Utah-94-721002-System-Manual.pdf - 第314页

mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Lower Electrode I ssue 2: November 02 RKP= `êóç=í~ÄäÉ=ENMMJRJNO^F=L=ENMMJRJNO^LN=J=^åçÇáëÉÇF= a to g Section 5 Page 6 of 1…

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mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Lower Electrode
Note: See sub
Section 0.5 for hydraulic components and sub Section 5.4 for the helium pipe run.
Item No. in
illustration
OIPT Part Number Description
100-5-26A
RIE + He VARI HEIGHT TABLE
MA91Z21031 ELECTRODE LWR RIE He VARI + CLAMP
MA91A21088 WAFER CLAMP ASSEMBLY
MA91C20442 HELIUM PIPE RUN ASSEMBLY
1 MD91B23034 DARK SPACE SHIELD
2 MD91D21077 ROD (3 OFF)
3 MD91D21077 BUSH (3 OFF)
4 MA91D21074 CAP (3 OFF)
5 MD91D21288 SLEEVE (WAFER CLAMP) (3 OFF)
5a G/SUN/SPG/017 SPRING COMPRESSION D22470 (INSIDE ITEM 5)
6 MD91D21287 PLUG (WAFER CLAMP) (3 OFF)
7 MA91D21352 FRICTION WELD JOINT 3/8" TUBE
8 MD91D21714 WAFER LIFTING PIN (3 OFF)
8a MD91C21713 PIN LIFT STAR
9 MD91B21711 TABLE MAIN BODY
10 MD91C19695 TABLE LOWER PLATE (RIE)
11 MD91C21010 WATER COOLING TUBE
12 MD91C21011 TABLE SUPPORT TUBE
13 MA91A19142 BELLOWS ASSEMBLY
14 G/SEL/O-V/146C 2.6 x 66.3 mm VITON 'O' RING BS146
15 MD81C14107 TABLE FEEDTHROUGH
16 G/SEL/O-V/829C 3.5 x 47.6 mm VITON 'O' RING BS829
17 MD81D14110 COMPRESSION RING
18 MD81D14109 CLAMPING FLANGE
19 MD81C14104 WATER COOLED CLAMP
20 MD81D14111 SPACER
21 MA91C19809 BELLOWS WELDED ASSEMBLY
21a G/SUN/SPG/008 SPRING COMP. O/D 31.75 x 50.8 x 2.6 (INSIDE ITEM
21)
22 G/AIR/CYL/315 AIR CYLINDER CDQ2B20-15D (SMC)
23 MD91D23589 CYLINDER MOUNTING BRACKET
24 MD91D21407 SPRING SHOULDER
25 MD91D21408 SPRING SPACER
26 MD91D19679 CYLINDER SPACER
27 MD91D23105 PIN LIFT ROD
28 MD91B21005 TABLE SUPPORT TUBE
29 MD91B22277 3" DIA WAFER CLAMP – QUARTZ – SEE SUB-SECTION
5.1 for OTHER AVAILABLE WAFER CLAMPS
30 MA91B22491 RETAINING RING FOR WAFER CLAMP
G/AIR/VLV/502 SMC ASSY. VZ3140/5MNZ/001
G/AIR/REG/104 INLINE FLOW REG. AS1001F-04
G/AIR/CYL/807 REED SWITCH SMC No. D-A73L
G/SUN BRG/010 LINEAR MOTION GUIDE
G/SUN/ACT/002 TABLE LIFT ACTUATOR
EQT0014 TYPE 17 Pt RES THERMOMETER
Printed: 16-Jan-06, 15:55
Section 5 Page 5 of 10
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Lower Electrode Issue 2: November 02
RKP= `êóç=í~ÄäÉ=ENMMJRJNO^F=L=ENMMJRJNO^LN=J=^åçÇáëÉÇF=
a to g
