Utah-94-721002-System-Manual.pdf - 第175页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅ ÜåçäçÖó== mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . Systems without turbomolecular pumps: 4) Pump the syste…

mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

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This section gives guidance for the uninstallation of a mä~ëã~ä~Ä or fçåÑ~Ä system prior to

moving it to another location or disposing of it. Guidance is also given for the disposal of a

system.

The guidance given is by necessity of a general nature; detail will vary depending on system

type, customer’s site, etc.

IMPORTANT: BEFORE UNINSTALLING THE SYSTEM, ENSURE THAT ALL PERSONNEL

WHO WILL BE INVOLVED HAVE READ AND UNDERSTOOD SECTION 1

‘HEALTH AND SAFETY’ OF THE SYSTEM MANUAL.

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To uninstall the system, carry out the following sub-sections in sequence.

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The main use of this document will be when a customer requires to move a system to another

location. This will involve uninstalling the system, moving the system components and then

reinstalling the system. An important consideration is the length of time between shutting

the system down and powering the system up. The longer the system is shut down, the

greater the need to remove as much residue gas as possible.

It is very important that the customer follows the pump manufacturer’s instructions for

purging pumps prior to shut down. For periods of more than a few days shutdown, 24 hours

of N

purging is often recommended.

If the system is to be reinstalled, the vacuum system should be left fully vented with dry

nitrogen, with the pump and gas supply service points capped.

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1) Chamber

or ion source

plasma cleaning should be conducted to remove residues.

Use the normal cleaning process according to the most recent use of the tool.

2) Process gas supply lines must be pumped down using the system at least as far as the

last isolation valve upstream from the gas pod. Consider whether the gases should

be pumped out back to the cylinder, or whether the gas installation has alternative

means of exhausting hazardous gases. For shut down periods of longer than two

days, purge the gas lines with N

3) Pump the system according to the following criteria:

Systems fitted with turbomolecular pumps:

a) For a shut down period of less than two days, pump the system for three hours.

b) For a shutdown period of longer than two days: Pump the system for one hour with a

small N

flow, followed by a 12-hour pump down with no gas flow.

For Plasmalab systems, refer to Section 6 (Maintenance) of the System Manual.

Run a ‘discharge’ for > 1 hour at ~500W (15cm or 35cm ion source), ~150W (3cm ion source).

Uninstallation and Disposal

Issue 1: February 00 Page 8-2 of 6 Printed: 25-May-05, 10:18

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

Systems without turbomolecular pumps:

4) Pump the system for one hour with a small N

flow, then pump for a further hour

with no gas flow.

5) The process chamber, load lock and transfer chamber (if applicable) should be

vented with dry nitrogen and the process gas inlet blanked.

6) Ensure that the system has been shut down in accordance with the procedure given

in Section 5 (Operating Instructions) and Appendix B (Operation and Maintenance of

Turbomolecular Pumps).

7) Depending on system type, ensure that the front panel compressed air lockout

valves are set to their OFF positions and padlocked. (e.g. slit valves, gate valves, RGA,

etc. if fitted)

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IMPORTANT: BEFORE DISCONNECTING ANY OF THE SERVICES, ENSURE THAT THEY

ARE TURNED OFF. E.G. COMPRESSED AIR AND GAS SUPPLY VALVES

SET TO THEIR OFF POSITIONS AND ELECTRICAL SUPPLIES SWITCHED

OFF AND LOCKED OUT.

1) Ensure that all covers and panels are fitted and attach notices to the system

indicating that the system is not ready for service.

2) Disconnect the electrical supply from the PC.

3) Disconnect the electrical supply from the safety isolation box to the system console.

4) At the system PC, disconnect the monitor, keyboard and mouse, then disconnect the

control cable(s) from the PC to the system console.

5) Disconnect the safety earth (ground) between the system and the gas pod, if the gas

pod is not bonded to the system.

6) Disconnect the cooling circuits from the system console. Coolant may be removed, if

so wished by using low pressure (< 1 bar gauge) compressed air. Do not seal the

cooling circuits tightly.

7) Disconnect the gas outlet line(s) and control cable from the gas pod to the system

services panel.

8) Disconnect the gas supplies to the gas pod (all gas supply valves closed).

9) Disconnect the compressed air supply from the system services panel(s) and from the

gas pod.

10) Disconnect the Nitrogen purge lines to the system services panel(s) and the rotary

vane pump(s).

11) Disconnect the rotary pump(s) from the system and cap the pump ports and the

system vacuum ports.

12) Disconnect the rotary vane pump exhaust line.

Uninstallation and Disposal

Printed: 25-May-05, 10:18 Page 8-3 of 6 Issue 1: February 00

mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

13) Disconnect the extraction collars on the process chamber(s) (e.g. ICP process

chambers) and the gas pod from the extraction systems.

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Remove any hazardous residues/deposits from the process chamber, ion sources, pumps and

pump lines, gas lines and mass flow controllers in accordance with local safety regulations.

Refer to equipment manufacturer’s manuals as necessary.

Note that if the system is to be moved and re-installed, it may be acceptable to purge the gas

lines / mass flow controllers and ion sources (if fitted) with dry nitrogen and seal all

connections.

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WARNING

LIFTING HEAVY OBJECTS INCORRECTLY CAN CAUSE SEVERE INJURY

When handling heavy system components such as the system unit or vacuum pumps,

ensure that the appropriate lifting equipment, operated by fully trained personnel, is

used.

When heavy rack-mounted components are handled, ensure that the weight is safely

distributed between sufficient personnel.

WARNING

TOPPLING (TIPOVER) HAZARD – SOME SYSTEM COMPONENTS, E.G. ROBOTIC HANDLERS

AND AUTOMATIC LOAD LOCKS / TRANSFER CHAMBERS (ESPECIALLY IF FITTED WITH

CASSETTE LOAD LOCKS) CAN TOPPLE CAUSING SEVERE INJURY.

When transporting or manoeuvring the system frames, robotic handlers etc., ensure

that they remain vertical at all times and use the appropriate lifting / handling

equipment.

Ensure that any support frames, supplied with the system, are correctly fitted

whenever the system is transported / manoeuvred or dismantled for service /

maintenance.

It is entirely the user’s responsibility to ensure that all components are supported

safely before and during any transporting, manoeuvring or maintenance operations.

Support frames provided by Oxford Instruments Plasma Technology are not

necessarily adequate for any such operations. The absence of a support frame must

not be taken as an indication that no further precautions need to be made before

such operations are undertaken.

1) In the grey area, remove the rotary vane pump from its mounting and prepare it for

transport in accordance with the pump manufacturer’s instructions. Refer to the

manufacturer’s literature in Volume 3 of this manual.

2) Remove the gas pod from its mounting and prepare it for transport.

3) Prepare the system PC for transport.

Uninstallation and Disposal

Issue 1: February 00 Page 8-4 of 6 Printed: 25-May-05, 10:18