Utah-94-721002-System-Manual.pdf - 第136页

mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . SKNN= mìãé=äìÄêáÅ~åíë= CAUTION When changing or topping-u…

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

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WARNING

BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE GAS HANDLING SYSTEM,

ELECTRICALLY ISOLATE THE SYSTEM BY SWITCHING OFF AND LOCKING OFF THE

WALL-MOUNTED SAFETY ISOLATION BOX. PROCESS GASES USED MAY BE TOXIC OR

FLAMMABLE. ADOPT THE CORRECT PROCEDURES WITH REGARD TO PURGING

BEFORE REMOVING OR LOOSENING COMPONENTS CARRYING THESE GASES. WEAR

PROTECTIVE CLOTHING.

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Ensure the gas pod and its fixings are secure.

IMPORTANT: OIPT gas pods typically weigh >40kg. Ensure the wall and gas pod

fixings are sturdy enough to bear at least four times the weight of

the gas pod.

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If valves need cleaning, repair or re-calibration:

1) Make sure valve has been thoroughly purged before removal.

2) Discuss with the vendor the return of the Mass Flow Controllers for service work.

Inform the vendor if hazardous gases have been used.

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The process gas filter elements will need replacing at a frequency that depends on both the

nature and purity of the process gases, and of other materials that come into contact with

them. The filters could need changing more or less often than annually.

1) Make sure line has been thoroughly purged before removal.

2) Unscrew union nut and remove assembly.

3) Tap filter element lightly on side with a fibre mallet to loosen and remove element.

4) Fit new element.

5) Re-assemble.

Maintenance

Printed: 22-Mar-06, 7:41 Page 6-17 of 22 UC Davis 94-721001 Issue 1: March 06

mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

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CAUTION

When changing or topping-up the lubricating oil in a pump, always use oil of the

same brand and type. If a change of brand or type is contemplated, refer to

Oxford Instruments Plasma Technology for advice.

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The lubricating oils used for pumps where the oil comes into contact with the pumped gases,

i.e. oil-sealed pumps such as rotary vane types, should be chosen to meet the specific

characteristics necessary for the process involved.

The vapour pressure must be low at the temperatures reached at the rubbing surfaces.

Viscosity should not vary significantly over the temperature range involved, and the water

absorption rate and content must be low.

Lubricating oils generally fall into one of two categories: mineral (hydrocarbon) based oil or

synthetic oil such as perfluorinated polyether. The synthetic oils are normally used where they

come into contact with strong oxidants such as nitrogen dioxide, oxygen, or one of the

halogens.

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Perfluorised polyether (PFPE) lubricants have the following properties:

a) They are stable up to 350

C, i.e. they do not decompose below this temperature.

b) They are chemically inert. They will, however, react with Lewis acids (BCl

, AlCl

etc.)

at temperatures over 100

c) They do not polymerise under the impact of high-energy radiation.

d) Since they tend not to keep contaminants suspended, pumps using these lubricants

must always be fitted with suitable oil filters.

e) They do not 'age' and therefore, if used correctly, need not be replaced during the

lifetime of the pump.

f) Any contaminants in the lubricant may be removed by fitting clean filters and

letting the pump run for several hours with inert gas ballast, the intake port having

been closed.

g) They do not protect metal surfaces against corrosion. Pumps should therefore always

be flushed with inert gas. Pumps using PFPE should be allowed to run continuously.

h) PFPE is incompatible with hydrocarbon oils, i.e. mineral oils, conventional greases

and cleaning agents.

i) If a pump uses PFPE lubricant only Freon 113 or Frigen 113 may be used as a cleaning

agent, and only PFPE grease may be employed.

Maintenance

UC Davis 94-721001 Issue 1: March 06 Page 6-18 of 22 Printed: 22-Mar-06, 7:41

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

j) If it should become necessary to change from PFPE to mineral oil lubrication or vice

versa, the pump must be completely disassembled, freed of lubricant and fitted with

new gaskets and vanes.

k) At temperatures over 350

C, hazardous gaseous decomposition products are

formed. Therefore do not smoke in rooms where PFPE is used, and make sure that

no tobacco comes into contact with PFPE.

l) When handling PFPE, protective clothing must be used.

m) Do not mix PFPE with used oil. Dispose of them separately.

n) PFPE is normally odourless and colourless. Cloudiness or odour is a sign of

contamination.

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Where mineral oils are used, the rate of oil deterioration for a particular pump and process

should be established at an early stage, and oil changes based upon this information.

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Before carrying out a process, in the process chamber on a wafer which is a different size to

that last processed, it is necessary to fit the correct type of clamping plate. Clamping plates

are available for various sized wafers.

To change the clamping plate, use the following procedure (refer to Fig 6.1, page 6-20):

6) If necessary, vent the process chamber.

7) Open the process chamber lid.

8) Wearing powder-free gloves, unscrew the three clamping plate securing screws then

remove the clamping plate from the process chamber and place on a clean surface.

9) Take the replacement clamping plate and mount it on the three supporting pillars

then insert and tighten the three securing screws.

10) Close the process chamber lid.

Maintenance

Printed: 22-Mar-06, 7:41 Page 6-19 of 22 UC Davis 94-721001 Issue 1: March 06