Section 5 Page 6 of 10
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Lower Electrode
Item No. in
illustration
OIPT Part Number Description
100-5-12A CRYO TABLE
100-5-12A/1 CRYO TABLE - ANODISED
MA91Z20975 TABLE ASSY (-150/+140C)
MA91A20949 ELECTRODE LOWER ASSY (-150/+140C)
ANODISED
MA91A22537 WAFER CLAMP ASSEMBLY 200 PORT
MA91C20442 HELIUM PIPE RUN ASSEMBLY
1 MD91D22533 WAFER CLAMP RING SUPPORT
2 G/SEL/O-V/218C 3.5 x 31.3 mm VITON 'O' RING BS218
3 MA91D17600 PIN WELDED ASSEMBLY
4 MD91D17604 FLANGED BUSH
5 MD91D17602 HOUSING
6 G/SUN/SPG/012 COMP. SPRING LEE No. LCM-050C-5 (NOT SHOWN)
7 G/SUN/BSH/123 OILITE BUSH 16 x 20LG QM21-20
8 G/AIR/CYL/320 20 mm CYLINDER CDQ2B20-20D
9 G/SEL/O-V/146C 2.6 x 66.3 mm VITON 'O' RING BS146
10 MD81C14107 TABLE FEEDTHROUGH
11 MD81D14110 COMPRESSION RING
12 G/SEL/O-V/829C 3.5 x 47.6 mm VITON 'O' RING BS829
13 MD81D14109 CLAMPING FLANGE
14 MD81D14111 SPACER
15 MD91D19828 PUSH ROD
16 MD81C14104 WATER COOLED CLAMP
17 MA91C19809 BELLOWS WELDED ASSEMBLY
18 MD91D19679 CYLINDER SPACER
19 MD91D21408 SPRING SPACER
20 MD91D21407 SPRING SHOULDER
21 G/AIR/CYL/315 AIR CYLINDER CDQ2B20-15D (SMC)
22 MD91D23589 CYLINDER MOUNTING BRACKET
22a G/SUN/SPG/008 SPRING COMP. O/D 31.75 x 50.8 x 2.6 (NOT SHOWN)
23 MD91B20935 DSS SUPPORT TUBE
23a MD91B20946 DSS SUPPORT TUBE ANODISED (ALT. TO ITEM 23)
24 MD91B20939 DARK SPACE SHIELD
24a MD91B20945 DARK SPACE SHIELD ANODISED (ALT. TO ITEM 24)
25 MD91D20934 LOCATING RING
26 MA91A20947 ELECTRODE LOWER ASSEMBLY WELDED
26a MA91B20944 ELECTRODE LOWER ANODISED (ALT. TO ITEM 26)
27 MD91C21713 PIN LIFT STAR (UNDER)
28 MD91D21714 PIN LIFT ROD (UNDER)
29 MD91B22531 WAFER CLAMP BOTTOM PLATE
30 MD91D22532 WAFER CLAMP SUPPORT ROD
31 MA91B22491 RETAINING RING FOR WAFER CLAMP
32a MD91B22327 2" DIA WAFER CLAMP - QUARTZ
32b MD91B22277 3" DIA WAFER CLAMP - QUARTZ
32c MD91B22328 4" DIA WAFER CLAMP - QUARTZ
32d MD91B22938 4¼" DIA WAFER CLAMP - QUARTZ
32e MD91B24693 5" DIA WAFER CLAMP - QUARTZ
32f MD91B22329 6" DIA WAFER CLAMP - QUARTZ
32g MD91B23026 8" DIA WAFER CLAMP - QUARTZ
G/AIR/VLV/502 SMC ASSY. VZ3140/5MNZ/001
G/AIR/REG/104 INLINE FLOW REG. AS1001F-04
G/AIR/CYL/807 REED SWITCH SMC No. D-A73L
EQT0014 TYPE 17 Pt RES THERMOMETER
Note: See sub
Section 0.5 for hydraulic components and sub Section 5.4 for the helium pipe run.
Printed: 16-Jan-06, 15:55
Section 5 Page 7 of 10