Utah-94-721002-System-Manual.pdf - 第258页
mä~ëã~ä~Ä= f`m=NUM lñÑ çêÇ=fåë íêìãÉåíë =mä~ë ã~=qÉÅÜåç äçÖó== Equipment Manual = WARNING BEFORE PROCEEDING WITH A NY MAINTENANCE WOR K, READ SECTION 1 - HEALTH AND SA FETY . = SKPKO= tÉÉâäó= Vacuum Check Weekly, or as d…
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKP= oçìíáåÉ=ã~áåíÉå~åÅÉ=
WARNING
PINCH POINT – WHEN THE CHAMBER LID IS OPENED OR CLOSED, LIMBS,
FINGERS ETC CAN BECOME TRAPPED BETWEEN THE LID AND THE PROCESS
CHAMBER BASE RESULTING IN SEVERE INJURY.
Ensure that all personnel are kept clear of the chamber lid when it is
opened or closed.
When opening or closing the chamber lid, ensure that both of your hands
are kept clear of the pinch point.
When the process chamber lid is to be kept in its raised position for
prolonged periods, ensure that it is held safely in its open position
without relying entirely on the gas support struts.
SKPKN= ^ë=êÉèìáêÉÇ=
ICP dielectric tube cleaning
WARNING
IF VENTING AND OPENING THE ICP180 FULLY AFTER USING HALOGENATED GASES
(CONTAINING CL- F- Br- OR I-), THE RESIDUAL GAS IN THE CHAMBER IS LIKELY TO
EXCEED LONG TERM EXPOSURE LIMITS FOR THE EQUIVALENT ANHYDROUS ACID
(HCl, HF, HBr, HI) IN GASEOUS FORM. RUNNING THE DEFAULT CLEANING RECIPE
AND PUMPING FOR 30 MINUTES MORE WILL REDUCE THE RESIDUAL GAS
CONSIDERABLY BUT USERS SHOULD MAKE THEIR OWN SAFETY ASSESSMENTS ON
THE NEED FOR PERSONAL PROTECTIVE EQUIPMENT IN SUCH SITUATIONS.
Processes capable of generating hydrocarbon or fluorocarbon monomers can coat the inside of the ICP
dielectric tube with polymer. An optimised cleaning process would need to be developed for each
application, but as a default process use:
Gas: Oxygen (50-100 sccm).
Pressure: 2Pa (15 mTorr).
RF power: 1000W.
Time: 1 hour.
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 17 of 26 Issue 4: January 06
mä~ëã~ä~Ä=f`m=NUM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== Equipment Manual=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
=
SKPKO= tÉÉâäó=
Vacuum Check
Weekly, or as dictated by process constraints, perform a system vacuum check, recording:
a) The base pressure after a standard pumping time.
b) The rate of pressure rise in an isolated system.
Experience suggests that the O-ring seals at each end of the ICP dielectric tube are the most likely source
of leaks in a new or freshly reassembled ICP180, but once sealed the source remains leak tight unless an
O-ring seal fails. The design minimises exposure of the seals to the plasma, but tolerances in the tube
construction (especially of quartz tubes) may mean the tube is not automatically
concentric with the O-
ring seals. This will reduce O-ring seal life, and require more care in assembly to obtain a good vacuum
seal.
SKPKP= PJjçåíÜäó=
Water cooling circuit
1) Turn off the RF supply, then vent the ICP180 source.
2) Open the RF enclosure and automatch, then inspect the fluid cooling path carefully for signs
of leaks, blockage, corrosion, overheating or melting of plastic pipes.
3) Repair or replace any defective sections.
4) Pay attention to the layout of the cooling pipes: the design provides for minimum clearances
between a water-cooled RF live component and the first point a plastic pipe rests against a
grounded surface.
5) Ensure that the cooling flow rate is at least 2 litres/minute in the
3
/
8
inch circuit and at least
1 litre/minute in the ¼ inch circuit.
6) Check the function of any water flow switches in the cooling path.
RF enclosure exhaust flow
1) Turn off the RF supply, then vent the ICP180 source.
2) Open the RF enclosure.
3) Remove any accumulations of dust or particles from the exhaust port and air inlet holes.
4) Wipe down the outside of the ICP dielectric tube and the RF coil to remove any material
which may eventually lead to an RF arc.
RF emissions
1) Check that the RF emissions are within specification. See Appendix A in the mä~ëã~ä~Ä
=
póëíÉã=
NMM= manual for details.
ICP 180 Source
Issue 4: January 06 Page 18 of 26 Printed: 18-Jan-06, 8:44
Equipment Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=f`m=NUM=
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKQ= `Ü~åÖáåÖ=íÜÉ=f`mNUM=ÇáÉäÉÅíêáÅ=íìÄÉ=
This sub-section applies to ICP180 second series builds (‘floating top’ version) with the following part
numbers:
100-6-54 ICP 180-FLOAT.TOP ASY(QUARTZ)
100-6-54/1 ICP180-FLOAT.TOP-ANOD.(QUARTZ)
100-6-55 ICP180-FL0.TOP ANG.VP(QUARTZ)
100-6-55/1 ICP180-FL.TOP-AN.VP-ANOD QU'TZ
100-6-56 ICP180 FLOAT TOP ASSY ALUMINA
100-6-56/1 ICP180 FLOAT TOP ASY ANOD ALUM
100-6-57 ICP180FLO.TOP ANG V/P(ALUMINA)
100-6-57/1 ICP180 FLO.TOP V/P ANOD ALUM.
Refer to assembly drawing MA00A23815
These instructions are given to assist personnel who are skilled in the maintenance of vacuum process
equipment. The task includes operating the vacuum equipment and mechanical assembly. There is some
lifting from the top of the equipment which may be easier with two persons.
Parts required:
MD00C18541 QUARTZ TUBE (ICP SOURCE)
Or
MD00C18542 ALUMINA TUBE (ICP SOURCE)
G/SEL/O-K/264 KALREZ O'RING BS 264 X2
G/GAS/FIT/614C ¼ INCH VCR GASKET X1
Safety
Risks associated with this procedure include:
• Toxic gas. Pump the system long enough to reduce residual toxic gases to an acceptable
level. If halogen gases have been used in the chamber, run a plasma clean (1 hour 10
mTorr O2 50 sccm, 1000W ICP, 50 W bias or similar process) then pump for at least one
hour. Follow local practice concerning risk assessment and personal protective equipment.
OIPT practice is to use chemical filter masks when working on halogen process chambers.
• Glass splinters. Quartz tubes may have sharp edges. Damaged tubes make leave glass
splinters. Take due care.
• Implosion. There is a small risk of catastrophic tube failure, especially the first time it is
put under vacuum. Put the shielding in place before pumping the system. Always vent the
system before removing the covers.
• RF radiation. The ICP180 coil is connected to a high power RF source which can cause
burns or interfere with other equipment. Make sure the RF generator is switched off
before removing any covers. After completing the following procedure, perform an RF
leakage test as detailed in Appendix A of this system manual.
ICP 180 Source
Printed: 18-Jan-06, 8:44 Page 19 of 26 Issue 4: January 06