Utah-94-721002-System-Manual.pdf - 第132页
mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . WARNING IF THE ELECTRONICS ARE DISCONNECTED FROM THE BODY…
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKV= s~Åììã=ëóëíÉã=
SKVKN= ^ÅíáîÉ=máê~åá=Ö~ìÖÉ=
Refer to the manufacturer’s literature in Volume 3 for details of the following maintenance:
a) Atmosphere and vacuum adjustment.
b) Filter cleaning.
SKVKO= `~é~Åáí~åÅÉ=ã~åçãÉíÉê=
SKVKOKN= páñJãçåíÜäó=Eçê=~ë=åÉÅÉëë~êóF=
1) Remove the capacitance manometer from the process chamber.
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
Carefully pour a measure of Isopropyl Alcohol (IPA) at room temperature into the
pressure-measurement cavity. Do not allow IPA to come into contact with electronic
components.
Agitate the solvent carefully and then pour it out.
CAUTION
Because the diaphragm in the gauge is thin tensioned metal, it can be destroyed
by sudden changes in temperature or by clumsy handling.
Re-install the gauge, allowing sufficient time for outgassing of the cavity and diaphragm
prior to operation.
NOTE: Refer to the manufacturer’s manual for calibration adjustments.
SKVKP= mÉååáåÖ=Ö~ìÖÉ=
The following applies to an Edwards Active Inverted Magnetron gauge. If a different Penning
gauge is fitted, refer to the manufacturer's literature.
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-13 of 22 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
WARNING
IF THE ELECTRONICS ARE DISCONNECTED FROM THE BODY TUBE AND THE BODY
TUBE IS LEFT CONNECTED TO A VACUUM SYSTEM, THEN IF A PLASMA DISCHARGE
IS MAINTAINED IN THE VICINITY OF THE BODY TUBE, THE ANODE AND GUARD RING
OF THE BODY TUBE ASSEMBLY MAY BECOME CHARGED UP.
SWITCH OFF THE POWER SUPPLY BEFORE REMOVING THE GAUGE FROM THE
VACUUM SYSTEM. HIGH VOLTAGES EXIST INTERNALLY IN THE GAUGE. THE
CONNECTING CABLE SHOULD BE REMOVED BEFORE ATTEMPTING TO DISMANTLE
THE GAUGE.
SKVKPKN= aáëã~åíäáåÖ=íÜÉ=ÄçÇó=íìÄÉ=
The body tube assembly can be removed from the gauge by gripping the magnet housing
and twisting the body tube flange clockwise to unlock the bayonet fitting. The tube can then
be completely withdrawn from the gauge electronics / magnet housing.
The electrode can be removed from the body tube for cleaning / replacement as follows:
Using the flat spanner provided with the spares kit, locate the two lugs in the end of the
collar and rotate anti-clockwise to completely unscrew. Once the collar is removed, the anode
assembly and O-ring can be withdrawn.
The two cathode cups are removed from the flange end of the body tube by releasing the
circlip using a pair of circlip pliers. Note the correct orientation of the cups. The cup with the
reduced central hole size should be closest to the O-ring end of the body tube.
Re-assembly is the reverse procedure, taking care not to bend the anode, and ensuring that it
is centralised in the body tube when tightening the threaded collar.
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-14 of 22 Printed: 22-Mar-06, 7:41
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKVKPKO= `äÉ~åáåÖ=
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
The cathode cups, body tube and anode assembly can be cleaned by firstly degreasing in a
proprietary degreasing agent, and then thoroughly soaking in a laboratory detergent. After
soaking, the parts should be thoroughly rinsed in clean water and then in Isopropyl Alcohol,
to remove all traces of water. The parts should be dried thoroughly.
SKVKQ= qìêÄçãçäÉÅìä~ê=éìãéë=
Refer to the manufacturer’s literature in Volume 3 for details of maintenance required. Also,
refer to Appendix B ‘Operation and Maintenance of Turbomolecular Pumps’.
SKVKQKN= a~áäó=
Ensure that the turbo pump temperature is sufficiently high, i.e. >50ºC. The turbo pump
temperature can be monitored on the turbo pump controller’s display. Refer to the pump
manufacturer’s manual for details. If the turbo pump temperature is too low, adjust the
manually-operated flow valve to reduce the flow rate of the turbo pump cooling water.
SKVKQKO= oÉJÖêÉ~ëáåÖ=çÑ=íìêÄç=éìãéë=ÑáííÉÇ=íç=éêçÅÉëë=ÅÜ~ãÄÉêë=
The following instruction applies to conventionally greased bearing turbo pumps, e.g. the
Alcatel ATP series. It does not apply to Maglev turbo pumps.
To prevent damage to turbo pumps fitted to process chambers, OIPT strongly
recommends that bearing re-greasing is carried out periodically after
every 2500
hours of pump running time.
Details of re-greasing are given in sub-section 6.9.4.3.
SKVKQKP= OMMM=íç=UMMM=Üçìêë=EP=íç=NO=ãçåíÜëFW=éìãé=êÉäìÄêáÅ~íáçå=
CAUTION
Failure to perform regular pump maintenance will result in pump warranty being
suspended.
Refer to the manufacturer’s manual in Volume 3 of this manual.
Alcatel ATP series turbo pumps are conventional greased bearing pumps. Periodically, these
bearings need to be re-greased.
The re-greasing interval depends on a number of factors; Refer to the graph in the
Maintenance section of the manufacturer’s manual to establish the re-greasing interval for
the pump in your system. Remember that turbo pumps fitted to process chambers
must be re-greased at 2500 hour intervals. The re-greasing interval for turbo pumps
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-15 of 22 UC Davis 94-721001 Issue 1: March 06