Utah-94-721002-System-Manual.pdf - 第41页
System Manual lñÑçêÇ=få ëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ Ä póëíÉã=NMM PKPKQ= fåíÉêäçÅâë= There are two types of interlocks used on the =mä~ëã~ä~Ä = póëíÉã=NMMI hardware and software. In all areas, the hardware inte…
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
Fig 3.1: Typical control system
The system may be run from the PC terminal in manual mode, that is using direct 'real time'
control over the process, or in automatic mode where the system performs the entire process
according to previously entered recipes. The extensive Oxford Instruments Plasma Technology
process library supports all mä~ëã~ä~Ä
=
póëíÉã=NMM=configurations. A full description of the 'PC
2000' control instructions is provided in Section 5.
For details of the control wiring, see the relevant drawings in Volume 2 of this manual.
Description
UC Davis 94-721001 Issue 1: March 06 Page 3-4 of 22 Printed: 22-Mar-06, 7:29
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉã=NMM
PKPKQ= fåíÉêäçÅâë=
There are two types of interlocks used on the=mä~ëã~ä~Ä
=
póëíÉã=NMMI hardware and software.
In all areas, the hardware interlock will override any software interlock. The hardware
interlocks, and their effect on the system components in the case of an interlock becoming
open circuit are as follows:
The electrical interlocks are divided into two circuits controlling the power to the system.
1) The mains power connection is made to a system Power Distribution Unit. The Power
Distribution Unit will disable all of its power outputs under the following conditions:
a) If the Emergency Off button is pressed.
b) If there is an interruption of the power input to the system.
c) If the Power Distribution Unit external facility interlock sensor link becomes
open circuit.
NOTE:
The Power Distribution Unit external facility interlock sensor
link enables the interlocks of external sensors, e.g. gas
detectors, exhaust scrubbers, etc., to be monitored by the Power
Distribution Unit. External interlock contacts connected to this
link should be Normally Closed, i.e. faulting to an Open Circuit.
2) The system internal 24V supply, comprises a process line, a chamber lid line and a
water flow switch (where fitted):
The 24V process line, which controls the process gases and plasma power supply
units, will be disabled if the Vacuum Safety Switch is open circuit, i.e. Chamber
Pressure > 600 mbar.
The 24V chamber lid line will be disabled if the chamber lid is OPEN, leaving the
system controller operational, but disabling all system components.
Description
Printed: 22-Mar-06, 7:29 Page 3-5 of 22 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
Emergency Off / Electrical
Fail
24V Process line 24V Chamber lid line
Interlock Fail Restore Fail Restore Fail Restore
System/Controller OFF Restart
Required
ON
ON
RF Generator OFF Powered, NOT
active
OFF Powered,
NOT active
OFF Powered, NOT
active
Process Gases OFF Powered, NOT
active
OFF Powered,
NOT active
OFF Powered, NOT
active
Automatic
Pressure
Controller Valve
CLOSED
CLOSED
**
NO
CHANGE
NO
CHANGE
CLOSED
CLOSED
Load lock
Slit Valve
HOLD
*
HOLD
HOLD
HOLD
HOLD
HOLD
Pumps OFF Pumps must be
restarted
NO
CHANGE
NO
CHANGE
OFF Pumps must
be restarted
* If closed, stays closed.
If open, will stay open until the loading arm is at its home position; then it will close.
** If ‘high pressure’ is signalled during process, APC opens and process step aborts. High pressure at
other times does not alter the APC.
Table 3.1: Consequences of open circuit interlocks
Other machine protection switches include:
a) A water flow switch. Low flow is reported to the system controller, which disables
specific devices until flow is restored.
b) Pump overload detection. If the primary pump stops because the over-current
protection switch opens, then the system aborts.
The software also monitors the position of the wafer handling mechanisms, ensuring safe
operation.
PKPKR= pÉêîáÅÉë=
For details of the services required for the base unit, refer to Section 2 of this manual.
Description
UC Davis 94-721001 Issue 1: March 06 Page 3-6 of 22 Printed: 22-Mar-06, 7:29