Utah-94-721002-System-Manual.pdf - 第95页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉ ÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM RKSKP= iÉ~â=ÇÉíÉÅíáçå=~åÇ=jc `=Å~äáÄê~íáçå=äçÖ=é~ÖÉ= The leak detection and MFC calibration log page is accessed from the Selec t Run page by sele…

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The Run Log page is accessed from the Select Run page by clicking on the View Run button

with any process run other than a leak detection run (

) or MFC calibration run ( )

selected.

Fig 5.6: Run log page

The page displays the Parameters, Demands and Readbacks for the selected log data.

The facilities provided on the page are as follows:

Select Run

button

Displays the Select Log page.

Log information

panel

Displays details about the selected log data.

Parameter list

Lists the logged parameter names

Demand list

Displays the demanded parameter value

Readbacks list

Displays the logged parameter values with respect to time at the log

intervals specified for the process run. The list can be scrolled

horizontally either by single readbacks or by page. The list can also be

scrolled vertically to display further steps (for multi-step recipes).

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-28 of 52 Printed: 22-Mar-06, 10:42

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The leak detection and MFC calibration log page is accessed from the Select Run page by

selecting either a leak detection run (

) or MFC calibration run ( ) and then clicking on

the View Run button.

Log panel

Graph panel

Leak detection run

MFC Calibration run

Leak detection trace

(Red)

MFC calibration trace

(Blue)

Time axis scale controls

Pressure axis scale controls

Fig 5.7: Typical leak detection and MFC calibration log page

This page is used to view details of up to six leak check runs and/or MFC calibration runs. Note

that Fig 5.7 shows details of a leak test (red trace) and an MFC calibration run (blue trace).

The facilities available on this page are:

Select Run

button

Displays the Select Run page.

Clear buttons

Select to remove the associated data from the log panel and graph

panel. Note that to re-display the cleared data, you must return to the

Select Run page and re-select it.

Log panel Displays details of each run in text format.

Graph panel Displays a plot of each run (pressure versus time). Each run is

represented by a coloured trace as indicated by the palette displayed

adjacent to the run data in the Log panel. The graph can be scaled in

each axis by the controls located at the bottom-left corner of the

graph.

Operating Instructions

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A manual adjustment panel, shown in Fig 5.8, is located behind a flap in the front of the

equipment rack. It comprises the following controls and indicators:

Auto / Manual switch: Sets the operating mode of the RF matching unit.

C1 MAX / MIN: Manual adjustment of RF matching capacitor C1. (Rotating its shaft

clockwise or counter clockwise.)

C2 MAX / MIN: Manual adjustment of RF matching capacitor C2. (Rotating its shaft

clockwise or counter clockwise.)

C1 PARK: Park position potentiometer for C1.

C2 PARK: Park position potentiometer for C2.

RF Interlock ON/OFF: Disables the RF interlock. RF generators deliver no power if the

interlock is off.

Capacitor positions for C1 and C2 are displayed as numbers from 000 (minimum) to 999

(maximum).

AUTO

MANUAL

C1 MAX

C1 MIN

C2 MAX

C2 MIN

C1 PARK

C2 PARK

OFF

Interlock

DISPLAY SELECTO

Fig 5.8: Typical AMU control panel

Note that Fig 5.8 shows an AMU control panel with control facilities for two AMUs. The left-

hand side controls are for AMU1 and the right-hand side controls are for AMU2. The LCD

displays are switched using the DISPLAY SELECTOR switch as shown in the following table.

DISPLAY SELECTOR

POSITION

LCD 1 (UPPER) LCD 2 (LOWER)

1 AMU 1 C1 POSITION AMU 1 C2 POSITION

2 RF 1 FORWARD POWER RF 1 REFLECTED POWER

3 RF 1 SETPOINT RF 1 Hi/Lo

4 RF 2 FORWARD POWER RF 2 REFLECTED POWER

5 RF 2 SETPOINT SPARE

6 AMU 2 C1 POSITION AMU 2 C2 POSITION

For full details of the Oxford Instruments Plasma Technology AMU, refer to its Operation and

Maintenance manual in Volume 3 of this manual.

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-30 of 52 Printed: 22-Mar-06, 10:42