Utah-94-721002-System-Manual.pdf - 第308页
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Illustrated Parts Catalogue Ef`m=NUMF= Process Chambers Issue 2: November 02 PKO= `çããçå=éêçÅÉëë=ÅÜ ~ãÄÉê=çéíáçå=ëé~êÉë = OIPT Part No. Qty Description ICP 180 S…
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`mNUMF=
Issue 2: November 02 Process Chambers
Item No. OIPT Part No. Qty Description
MA00Z22821 ICP180 (ALUMINA TUBE) HINGED ASSEMBLY
1 MD81C15834 1 NW25KF FLANGE (INTERFEROMETRY)
2 G/SEL/O-K/117 1 2.62 x 20.3 mm K'REZ 'O' RING BS117
3 G/SEL/O-K/219 1 3.53 x 32.9 mm K'REZ 'O' RING BS219
4 MD81D15869 1 GASKET
5 G/SEL/O-K/235 1 3.53 x 79.0 mm K'REZ 'O' RING BS235
6 MD81D15847 1 RING
7 MA00B21488 1 FLOATING TOP WELD MC ASSY-ICP
8 G/SEL/O-K/264 2 3.53 x 190.1 mm K'REZ 'O' RING BS264
9 G/VAC/SEL/015C 1 NW16 CENTRING RING ALI/VITON
10 G/VAC/FIT/323C 1 16KF BLANK FLANGE
11 MD00D18558 1 VALVE BLOCK
12 MD00B23127 1 CERAMIC TUBE WATER COOLING RING
13 MD00D21388 1 SUPPORT PILLAR
14 MD00B18547 1 RF SHIELD
15 MD00B18549 1 COIL (4) ICP SOURCE
16 G/GAS/FIT/284C 1 ¼ UNION
17 MD00A23821 1 BACK PLATE HINGED
18 G/GAS/FIT/274C 2 ¼ BULKHEAD UNION
19 G/GAS/FIT/276C 2 3/8 BULKHEAD UNION
20 G/SUN/BSH/116 4 8 x 12 x 12 mm OILITE BUSH CM16
21 MD91D17198 2 HINGE PIN
22 G/SUN/SPG/923 2 GAS SPG 6-60-220-MB-MB-RV400N
23 MD00D18551 3 SPACER BLOCK
24 MD00D18552 3 SPACER BLOCK HALF
25* MD81D16140 1 WINDOW FLANGE
26* G/FIX/S32/625 4 M6 x 25 mm S/S CAPHEAD SCREW
27* MD81D14211 1 UV/RF FILTER
28* M/4175D/01 1 WINDOW GASKET
29* M/0651D/01 1 WINDOW GLASS (6 mm PYREX)
30* MA00D14711 1 NW40 CENTRING RING MOD
31 MD91D20353 1 CHAMBER 200LF STANDARD
32 G/SEL/O-V/263C 1 3.5 x 196.4 mm VITON 'O' RING BS263 (PART OF ITEM 33
AND MOUNTED ON ITEM 33)
33 G/VAC/VLV/930 1 MONVAT VLV 46 x 236 02010-BA24
34 G/VAC/SEL/040C 1 NW40 CENT. RING ALI/VITON
35 G/VAC/FIT/327C 1 40KF BLANK FLANGE
36 G/VAC/CLP/311C 4 CLAWS DN25 1SO-KF.BP220366-T
37 G/SEL/O-V/384C 1 5.3 x 380.37 mm VITON 'O' RING 200-384
38 G/SUN/CAB/850 2 OVER CENTRE DRAW LATCH
39 MD00A22716 1 LID (HINGED ICP180)
40 MA00A23828 1 AUTOMATCH ASSY. (VAC CAP) ICP180
41 MD00C18541 1 QUARTZ TUBE (ICP SOURCE)
41a MD00C18542 1 ALUMINA TUBE (ICP SOURCE) – ALTERNATE TO ITEM 41
42 MD00A21385 1 TOP PLATE (ICP)
43 MD00A23852 1 ICP180 SIDE COVER
* 25 to 30 MA91Z17161 CHAMBER VIEWPORT KIT
Printed: 16-Jan-06, 15:55
Section 3 Page 3 of 4
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Process Chambers Issue 2: November 02
PKO= `çããçå=éêçÅÉëë=ÅÜ~ãÄÉê=çéíáçå=ëé~êÉë=
OIPT Part No. Qty Description
ICP 180 SOURCE (180 mm DIAMETER)
MD00D18559 1 PERSPEX WINDOW
