Utah-94-721002-System-Manual.pdf - 第209页

Installation Data = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~Ä póëíÉãNMM 646 128 6 200 100 100 mm DIAMET ER EXTRACTIO N COLLAR EARTH ( GROUND) TERMI NAL BLOCK 316 386 456 526 596 666 736 806 876 946 1016 1086 11 5 6 …

100%1 / 362
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1300
60
233
478
480
Optional
stand
Fig 7: 6-line gas pod mounted on optional free-standing frame
Installation Data (ICP 180)
Issue 5: June 05 Page 12 of 18 Printed: 22-Mar-06, 6:57
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
646
1286
200
100
100 mm DIAMETER
EXTRACTION COLLAR
EARTH (GROUND)
TERMINAL BLOCK
316
386
456
526
596
666
736
806
876
946
1016
1086
1156
1226
0
ENTRY GLANDS FOR
COMPRESSED AIR PIPE
AND ELECTRICAL CABLES
(CONTROL CABLE TO MAIN
UNIT IS 3 METRES LONG)
¼"
160
30
SECONDARY GAS OUTLET
LINE TO SYSTEM (ONLY
USED IF A SPLIT MANIFOLD
IS FITTED)
PRIMARY GAS
OUTLET LINE TO
SYSTEM
GAS INLET
LINES
ALL INLET GAS
LINES ARE ¼"
STAINLESS STEEL
TUBE FOR WELDING
TO THE CUSTOMER'S
SUPPLY.
NOTES:
20
20
20
623
1246
LOCATION OF FIXING HOLES,
EACH 6.6 mm DIAMETER
606
CLEAN GAS LINE
CAN BE MFC
CONTROLLED
(THIS WILL OCCUPY
ONE GAS LINE
POSITION)
Fig 8: 12-line gas pod
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 13 of 18 Issue 5: June 05
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RK= pÉêîáÅÉë=
The required services are listed in the following sub-sections. For full details of services
specifications including connection diagrams, electrical connection schematic etc., read in
conjunction with the Oxford Instruments Plasma Technology ‘Services Specifications for
Plasmalab and Ionfab Systems’ document.
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Function Connection Parameter Specification
Voltage 208Vac ±10%
Current 50 A
Frequency 50 / 60 Hz
System electrical
supply (208V
system)
Cable (4 meters
long)
Phases 3 phase, N + E
Voltage 380Vac –10% to 415Vac
+6%
Current 50 A
Frequency 50 / 60 Hz
System electrical
supply (415V
system)
Cable (4 meters
long)
Phases 3 phase, N + E
RKO= t~íÉê=`ççäáåÖ=êÉèìáêÉãÉåí=
Function Connection Parameter Specification
Flow 1 lpm (0.27 gpm (US)) Process turbo
1
/
4
” stainless steel
Swagelok
Temperature 15 - 25°C (59 - 77°F)
Flow 8 lpm (2.12 gpm (US)) RF Generator and
ICP
3
/8” stainless steel
Swagelok
Temperature 10 - 25°C (50 - 77°F)
Flow 2 lpm (0.53 gpm (US)) ICP & AMU
3
/8” stainless steel
Swagelok
Temperature 10 - 25°C (50 - 77°F)
Flow 1 lpm (0.27 gpm (US)) Load lock turbo (if
required)
1
/
4
” stainless steel
Swagelok
Temperature 15 - 25°C (59 - 77°F)
RKP= içïÉê=bäÉÅíêçÇÉ=`ççäáåÖ=êÉèìáêÉãÉåí=
Function Connection Parameter Specification
Flow 2 lpm (0.53 gpm (US)) Liquid cooled lower
electrode
3
/8” stainless steel
Swagelok to heater /
chiller unit
Temperature As required by process
LN2 Cryo cooled
lower electrode
¼” stainless steel
Swagelok to dewar
Flow As required by process
RKQ= `çãéêÉëëÉÇ=^áê=êÉèìáêÉãÉåí=
Function Connection Parameter Specification
Flow 5 lpm (0.2 cfm)
(combined with gas
pod)
System CDA 4mm push-fit Legris
Pressure 4.0 – 6.0 Bar (60 – 90
psi)
Flow 5 lpm (0.2 cfm)
(combined with system)
Gas pod CDA 4mm push-fit Legris
Pressure 4.0 – 6.0 Bar (60 – 90
psi)
Installation Data (ICP 180)
Issue 5: June 05 Page 14 of 18 Printed: 22-Mar-06, 6:57