2. Change component fit in AMU (skilled

personnel only). Refer to sub-section 6.3 (page

19).

min or max and do

not return

manually

Capacitor has travelled past

an electrical limit

1. All vane capacitors only: Continue manual

travel in the same direction (to max if capacitor

is at max). The capacitor will turn fully until it

passes the opposite limit.

2. Readjust limit settings

(D) Plasma does not

strike even though

the reflected power

is low

Gas pressure is too low or

too high

Caution: do not run for > 2 minutes in this

condition. Change gas pressure to 20 - 200

mTorr range (RIE), or 0.5 - 1.5 Torr range

(PECVD)

OIPT Automatch Unit

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SYMPTOM POSSIBLE CAUSES ACTION

(E) C1 or C2 oscillate

close to match

1. Amplifier gain too high

2. C1 or C2 spindle thread

dirty.

See sub-section 6.1.1 (page 16).

Remove capacitor, clean and re-lubricate

capacitor’s spindle thread and bearing. Re-

align; see sub-section 6.1.2 (page 17).

(F) Drive motor shafts

rotate but capacitor

spindles do not.

Coupling between the motor

shafts and capacitor spindles

has become disengaged or

loose.

See sub-section 6.1.2 (page 17).

(G) End stops don’t

work, motor drives

through.

Park potentiometers have

broken

Check park potentiometers behind AMU

control panel and replace if necessary.

(H) Error signal pots

don’t adjust the

error signal or both

adjust one signal

only.

Links placed incorrectly Check links LK6, 7, 10 & 107 to ensure they are

in the correct position. If link is open end type,

ensure that metal insert is still present.

Hints and Tips

• Do not remove anything from the Motor Control board without removing the

power (JP2) first.

• When in ‘Auto’ mode RV1 and RV2 found on the side of the AMU casing can be used

to make fine adjustments to the match position.

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Refer to Symptom (E) in the Fault diagnosis chart (see sub-section 6.1, page 15).

When adjusting the amplifier gain, initially adjust the associated variable resistor (RV101 for

C1 or RV1 for C2; see for locations). These variable resistors provide a ‘fine’ adjustment. If

required, a coarse adjustment is available by using links LK102 and LK2 as shown in Fig 7.

Pin on

PCB

Link shown in

position A

Position A = Lowest amplifier gain

Position B = Medium amplifier gain

Position C = Highest amplifier gain

Fig 7: LK102 and LK2 settings

OIPT Automatch Unit

Issue 6: February 05 Page 16 of 20 Printed: 5-Jan-06, 8:03