Utah-94-721002-System-Manual.pdf - 第173页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅ ÜåçäçÖó== mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . UK= råáåëí~ää~íáçå=~åÇ=aáëéçë~ä= 8. Uninstallation an d…

mä~ëã~ä~Ä= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= System Manual

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Oxford Instruments Plasma Technolgy

North End, Yatton,

Bristol, BS49 4AP

Tel: +44(0)1934 837000

Fax: +44(0)1934 837001

Email:

plasma.technology@oxinst.co.uk

Web: www.oxford-

instruments.com/plmchp5.htm

USA

Oxford Instruments Inc.

130A Baker Avenue Extension

Concord, MA 01742

Tel: +1 978 369 9933

Toll Free +1 800-447-4717

Fax: +1 978 369 8287

Email:

info@ma.oxinst.com

Germany

Oxford Instruments GmbH

Otto-von-Guericke Ring 10,

D-65205 Wiesbaden

Tel: +49(0)6122 937161

Fax: +49(0)6122 937175

Email:

plasma@oxford.de

Japan

Oxford Instruments K.K.

2-11-6 Tomioka

Koto-ku, Tokyo 135-0047

Tel: +81-3-5245-3261

Fax: +81-3-5245-4466

Email:

oikkpt@oxinst.co.jp

Web: www.oxford-instruments.jp

People’s Republic of China (Beijing)

Oxford Instruments China

Room 714, Office Tower 3,

Henderson Center,

No. 18 Jianguomennei Ave,

Dongcheng District,

Beijing 100005

Tel: +86 106518 8160/1/2

Fax: +86 106518 8155

Email:

ptsales@oichina.cn

Web: www.oxford-instruments.com.cn

People’s Republic of China

(Shanghai)

Oxford Instruments China

Room 14-F, No.1 Plaza

800 Nanjing East Road

Shanghai 200001

Tel: +86 216360 8530

Fax: +86 216360 8535

Email:

ptsales@oichina.cn

Web: www.oxford-instruments.com.cn

Singapore

Oxford Instruments Pte. Ltd

371 Beach Road,

#02-07 Keypoint

Singapore 199597

Tel: +65 6337 6848

Fax: +65 6337 6286

Email:

oipt.sales@oxford-

instruments.com.sg

Taiwan

Oxford Instruments Overseas

Marketing Ltd.

1F, No 23 Jing-Shang 19

Street,

Hsinchu, Taiwan

Tel: +65 6337 6848

Fax: +65 6337 6286

Email:

oipt.sales@oxford-

instruments.com.sg

Process Information (Information contained in this document is confidential)

Issue 1: December 03 Page 30 of 30 Printed: 08 January 2006 09:37

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

UK= råáåëí~ää~íáçå=~åÇ=aáëéçë~ä=

Uninstallation and Disposal....................................................................................8-1

8.1 About this section ...........................................................................................................8-2

8.2 Uninstalling the system...................................................................................................8-2

8.2.1 General considerations for shutting the system down.........................................8-2

8.2.2 Shutting the system down......................................................................................8-2

8.2.3 Disconnecting the services......................................................................................8-3

8.2.4 Decontamination.....................................................................................................8-4

8.2.5 Dismantling the system components.....................................................................8-4

8.3 Disposal............................................................................................................................8-5

Uninstallation and Disposal

Printed: 25-May-05, 10:18 Page 8-1 of 6 Issue 1: February 00

mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

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This section gives guidance for the uninstallation of a mä~ëã~ä~Ä or fçåÑ~Ä system prior to

moving it to another location or disposing of it. Guidance is also given for the disposal of a

system.

The guidance given is by necessity of a general nature; detail will vary depending on system

type, customer’s site, etc.

IMPORTANT: BEFORE UNINSTALLING THE SYSTEM, ENSURE THAT ALL PERSONNEL

WHO WILL BE INVOLVED HAVE READ AND UNDERSTOOD SECTION 1

‘HEALTH AND SAFETY’ OF THE SYSTEM MANUAL.

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To uninstall the system, carry out the following sub-sections in sequence.

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The main use of this document will be when a customer requires to move a system to another

location. This will involve uninstalling the system, moving the system components and then

reinstalling the system. An important consideration is the length of time between shutting

the system down and powering the system up. The longer the system is shut down, the

greater the need to remove as much residue gas as possible.

It is very important that the customer follows the pump manufacturer’s instructions for

purging pumps prior to shut down. For periods of more than a few days shutdown, 24 hours

of N

purging is often recommended.

If the system is to be reinstalled, the vacuum system should be left fully vented with dry

nitrogen, with the pump and gas supply service points capped.

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1) Chamber

or ion source

plasma cleaning should be conducted to remove residues.

Use the normal cleaning process according to the most recent use of the tool.

2) Process gas supply lines must be pumped down using the system at least as far as the

last isolation valve upstream from the gas pod. Consider whether the gases should

be pumped out back to the cylinder, or whether the gas installation has alternative

means of exhausting hazardous gases. For shut down periods of longer than two

days, purge the gas lines with N

3) Pump the system according to the following criteria:

Systems fitted with turbomolecular pumps:

a) For a shut down period of less than two days, pump the system for three hours.

b) For a shutdown period of longer than two days: Pump the system for one hour with a

small N

flow, followed by a 12-hour pump down with no gas flow.

For Plasmalab systems, refer to Section 6 (Maintenance) of the System Manual.

Run a ‘discharge’ for > 1 hour at ~500W (15cm or 35cm ion source), ~150W (3cm ion source).

Uninstallation and Disposal

Issue 1: February 00 Page 8-2 of 6 Printed: 25-May-05, 10:18