Utah-94-721002-System-Manual.pdf - 第25页

Health and Safety lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= mä~ëã~ä~Ä and fçåÑ~Ä NKPKNM= `çãéêÉëëÉÇ=~áê= 1.3.10.1 Retained air pressures can be at dangerous levels. Never put your hand or any other obstruction in the path of…

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WARNING

SOME MATERIALS USED IN AND RESULTING FROM DEPOSITION AND ETCHING

PROCESS CAN BE DANGEROUSLY TOXIC; CONTACT CAN CAUSE SERIOUS INJURY

Before working on the process chamber or its associated components, consult a

competent authority to ascertain the nature of any coatings.

Wear appropriate protective clothing, e.g. hand and eye protection, as necessary.

1.3.8.1 Some compounds used in and resulting from deposition and etching processes can

be dangerously toxic. These compounds can be deposited as coatings on the inside

of the chamber, pipework etc. Therefore, suitable hand and eye protection must

be used.

1.3.8.2 Cleaning fluids and the gases given off from them may be toxic. Only use them in a

well ventilated area and avoid ingestion.

1.3.8.3 Always use suitable eye and skin protection when handling vacuum pumps and

mineral or synthetic oil. Apart from the hazards described in sub-section 1.3.7, used

oils and pumps may be contaminated with dangerous chemicals.

1.3.8.4 Study all relevant Material Safety Data Sheets (MSDS), or their equivalents, before

carrying out any maintenance work.

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1.3.9.1 Do not enter large vacuum chambers.

1.3.9.2 Process chambers and load locks under vacuum represent stored energy. If released

accidentally, this can cause injury. These spaces must be vented to atmospheric

pressure before the system is powered down in preparation for maintenance.

1.3.9.3 Handle vacuum capacitors carefully; if knocked or dropped they can implode

causing serious injury.

1.3.9.4 All view ports that are greater than 100mm diameter must be fitted with a clear

plastic implosion eye-guard on the outside. Replace this item only with the correct

part, and ensure that the ports are correctly reassembled.

If a plastic implosion eye-guard is not fitted, or if there is any doubt about the type

of eye-guard that is fitted, you must check with Oxford Instruments Plasma

Technology before proceeding.

1.3.9.5 Take care when opening vented vacuum vessels in case of excess pressure inside.

Health and Safety

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1.3.10.1 Retained air pressures can be at dangerous levels. Never put your hand or any

other obstruction in the path of a slit or gate valve blade unless it has been made

safe. Release the pressure as follows:

a) Power down the system by opening the main circuit breaker.

b) Disconnect the pneumatic supply pipes from the system.

c) Operate and padlock the lock-out valves (if fitted) on the gate valves. This

will release all air pressure from both sides of the valve actuators. If lock-

out valves are not fitted, disconnect the supply pipe at the point where it

connects to the valve.

WARNING

AUTOMATICALLY CONTROLLED COMPONENTS CAN MOVE WITHOUT WARNING

CAUSING SERIOUS INJURY

Maintenance on automatically controlled equipment must only be carried out by

fully trained personnel who are aware of the risks involved.

WARNING

PLASMALAB and IONFAB SYSTEMS DO NOT PROVIDE ANY EXCESS PRESSURE

REGULATION / PROTECTION FOR COMPRESSED AIR SUPPLIES.

It is the customer’s responsibility to ensure that suitable regulation / protection, in

accordance with all applicable standards, is installed and correctly maintained

external to the system.

1.3.10.2 Before undertaking any work on the system, you must ensure that all compressed

air is released. If lock-out valves are fitted, they must be operated and locked. See

the section on powering down the system for more details.

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WARNING

LIFTING HEAVY OBJECTS INCORRECTLY CAN CAUSE SEVERE INJURY

When handling heavy system components such as the system unit or vacuum pumps,

ensure that the appropriate lifting equipment, operated by fully trained personnel, is

used.

When heavy rack-mounted components are handled, ensure that the weight is safely

distributed between sufficient personnel.

1.3.11.1 Injury can be caused by attempting to lift heavy components. Always ensure that

suitable lifting equipment and assistance, if required, are available when removing

or refitting heavy components, e.g. chamber lids, chamber doors or electrodes.

1.3.11.2 Be aware of the weight of racked units, e.g. power supplies. Do not attempt to

remove heavy units from their racks unaided.

1.3.11.3 Take care when moving heavy components. Ensure that they remain stable to avoid

any risk of toppling. Use any support frames or stabilizers provided when moving,

installing or decommissioning equipment.

Health and Safety

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WARNING

PINCH POINT - LIMBS, FINGERS ETC CAN BECOME TRAPPED RESULTING IN SEVERE

INJURY.

Ensure that all personnel are kept clear of pinch points, e.g. chamber doors, hoist

mechanisms, variable height electrodes etc, while these components are moving.

1.3.11.4 Close chamber doors carefully; ensure that personnel vacate the vicinity of the door

and its operating mechanism before it is closed to avoid trapped fingers etc.

1.3.11.5 Handle sprung components under compression or tension carefully, Take suitable

precautions, including eye protection, before maintaining small sprung items.

1.3.11.6 Beware of machinery in motion such as robotic arms, substrate lifting mechanisms

and shutters. Remember that machinery can start suddenly. Ensure that all safety

guards are correctly fitted before use.

1.3.11.7 Beware of deposition layers under stress. Wear eye protection before cleaning

surfaces which are coated with layers of material, as particles can be ejected with

considerable force.

1.3.11.8 Handle embrittled wire, e.g. filaments, carefully. They can break and become

embedded in the skin.

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1.3.12.1 Ensure that local and national Health and Safety standards are studied and

followed. It is the customer’s responsibility to carry out their own risk assessment

and to develop a safe system of work.

1.3.12.2 Ensure that all personnel who operate this equipment are trained to use the

equipment, and are alerted to the range of hazards present.

1.3.12.3 When working with the equipment, ensure that there are always at least two

persons present.

1.3.12.4 If a tool is used to access or alter any part of the equipment, this is classed as a

maintenance action. Persons performing maintenance tasks must be skilled and

trained to know and avoid the hazards present. Before carrying out any

maintenance work, read the relevant manuals supplied by manufacturers of

proprietary components.

1.3.12.5 Ensure that the main electrical supply, compressed air, all other gases and the water

supply are disconnected before starting maintenance work (Also see sub-section

1.3.9).

1.3.12.6 Consult Oxford Instruments Plasma Technology before making any alterations to the

system or changing the process gases.

1.3.12.7 Ensure that all personnel who may be expected to have access to the system during

an emergency, such as firemen, paramedics etc. are familiar with the location of the

main circuit breakers and valves.

1.3.12.8 Whenever any component is returned to Oxford Instruments Plasma Technology or

to any of their agents, it must be accompanied by copies of the Goods Return Form

(QCF 60).

Health and Safety

Issue 11: August 2004 Page 1-14 of 18 Printed:29 May 2005, 06:31