Utah-94-721002-System-Manual.pdf - 第76页
mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ =fåëíêìã Éåíë= mä~ëã~ =qÉÅÜåçäçÖó == System Manual RKQ= léÉê~íçê=Åçåíêçä= The PC 2000 facilities are accessed from the menu bar at the top of the screen as shown in Fig 5.1. LOG -O N ST A TUS P…
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An auxiliary circuit on the pump contactor detects pump failure due to overload or short
circuit, and the process gases are immediately halted.
If a rotary vane or dry vacuum pump stops pumping for other reasons during a process, e.g. if
it fails or its power is disconnected, and the vacuum interlock switch’s contacts remain closed,
process gas will continue to flow into the process chamber. Gas flow will stop when the
chamber pressure exceeds the vacuum switch trip level of 600 mbar absolute. The front-end
software will show the interlock status as ‘fault’.
WARNING
DISCONNECTING THE POWER TO AUXILIARY EQUIPMENT, ESPECIALLY VACUUM
PUMPS, WHILE RUNNING A PROCESS CAN CAUSE A HAZARD IN THE PROCESS
CHAMBER.
ENSURE THAT THE SYSTEM IS SHUT DOWN USING THE PROCEDURE GIVEN IN SUB-
SECTION 5.3.5 BEFORE DISCONNECTING ANY POWER CABLES FROM THE POWER
BOX, OR SWITCHING OFF ANY ELECTRICAL SUPPLIES TO AUXILIARY EQUIPMENT.
WARNING
IF THE EQUIPMENT HALTS DURING PROCESS BECAUSE THE VACUUM SWITCH HAS
OPENED, THERE MAY BE A SERIOUS GAS HAZARD IN THE CHAMBER AND PUMPING
LINES.
ASSESS THE RISKS BEFORE TRYING TO PUMP OR VENT THE CHAMBER.
PERSONAL PROTECTIVE EQUIPMENT MAY BE NECESSARY.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-9 of 52 UC Davis 94-721001 Issue 1: March 06
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The PC 2000 facilities are accessed from the menu bar at the top of the screen as shown in Fig
5.1.
LOG-ON
STATUS
PAGE
TITLE
SYSTEM LOG
FILE SPACE
SYSTEM ALERT
BANNER
STOP ALL AUTO
PROCESSES BUTTON
Fig 5.1: Menu bar
This system incorporates an ICP 180 processing station, and an automatic single-wafer load
lock chamber. Refer to sub-section 5.8, page 5-33 for diagrams and brief descriptions of the
screens/pages.
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CAUTION
When running the PC 2000 software, using a Screen Saver or allowing the PC to
enter any of the Power Saver modes can cause the PC to lose communications
with the PLC.
Before starting the PC 2000 software, ensure that Screen Savers and all Power
Saver options are turned off. A procedure to do this is given in the following
text.
Use the following procedure to turn the screen savers and power saver options off. Note that
this procedure is applicable to Microsoft Windows XP™; for other versions of Windows, refer
to the on-line help.
1) Right-click anywhere in a clear area on the Windows desktop and then, on the
displayed menu, select the Properties option. The Display Properties dialogue box
is displayed.
2) Select the Screen Saver tab.
3) In the Screen Saver drop-down list, select the (None) option.
4) Click on the OK button.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-10 of 52 Printed: 22-Mar-06, 10:42
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5) On the taskbar, select the Start button, then the Settings option, then select
Control Panel. The control panel is displayed.
6) Select Power Options. The Power Options Properties dialogue is displayed.
7) Ensure that all power scheme options are set to ‘Never’. If necessary, use the drop-
down lists to select the ‘Never’ option.
8) Click on the OK button.
9) Close the control panel.
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To log on to the PC 2000 software, proceed as follows:
1) Select the PC 2000 icon
. The PC 2000 splash screen is loaded, and then the
Access Control dialogue is displayed:
2) Enter your name and password in the appropriate data fields (note that data entry
in the Password field is case sensitive), and then select the Verify button. If you
make a mistake in entering your name and password, select the Verify button and
then re-enter the data. After verification of the entered data, your log-on status is
displayed in the Current User and Access level fields.
3) Select the OK button. The PC 2000 software continues to load, and then the Pump
Control page is displayed.
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Users details, i.e. names, passwords and facility access options can be edited by a person
logged on as a Manager. To do this, use the following steps:
1) Log on as a Manager (see sub-section 5.4.2).
2) Select the System Menu, and then the Password option. The Access Control
dialogue box is displayed.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-11 of 52 UC Davis 94-721001 Issue 1: March 06