Utah-94-721002-System-Manual.pdf - 第97页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉ ÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM RKTKO= ^ÇàìëíáåÖ=íÜÉ=åáíêçÖÉå= êÉÖìä~íçê=çìíäÉí=éêÉëëìêÉ= NOTE: Refer to Section 2 for a description of the Nitrogen vent distribution circuit. Th…

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A manual adjustment panel, shown in Fig 5.8, is located behind a flap in the front of the
equipment rack. It comprises the following controls and indicators:
Auto / Manual switch: Sets the operating mode of the RF matching unit.
C1 MAX / MIN: Manual adjustment of RF matching capacitor C1. (Rotating its shaft
clockwise or counter clockwise.)
C2 MAX / MIN: Manual adjustment of RF matching capacitor C2. (Rotating its shaft
clockwise or counter clockwise.)
C1 PARK: Park position potentiometer for C1.
C2 PARK: Park position potentiometer for C2.
RF Interlock ON/OFF: Disables the RF interlock. RF generators deliver no power if the
interlock is off.
Capacitor positions for C1 and C2 are displayed as numbers from 000 (minimum) to 999
(maximum).
AUTO
AUTO
MANUAL
MANUAL
C1 MAX
C1 MAX
C1 MIN
C1 MIN
C2 MAX
C2 MAX
C2 MIN
C2 MIN
C1 PARK
C1 PARK
C2 PARK
C2 PARK
ON
OFF
RF
Interlock
C1
C2
1
2
3
4
5
6
DISPLAY SELECTO
R
Fig 5.8: Typical AMU control panel
Note that Fig 5.8 shows an AMU control panel with control facilities for two AMUs. The left-
hand side controls are for AMU1 and the right-hand side controls are for AMU2. The LCD
displays are switched using the DISPLAY SELECTOR switch as shown in the following table.
DISPLAY SELECTOR
POSITION
LCD 1 (UPPER) LCD 2 (LOWER)
1 AMU 1 C1 POSITION AMU 1 C2 POSITION
2 RF 1 FORWARD POWER RF 1 REFLECTED POWER
3 RF 1 SETPOINT RF 1 Hi/Lo
4 RF 2 FORWARD POWER RF 2 REFLECTED POWER
5 RF 2 SETPOINT SPARE
6 AMU 2 C1 POSITION AMU 2 C2 POSITION
For full details of the Oxford Instruments Plasma Technology AMU, refer to its Operation and
Maintenance manual in Volume 3 of this manual.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-30 of 52 Printed: 22-Mar-06, 10:42
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
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NOTE: Refer to Section 2 for a description of the Nitrogen vent distribution circuit.
The regulator outlet pressure should not usually require adjustment from its factory setting.
However, if adjustment is necessary, proceed as follows.
WARNING
THIS PROCEDURE INVOLVES WORKING ON THE SYSTEM WITH COVERS REMOVED
AND WITH THE ELECTRICAL POWER ON. THEREFORE IT MUST ONLY BE CARRIED OUT
BY TRAINED AND COMPETENT PERSONNEL WHO ARE AWARE OF THE RISKS
INVOLVED.
1) Remove system panels as necessary to gain access to the regulator.
Outlet connector
Outlet pressure
control knob
Outlet pressure
gauge
Fig 5.9: N
2
Pressure regulator/gauge
2) Adjust the regulator outlet pressure control knob to set the outlet pressure to the
maximum which will not open the check valve; normally 0.5 to 0.7 bar gauge as
indicated on the regulator gauge.
NOTE: Setting the outlet pressure too low will extend system venting times
excessively, and may compromise the purge gas flow to the turbo pump if
fitted. Setting the outlet pressure too high will open the check valve and
waste gas, but will not reduce venting times.
3) Refit all system covers.
4) Carry out a simple process to check that the vent sequence operates correctly.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-31 of 52 UC Davis 94-721001 Issue 1: March 06
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CAUTION
If the rotary/dry pump’s N
2
purge flow rate is inadequate, damage to the pump
could occur.
Ensure that the flow rate is set to the value recommended by the pump
manufacturer.
The rotary/dry pump’s N
2
purge flow rate is set at the factory before system shipment and
should not need adjustment. However, the pump purge rate will need to be confirmed on
installation and at any time the purge gas supply pressure changes significantly. If adjustment
is necessary, refer to Appendix R in this manual.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-32 of 52 Printed: 22-Mar-06, 10:42