MD00D18684 1 WINDOW MESH
MD81D15869 1 GASKET
MD00C18541 1 QUARTZ TUBE (ICP SOURCE)
MD00C18542 1 ALUMINA TUBE (ICP SOURCE)
MD00B18547 1 ELECTROSTATIC SHIELD
G/VAC/FIT/978 2 25 O/D x 2 mm SAPPHIRE WINDOW
G/SEL/O-K/235 1 3.53 x 79.0 mm KALREZ 'O' RING BS235
G/SEL/O-K/219 1 3.53 x 32.9 mm KALREZ 'O' RING BS219
G/SEL/O-K/264 2 3.53 x 190.1 mm KALREZ 'O' RING BS264
G/SEL/O-K/117 1 2.63 x 20.3 mm KALREZ 'O' RING BS117
G/VAC/SEL/015 1 NW16 CENTERING RING ALUMINIUM
G/VAC/SEL/025 1 NW25 CENTERING RING
G/VAC/FIT/980 1 SIGHT GLASS (NW25)
ICP PROCESS CHAMBER WITH SINGLE VIEWPORT AND SIDE ACCESS DOOR FOR
ICP180 SOURCE (100-3-41C)
G/VAC/SEL/040 1 NW40 CENTERING RING
G/GAS/FIT/614 1 ¼ RETAINING GASKET
G/SEL/O-V/265 1 3.5 x 196.4 mm VITON 'O' RING BS265
G/SEL/O-V/268 1 3.5 x 215.5 mm VITON 'O' RING 200-268
PKP== f`mNUM=ëçìêÅÉ=çéíáçå=ëé~êÉë=
OIPT Part No. Qty Description
G/SUN/DWL/920 2 S/S DOWEL 10.006/10
G/VAC/SUN/032 1 EDWARDS VACUUM INTERLOCK SWITCH
ESZ91007 1 MICRO SWITCH 331-45
G/VAC/SEL/040 1 NW40 CENTERING RING
G/SEL/O-V/269 1 3.5 x 221.85 mm VITON 'O' RING 200-269
G/VAC/VLV/930 1 46 x 236 MESC VALVE (ALUMINIUM)
CHAMBER AND HEATER PUMP DOWN KITS
EXZ0200 1 SERIES 2 ON/OFF HEATER CONTROL
EQT0002 1 TH'COUPLE TYPE K 200/C (replaces EQF0100)
G/SUN/HET/010 1 FIREROD ½" x 101LG 240V 250W
Section 3 Page 4 of 4
Printed: 16-Jan-06, 15:55
mä~ëã~ä~Ä póëíÉã=NMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó=
Illustrated Parts Catalogue
Ef`m=NUMF=
Issue 2: November 02 Lower Electrode
pÉÅíáçå=R=J=içïÉê=ÉäÉÅíêçÇÉ=
Section 5 - Lower electrode..............................................................................................................................1
5.1 Standard He backed lower electrode with centrally positioned 3-pin lift and wafer clamp assembly
(100-5-36A) / (100-5-36A/01 - Anodised).............................................................................................................2
5.2 RIE + He vari height table (100-5-26A)................................................................................................................4
5.3 Cryo table (100-5-12A) / (100-5-12A/1 - Anodised).............................................................................................6
5.4 Helium pipe run...................................................................................................................................................8
5.5 Lower electrode option spares............................................................................................................................9
Printed: 16-Jan-06, 15:55
Section 5 Page 1 of 10