Utah-94-721002-System-Manual.pdf - 第231页

System Manual lñÑçêÇ= fåëíêìãÉ åíë=m ä~ëã~ = qÉÅÜåçäçÖó== lfmq=póëíÉãë RK= káíêçÖÉå= Nitrogen is required to vent and purge process chambers, load locks and pumps. 2 MICRO N FIL TER REGUL A TOR 1/4 " SW AGELOK CONNE…

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• Inlet pressure to filter/mist

separator/regulator unit:

6 bar (90 psig) minimum.

OUTLET TO SYSTEM:

• Oil content:

Less than 10 ppm

• Maximum Moisture Content: -3ºC (25ºF)

• Filtration: Maximum particle size of 0.3 microns

• Regulator outlet pressure: Adjustable from 3 bar to 6 bar (45 psig to 90

psig). 6 bar must be the maximum provided.

• Maximum flow rate:

135 litres/minute (5 scfm).

• Pressure monitoring: 0 to 10 bar (0 to 150 psi) pressure gauge.

Services Specifications

Issue 16: April 05 Page 12 of 22 Printed: 6-Jan-06, 8:44

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== lfmq=póëíÉãë

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Nitrogen is required to vent and purge process chambers, load locks and pumps.

2 MICRON

FILTER

REGULATOR

1/4"

SWAGELOK

CONNECTOR

TO PLASMALAB

OR IONFAB

SYSTEM

TO PUMP

PURGE

CONNECTOR

0 TO 1 SLM

FLOW CONTROL

ROTAMETER

(IF REQUIRED)

Fig 5.1: Recommended nitrogen supply installation

Semiconductor grade fittings and pressure regulators, together with electropolished stainless

steel tube must be used to ensure that gas quality is not degraded. Purges to turbo pumps are

supplied by OIPT as part of the system. The customer will usually need to fit a purge to the

rotary pump. See below.

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• Pipework fittings and

pressure regulators:

Semiconductor grade

• Gas handling tubing: Electropolished stainless steel

• Purity: At least 99.99% or higher to satisfy process

requirements.

• Filtration: 2 micron filter mounted adjacent to the

system.

• Regulation: 0.5 to 5 bar (7.5 to 75 psig)

• Minimum pressure at input

to system:

3 bar (45 psig). Certain pumps, for example

Edwards Drystar pumps, may need up to 5 bar

(75psig) to ensure satisfactory purging. Check

with the vendor's instructions.

• Rotary pump purging

It is the customer’s responsibility to ensure that a rotary pump purge

connection is fitted and used correctly. This is needed to ensure the protection

of the pumping system from the customer’s process, and may also be required

by local safety regulations. Because customers’ requirements vary, components

are not supplied automatically by OIPT. Kits of parts are available if required.

Contact OIPT for further information.

It may be safe to omit this feature on certain systems, such as Ionfab machines

running inert gas processes. However, unless the customer has written

agreement on this point from OIPT, any damage caused by the omission cannot

be covered by the system warranty.

Services Specifications

Printed: 6-Jan-06, 8:44 Page 13 of 22 Issue 16: April 05

lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

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REGULATOR 0.5 BAR TO 5 BAR

(7 TO 75 PSIG) LOCATED

ADJACENT TO THE SYSTEM

SUPPLY TO

GAS POD

OR INTERNAL

GAS LINE

MINIMUM PRESSURE

3 BAR (45 PSIG)

ALL FITTINGS,

REGULATOR AND

FILTER TO BE

SEMICONDUCTOR

GRADE

LL TUBING TO BE

ELECTROPOLISHED

STAINLESS STEEL

NOTES:

Fig 6.1: Recommended process gas supply installation

Semiconductor grade fittings and pressure regulators, together with electropolished stainless

steel tube must be used to ensure that gas quality is not degraded.

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• Pipework fittings and pressure

regulators:

Semiconductor grade

• Gas handling tubing: Electropolished stainless steel

• Purity: At least 99.99% or higher to satisfy

process requirements.

• Filtration: A 2-micron filter is fitted to each

gas line supplied as part of the

system. For other grades of filter,

please consult OIPT.

• Regulation: 0.5 to 5 bar (7.5 to 75 psig)

• Minimum pressure at input to system: 2 bar (30 psig)

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The specifications for the Helium gas supply are as for those of the process gases given in sub-

sections 6 and 6.1 with the exception that the maximum pressure at the inlet to the

pressure controller must not exceed 3.5 bar (43 psig). The design of the Helium

pressure controller is such that it can be destroyed by higher pressures.

Services Specifications

Issue 16: April 05 Page 14 of 22 Printed: 6-Jan-06, 8:44