Utah-94-721002-System-Manual.pdf - 第34页

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For details of the services requirements, refer to Appendix IDS and Appendix S.

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Nitrogen (N

) is supplied to the system via the services panel to allow the process chamber,

foreline and automatic load lock to be filled during system venting and to provide a purge

gas supply to the turbo pump (if fitted). The N

distribution circuit is shown in the services

flow diagram; see the following paragraph.

The services flow diagram of the mä~ëã~ä~ÄpóëíÉã=NMM=(ICP 180)=are given in drawing 94-

SP91C24171. This drawing is located in Volume 2 of this manual. An Illustration of this

drawing is also given at the rear of this Section.

Nitrogen enters the system at the services panel through a ¼” Swagelok bulkhead connector.

It is then fed to a regulator and pressure gauge (located behind a panel to prevent

unauthorized adjustment) via a stainless steel pipe. The outlet pressure of the regulator can

be manually adjusted. To set up the outlet pressure of the regulator, refer to ‘Operator

Adjustments’ in Section 5.

The outlet from the regulator is connected to:

a) A check valve (over-pressure relief valve).

b) The turbo pump purge line (if a turbo pump is fitted).

c) If a Maglev turbo pump is fitted, directly to the turbo pump (for use by the Alcatel

turbo controller during system venting).

d) The process chamber vent line.

e) The foreline vent line.

f) The automatic load lock vent line.

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The check valve is installed to limit the maximum pressure that the regulator can supply. The

valve is normally closed and will open at pressures above 5 psi. The outlet of the check valve is

fed to the air out connector on the services panel to allow any excess nitrogen to be piped

out of the cleanroom if required.

WARNING

IN A NORMALLY VENTED ROOM, THERE IS A LOW RISK OF ASPHYXIA DUE TO VENT

GAS DISPLACING AIR.

USERS SHOULD MAKE THEIR OWN RISK ASSESSMENT.

DO NOT REMOVE THE CHECK VALVE OR CAP THE AIR OUT CONNECTOR; THIS WOULD

COMPROMISE A SYSTEM SAFETY FEATURE.

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The turbo purge line supplies nitrogen to the turbo pump purge gas inlet via a mass flow

meter, restrictor and the turbo purge valve. The mass flow meter’s readback is monitored by

the PC 2000 software. If the nitrogen flow is too low, this state is detected by the PC 2000

Services (ICP 180 and Automatic Load Lock)

Printed 25 May 2005 10:12 Page 2-3 of 6 Issue 2: February 02

mä~ëã~ä~Ä=póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

software to display a blue system alert followed after three minutes by a red system alert and

subsequent system shut down to prevent damage to the turbo pump. For details of system

alerts, see Section 5 (Operating Instructions.).

The turbo purge valve is pneumatically controlled by the system software.

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The process chamber vent line supplies nitrogen to the process chamber during the venting

sequence via a restrictor and chamber vent valve. The chamber vent valve is pneumatically

controlled by the system software.

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The foreline vent line supplies nitrogen to the foreline during the venting sequence to

prevent backstreaming of vapour from the rotary vane pump. Nitrogen is fed from the

regulator to the foreline via a restrictor and the foreline vent valve. The foreline vent valve is

opened for a period when the primary vacuum pump is turned off.

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The automatic load lock vent line supplies nitrogen to the automatic load lock during the

venting sequence via a restrictor and chamber vent valve. The chamber vent valve is

pneumatically controlled by the system software.

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The services flow and pneumatic circuit are shown in the following diagrams. Note that these

are typical schematics; actual components fitted depend on the options supplied.

Services (ICP 180 and Automatic Load Lock)

Issue 2: February 02 Page 2-4 of 6 Printed 25 May 2005 10:12

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=póëíÉã=NMM

Fig 2.1: System 100 (ICP 180/380) services flow diagram

Services (ICP 180 and Automatic Load Lock)

Printed 25 May 2005 10:12 Page 2-5 of 6 Issue 2: February 02